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Method of and apparatus for tunable gas injection in a plasma processing system

  • US 20030019580A1
  • Filed: 09/23/2002
  • Published: 01/30/2003
  • Est. Priority Date: 03/30/2000
  • Status: Active Grant
First Claim
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1. A gas injection manifold apparatus for adjustably controlling the flow of gas into a vacuum chamber, comprising a plurality of adjustable nozzle units arranged in the chamber, wherein each nozzle unit has a through bore and comprises a translatable nozzle plug movably arranged within the through bore so as to alter the flow of gas through the bore and into the chamber when said nozzle plug is translated within said through bore.

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