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Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region

  • US 20030020083A1
  • Filed: 07/30/2001
  • Published: 01/30/2003
  • Est. Priority Date: 07/30/2001
  • Status: Active Grant
First Claim
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1. A method for forming a color filter image array optoelectronic microelectronic fabrication comprising:

  • providing a substrate having formed therein an array of photo active regions;

    forming over the array of photo active regions at least one color filter layer which provides an array of color filter regions which register with the array of photo active regions, wherein at least one color filter region within the array of color filter regions is formed with a concave upper surface; and

    forming upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface a planarizing layer.

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