Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region
First Claim
1. A method for forming a color filter image array optoelectronic microelectronic fabrication comprising:
- providing a substrate having formed therein an array of photo active regions;
forming over the array of photo active regions at least one color filter layer which provides an array of color filter regions which register with the array of photo active regions, wherein at least one color filter region within the array of color filter regions is formed with a concave upper surface; and
forming upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface a planarizing layer.
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Abstract
Within a method for forming a color filter image array optoelectronic microelectronic fabrication, and the color filter image array optoelectronic microelectronic fabrication formed employing the method, there is provided a substrate having formed therein a series of photo active regions. There is also formed over the substrate at least one color filter layer having formed therein a color filter region having a concave upper surface. There is also formed upon the at least one color filter layer and planarizing the at least one color filter region having the concave upper surface, a planarizing layer. The planarizing layer provides for enhanced resolution of the color filter image array optoelectronic microelectronic fabrication.
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Citations
14 Claims
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1. A method for forming a color filter image array optoelectronic microelectronic fabrication comprising:
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providing a substrate having formed therein an array of photo active regions;
forming over the array of photo active regions at least one color filter layer which provides an array of color filter regions which register with the array of photo active regions, wherein at least one color filter region within the array of color filter regions is formed with a concave upper surface; and
forming upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface a planarizing layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A color filter image array optoelectronic microelectronic fabrication comprising:
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a substrate having formed therein an array of photo active regions;
at least one color filter layer formed over the substrate and the array of photo active regions, where the at least one color filter layer provides an array of color filter regions which register with the array of photo active regions, further where at least one color filter region within the array of color filter regions is formed with a concave upper surface; and
a planarizing layer formed upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification