Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region

• US 20030020083A1
• Filed: 07/30/2001
• Published: 01/30/2003
• Est. Priority Date: 07/30/2001
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Wong, Fu-Tien, Yang, Sung-Yung, Kuo, Chin-Chen, Chang, Chih-Kung, Hsiao, Yu-Kung, Hsiung, Chung-Sheng, Lu, Kuo-Liang
• Granted Patent: US 6,590,239 B2
• Time in Patent Office: Days
• US Class Current: 257/89
• CPC Class Codes: H01L 27/14627 Microlenses
• CPC Class Codes: H01L 27/14685 Process for coatings or optical elements
• CPC Class Codes: H01L 27/156 two-dimensional arrays
• CPC Class Codes: H01L 31/02162 for filtering or shielding light, e.g. multicolour filters for photodetectors

Abstract

Within a method for forming a color filter image array optoelectronic microelectronic fabrication, and the color filter image array optoelectronic microelectronic fabrication formed employing the method, there is provided a substrate having formed therein a series of photo active regions. There is also formed over the substrate at least one color filter layer having formed therein a color filter region having a concave upper surface. There is also formed upon the at least one color filter layer and planarizing the at least one color filter region having the concave upper surface, a planarizing layer. The planarizing layer provides for enhanced resolution of the color filter image array optoelectronic microelectronic fabrication.

Claims

1. A method for forming a color filter image array optoelectronic microelectronic fabrication comprising:

providing a substrate having formed therein an array of photo active regions;

forming over the array of photo active regions at least one color filter layer which provides an array of color filter regions which register with the array of photo active regions, wherein at least one color filter region within the array of color filter regions is formed with a concave upper surface; and

forming upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface a planarizing layer.

2. The method of claim 1 wherein the array of photo active regions is an array of photo diodes.

3. The method of claim 1 wherein the array of photo active regions is an array of light emitting diodes.

4. The method of claim 1 wherein the at least one color filter layer is a single layer color filter layer having formed horizontally adjacent therein the array of color filter regions.

5. The method of claim 1 wherein each color filter region within the array of color filter regions has a linewidth of from about 2 to about 15 microns.

6. The method of claim 1 wherein the concave upper surface has a concavity of depth from about 5000 to about 35000 angstroms.

7. The method of claim 1 wherein an index of refraction of the planarizing layer is matched to an index of refraction of the at least one color filter region having the concave upper surface.

8. A color filter image array optoelectronic microelectronic fabrication comprising:

a substrate having formed therein an array of photo active regions;

at least one color filter layer formed over the substrate and the array of photo active regions, where the at least one color filter layer provides an array of color filter regions which register with the array of photo active regions, further where at least one color filter region within the array of color filter regions is formed with a concave upper surface; and

a planarizing layer formed upon the at least one layer color filter layer and planarizing the at least one color filter region which is formed with the concave upper surface.

9. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein the array of photo active regions is an array of photo diodes.

10. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein the array of photo active regions is an array of light emitting diodes.

11. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein the at least one color filter layer is a single layer color filter layer having formed horizontally adjacent therein the array of color filter regions.

12. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein each color filter region within the array of color filter regions has a linewidth of from about 2 to about 15 microns.

13. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein the concave upper surface has a concavity of depth from about 5000 to about 35000 angstroms.

14. The color filter image array optoelectronic microelectronic fabrication of claim 8 wherein an index of refraction of the planarizing layer is matched to an index of refraction of at least one color filter region having the concave upper surface.