Magnetic field sensor using microelectromechanical system
First Claim
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1. A microelectromechanical system (MEMS) sensor providing magnetic field measurement, the sensor comprising:
- a substrate supporting a first and second terminal;
a flexible conductor extending between the first and second terminals and positionable within a crossing magnetic field, the flexible conductor providing a path of conduction of a current between the first and second terminals; and
a detector communicating with the flexible conductor for detecting the Lorentz force deflection of the flexible conductor, the detector generating an output signal dependent on this force and thus on the strength of the crossing magnetic field.
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Abstract
A microelectromechanical systems (MEMS) Device manufactured on a microscopic scale using integrated circuit techniques provides a sensitive magnetic field sensor by detecting motion caused by the Lorentz force produced by a current through a MEMS conductor. The resulting MEMS may be used as a component in a variety of devices including current sensors and proximity sensors.
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Citations
49 Claims
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1. A microelectromechanical system (MEMS) sensor providing magnetic field measurement, the sensor comprising:
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a substrate supporting a first and second terminal;
a flexible conductor extending between the first and second terminals and positionable within a crossing magnetic field, the flexible conductor providing a path of conduction of a current between the first and second terminals; and
a detector communicating with the flexible conductor for detecting the Lorentz force deflection of the flexible conductor, the detector generating an output signal dependent on this force and thus on the strength of the crossing magnetic field. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A microelectromechanical system (MEMS) sensor providing magnetic field measurement, the sensor comprising:
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a substrate supporting a set of pylons;
a beam supported above the substrate by at least two pairs of opposing flexible arms extending transversely to the pylons on opposites sides of the beam;
a flexible conductor supported by one pair of opposing flexible arms to extending between a first and second terminals on corresponding opposed pylons, the flexible conductor positionable within a crossing magnetic field to provide a path of conduction of a current between the first and second terminals; and
a detector attached to the beam to the flexible conductor but insulated therefrom for detecting movement of the beam to produce an output signal dependent on a Lorentz force acting on the flexible conductor and thus on the strength of the crossing magnetic field.
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31. A method of sensing a magnetic field using a microelectromechanical system (MEMS) comprising the steps of:
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positioning a flexible MEMS conductor between a first and second terminal within a crossing magnetic field;
applying a proof current to the flexible MEMS conductor; and
detecting a Lorentz force induced deflection of the flexible MEMS conductor to generate an output signal dependent on the Lorentz force and thus on the strength of the crossing magnetic field. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification