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Magnetic field sensor using microelectromechanical system

  • US 20030020472A1
  • Filed: 09/27/2001
  • Published: 01/30/2003
  • Est. Priority Date: 07/30/2001
  • Status: Active Grant
First Claim
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1. A microelectromechanical system (MEMS) sensor providing magnetic field measurement, the sensor comprising:

  • a substrate supporting a first and second terminal;

    a flexible conductor extending between the first and second terminals and positionable within a crossing magnetic field, the flexible conductor providing a path of conduction of a current between the first and second terminals; and

    a detector communicating with the flexible conductor for detecting the Lorentz force deflection of the flexible conductor, the detector generating an output signal dependent on this force and thus on the strength of the crossing magnetic field.

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