Multiple local probe measuring device and method

• US 20030020500A1
• Filed: 09/24/2002
• Published: 01/30/2003
• Est. Priority Date: 09/20/1999
• Status: Active Grant

• Current Assignee: European Molecular Biology Laboratory
• Original Assignee: European Molecular Biology Laboratory
• Inventors: Horber, Johann Karl Heinrich, Altmann, Stephan Maximilian
• Granted Patent: US 6,798,226 B2
• Time in Patent Office: Days
• US Class Current: 324/750
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 40/00 Calibration, e.g. of probes
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/869 Optical microscope
• CPC Class Codes: Y10S 977/874 Probe tip array
• CPC Class Codes: Y10S 977/875 with tip detail

Abstract

The invention provides a local probe measuring device for effecting local measurements refering to a sample, comprising a first local probe for local measurements with respect to a sample or a reference surface, a second local probe for local measurements with respect to the sample or the reference surface, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first local probe with respect to the sample or the reference surface and a second measurement condition of the second local probe with respect to the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to independently detect first measurement data refering to local measurements effected by said first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data refering to local measurements effected by said second local probe. Further, methods for effecting local measurements and local manipulations by means of multiple local probes are provided.

Claims

1. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface,

a second local probe for local measurements with respect to the sample or the reference surface,

a rigid mechanical coupling between the first local probe and the second local probe,

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface and

a second measurement condition of the second local probe with respect to the sample or the reference surface,

a detection arrangement comprising

a first detection arrangement associated with the first local probe adapted to independently detect first measurement data refering to local measurements effected by said first local probe and

a second detection arrangement associated with the second local probe adapted to independently detect second measurement data refering to local measurements effected by said second local probe.

2. The device according to claim 1, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

3. The device according to claim 1, characterized in that said rigid mechanical coupling has associated a resonance frequency well above at least one of a resonance frequency or resonance frequencies associated with said local probes and a limiting frequency associated with said detection arrangement.

4. The device according to claim 1, characterized in that at least one of said first and second probes is adapted to interact locally with the sample or the reference surface.

5. The device according to claim 1, characterized in that said adjustment of said first measurement condition comprises at least one of an adjustment of a first distance of the first local probe with respect to the sample or the reference surface and an adjustment of a first local interaction of the first local probe with the sample or the reference surface.

6. The device according to claim 1, characterized in that said adjustment of said second measurement condition comprises at least one of an adjustment of a second distance of the second local probe with respect to the sample or the reference surface and an adjustment of a second local interaction of the first local probe with the sample or the reference surface.

7. The device according to claim 1, characterized in that said first detection arrangement is adapted to detect a first interaction of said first local probe with the sample or the reference surface independently of any interaction of said second local probe with the sample or the reference surface to obtain said first measurement data.

8. The device according to claim 1, characterized in that said second detection arrangement is adapted to detect a second interaction of said second local probe with the sample or the reference surface independently of any interaction of said first local probe with the sample or the reference surface to obtain said second measurement data.

9. The device according to claim 1, characterized by a a controller adapted to control via said positioning arrangement said distance relations on the basis of at least one of said first and second measurement data.

10. The device according to claim 7, characterized in that said controller and said detection arrangement are adapted to adjust via said positioning arrangement at least one of said first and second measurement conditions on the basis of one of said first and second measurement data and then to obtain the respective other of said first and second measurement data for the adjusted measurement condition.

11. The device according to claim 8, characterized in that said controller, said positioning arrangement and said detection arrangement are adapted

to adjust said first measurement condition on the basis of said first measurement data and then to obtain said second measurement data for the resulting second measurement condition or

to adjust said second measurement condition on the basis of said second measurement data and then to obtain said first measurement data for the resulting first measurement condition.

12. The device according to one of claims 9 to 11, characterized in that at least one of said first and second measurement conditions is roughly adjusted on the basis of one of said first and second measurement data and is finely adjusted on the basis of the other of said first and second measurement data.

13. The device according to one of claims 9 to 11, characterized in that at least one of said first and second measurement conditions is adjusted on the basis of one of said first and second measurement data according to a time constant and is adjusted on the basis of the other of said first and second measurement data according to another time constant.

14. The decice according to claim 11, characterized in that said controller and said detection arrangement are adapted to obtain first measurement data as a function of second measurement data or vice versa.

15. The device according to claim 9, characterized in that said controller and said detection arrangement are adapted to manipulate said sample via said positioning arrangement and one of said first and second local probes with reference to measurement data refering to local measurements effected by the respective other local probe.

16. The device according to claim 1, characterized by a feedback control loop comprising said positioning arrangement and one of said first and second detection arrangements to stabilize at least on of said first and second measurement conditions.

17. The device according to claim 16, characterized in that said feedback control loop ist adapted to stabilize a distance or interaction relation for at least on of said first and second local probes with respect to said sample or said reference surface.

18. The device according to claim 16 or 17, characterized in that said feedback control loop comprises two feedback control sub-loops, one comprising one of said first and second detection arrangements and the other comprising the other of said first and second detection arrangements, said feedback control loops having different time constants.

19. The device according to claim 1, characterized in that more than two local probes are provided for local local measurements with respect to the sample or the reference surface, which are rigidly mechanically coupled with each other and are commonly adjustable by the positioning arrangement.

20. The device according to claim 19, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

21. The device according to claim 19, characterized in that said detection arrangement is adapted to independently detect measurement data refering to local measurements effected by each local probe.

22. The device according to claim 1 or 21, characterized by provisions to control measurement conditions of at least one of said local probes via said positioning arrangement on the basis of local measurements effected by at least one other local probe of said local probes.

23. The device according to claim 21, characterized by provisions to control measurement conditions of one of said local probes on the basis of local measurements effected by at least three other local probes of said local probes, which are arranged around said one local probe.

24. The device according to claim 1 or 21, characterized in that at least on of said local probes is functionalized with respect to the sample.

25. The device according to claim 1 or 21, characterized in that said positioning arrangement is adapted to effect a lateral scanning of said sample or said reference surface by said local probes.

26. The device according to claim 1 or 21, characterized in that a distance between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is adjustable.

27. The device according to claim 26, characterized in that the distance is adjustable by tilting at least on of a mounting arrangement of said local probes and a probe substrate integral with said local probes.

28. The device according to claim 1, characterized in that a distance in the order of a typical interaction length associated with the interaction of one of said local probes with said sample or reference surface is provided or is adjustable between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface.

29. The device according to claim 1, characterized in that a distance of about 1 to 50 μ

m between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is provided or is adjustable.

30. The device according to claim 1 or 21, characterized in that said detection arrangement comprises an optical detection arrangement.

31. The device according to claim 30, characterized in that said detection arrangement comprises at least one laser source and for at least one of said local probes a respective position sensitive detector adapted to receive a laser beam reflected by the respective local probe.

32. The device according to claim 31, characterized in that a laser beam directed to said first local probe and the resulting reflected laser beam extend in a first plane and a laser beam directed to said second local probe and the resulting reflected laser beam extend in a second plane, said planes are arranged at an angle with respect to each other.

33. The device according to claim 32, characterized in that said angle amounts to about 90°

.

34. The device according to claim 1 or 21, characterized in that said detection arrangement comprises an piezo-electrical detection arrangement, wherein at least one of said local probes comprises piezo-electrical material sensitive to movements of the respective local probe.

35. The device according to claim 1 or 21, characterized in that at least on of said local probes is one of an atomic force microscopy probe, a lateral force microscopy probe, a tunneling microscopy probe, a magnetic force microscopy probe, an electric force microscopy probe, a near-field optical microscopy probe and an other local probe microscopy probe.

36. The device according claim 35, characterized in that said local probes are of the same probe type.

37. The device according to claim 36, characterized in that at least two of said local probes are of different probe type.

38. The device according to claim 1 or 21, characterized in that at least one of said local probes has associated an interaction field generator generating an interaction field to bring about or to influence an local interaction of the respective local probe with the sample or the reference surface.

39. The device according to claim 38, characterized in that said interaction field is an electromagnetic or optical field interacting with the sample or the reference surface.

40. The device according to claim 38, characterized by said local interaction of the respective local probe with said sample or said reference surface being a detection of a response of the sample or the reference surface to the interaction field.

41. The device according to claim 38, characterized by said detection of said response comprising a detection of an optical near-field resulting from an illumination of said sample or reference surface by an optical field serving as said interaction field, the respective local probe having associated an aperture to serve as near-field optical microscopy probe.

42. The device according to claim 1 or 21, characterized in that at least one of said local probes has associated an interaction medium supply or an interaction medium receptacle for bringing or holding interaction medium in a region around at least an interaction portion of the respective local probe and at least a portion of said sample or said reference surface near said interaction portion or the respective local probe, said interaction medium bringing about or influencing a local interaction of the respective local probe with the sample or the reference surface.

127. The device according to at least one of claims 115 to 126, characterized by at least one feature disclosed in anyone of the preceeding claims 1 to 114.

131. The method according to claim 128, characterized by using a local probe measuring device defined by one of claims 1 to 127.

158. The method according to claim 155, characterized by using a local probe measuring device defined by one of claims 1 to 127.

43. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface,

a second local probe adapted to interact locally with the sample or a reference surface,

a rigid mechanical coupling between the first local probe and the second local probe,

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first probe with the sample or the reference surface and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface,

a detection arrangement comprising

a first detection arrangement associated with the first local probe adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction and

a second detection arrangement associated with the second local probe adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first interaction.

44. The device according to claim 43, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

45. The device according to claim 43, characterized in that said rigid mechanical coupling has associated a resonance frequency well above at least one of a resonance frequency or resonance frequencies associated with said local probes and a limiting frequency associated with said detection arrangement.

46. The device according to claim 43, characterized by a a controller adapted to control via said positioning arrangement said first distance or said first local interaction on the one hand and said second distance or said second local interaction on the other hand on the basis of at least one of said detected first and second distances or on the basis of at least one of said detected first and said detected second interactions.

47. The device according to claim 46, characterized in that said controller and said detection arrangement are adapted to adjust via said positioning arrangement at least one of said first and second distances or one of said first and second interactions on the basis of said one detected distance or interaction and then to measure the other of said first and second distances or the other of said first and second interactions.

48. The device according to claim 47, characterized in that said controller, said positioning arrangement and said detection arrangement are adapted

to adjust said first distance or said first interaction on the basis of said detected first distance or interaction and then to measure said second distance or interaction for the resulting adjustment of the second local probe or

to adjust said second distance or said second interaction on the basis of said detected second distance or interaction and then to measure said first distance or interaction for the resulting adjustment of the first local probe.

49. The device according to one of claims 46 to 48, characterized in that the respective distance or the respective interaction is roughly adjusted on the basis of one of said first and second distance or interaction and is finely adjusted on the basis of the other of said first and second distance or interaction.

50. The device according to one of claims 46 to 48, characterized in that the respective distance or interaction is adjusted on the basis of one of said first and second distance or interaction according to a time constant and is adjusted on the basis of the other of said first and second distance or interaction according to another time constant.

51. The device according to claim 48, characterized in that said controller and said detection arrangement are adapted to measure said first distance or interaction as a function of said second distance or interaction or vice versa.

52. The device according to claim 46, characterized in that said controller and said detection arrangement are adapted to manipulate said sample via said positioning arrrangement and one of said first and second local probes with reference to the respective distance or interaction of the other local probe.

53. The device according to claim 43, characterized by a feedback control loop comprising said positioning arrangement and one of said first and second detection arrangements to stabilize a distance or interaction relation for at least on of said first and second local probes with respect to said sample or said reference surface.

54. The device according to claim 53, characterized in that said feedback control loop comprises two feedback control sub-loops, one comprising one of said first and second detection arrangements and the other comprising the other of said first and second detection arrangements, said feedback control loops having different time constants.

55. The device according to claim 43, characterized in that more than two local probes adapted to interact locally with the sample or the reference surface are provided, which are rigidly mechanically coupled with each other and are commonly adjustable by the positioning arrangement.

56. The device according to claim 55, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

57. The device according to claim 55, characterized in that said detection arrangement is adapted to independently detect the distance of each local probe with respect to the sample or the reference surface or the interaction of each local probe with the sample or the reference surface.

58. The device according to claim 43 or 57, characterized by provisions to control measurement conditions of at least one of said local probes via said positioning arrangement on the basis of detection results obtained for of at least one other local probe of said local probes.

59. The device according to claim 57, characterized by provisions to control measurement conditions of one of said local probes via said positioning arrangement on the basis of detection results obtained for at least three other local probes of said local probes, which are arranged around said one local probe.

60. The device according to claim 43 or 57, characterized in that at least one of said local probes is functionalized with respect to the sample.

61. The device according to claim 43 or 57, characterized in that said positioning arrangement is adapted to effect a lateral scanning of said sample or said reference surface by said local probes.

62. The device according to claim 43 or 57, characterized in that a distance between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is adjustable.

63. The device according to claim 62, characterized in that the distance is adjustable by tilting at least on of a mounting arrangement of said local probes and a probe substrate integral with said local probes.

64. The device according to claim 43, characterized in that a distance in the order of a typical interaction length associated with the interaction of one of said local probes with said sample or reference surface is provided or is adjustable between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface.

65. The device according to claim 43, characterized in that a distance of about 1 to 50 μ

m between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is provided or is adjustable.

66. The device according to claim 43 or 57, characterized in that said detection arrangement comprises an optical detection arrangement.

67. The device according to claim 66, characterized in that said detection arrangement comprises at least one laser source and for at least one of said local probes a respective position sensitive detector adapted to receive a laser beam reflected by the respective local probe.

68. The device according to claim 67, characterized in that a laser beam directed to said first local probe and the resulting reflected laser beam extend in a first plane and a laser beam directed to said second local probe and the resulting reflected laser beam extend in a second plane, said planes are arranged at an angle with respect to each other.

69. The device according to claim 68, characterized in that said angle amounts to about 90°

.

70. The device according to claim 43 or 57, characterized in that said detection arrangement comprises an piezo-electrical detection arrangement, wherein at least one of said local probes comprises piezo-electrical material sensitive to movements of the respective local probe.

71. The device according to claim 43 or 57, characterized in that at least on of said local probes is one of an atomic force microscopy probe, a lateral force microscopy probe, a tunneling microscopy probe, a magnetic force microscopy probe, an electric force microscopy probe, a near-field optical microscopy probe and an other local probe microscopy probe.

72. The device according claim 71, characterized in that said local probes are of the same probe type.

73. The device according to claim 71, characterized in that at least two of said local probes are of different probe type.

74. The device according to claim 43 or 57, characterized in that at least one of said local probes has associated an interaction field generator generating an interaction field to bring about or to influence said local interaction of the respective local probe with the sample or the reference surface.

75. The device according to claim 74, characterized in that said interaction field is an electromagnetic or optical field interacting with the sample or the reference surface.

76. The device according to claim 75, characterized by said local interaction of the respective local probe with said sample or said reference surface being a detection of a response of the sample or the reference surface to the interaction field.

77. The device according to claim 76, characterized by said detection of said response comprising a detection of an optical near-field resulting from an illumination of said sample or reference surface by an optical field serving as interaction field, the respective local probe having associated an aperture to serve as near-field optical microscopy probe.

78. The device according to claim 43 or 57, characterized in that at least one of said local probes has associated an interaction medium supply or an interaction medium receptacle for bringing or holding interaction medium in a region around at least an interaction portion of the respective local probe and at least a portion of said sample or said reference surface near said interaction portion or the respective local probe, said interaction medium bringing about or influencing said local interaction of the respective local probe with the sample or the reference surface.

79. A local probe measuring device for measuring local interactions between a cantilever probe arrangement and a sample, comprising:

a first cantilever probe adapted to interact locally with a sample or a reference surface,

a second cantilever probe adapted to interact locally with the sample or a reference surface,

a rigid mechanical coupling between a base section of the first cantilever probe and a base section of the second cantilever probe,

a positioning arrangement adapted to commonly adjust

a first distance of the base section of the first cantilever probe with respect to the sample or the reference surface and

a second distance of the base section of the second local probe with respect to the sample or the reference surface,

a detection arrangement comprising

a first detection arrangement associated with the first cantilever probe adapted to independently detect at least one of a first deflection of the first cantilever probe and a first local interaction of the first cantilever probe with said sample or reference surface and

a second detection arrangement associated with the second cantilever probe adapted to independently detect at least one of a second deflection of the second cantilever probe and a second local interaction of the second cantilever probe with said sample or reference surface.

80. The device according to claim 79, characterized in that said rigid mechanical coupling extends over a coupling path between said cantilever probes having a path length in the order of magnitude as dimensions of the cantilever probes itself.

81. The device according to claim 79, characterized in that said rigid mechanical coupling has associated a resonance frequency well above at least one of a resonance frequency or resonance frequencies associated with said cantilever probes and a limiting frequency associated with said detection arrangement.

82. The device according to claim 79, characterized by a a controller adapted to control via said positioning arrangement said first distance on the one hand and said second distance on the other hand on the basis of at least one of said detected first and second deflections or on the basis of at least one of said detected first and second local interactions.

83. The device according to claim 82, characterized in that said controller and said detection arrangement are adapted to adjust via said positioning arrangement at least one of said first and second deflections or one of said first and second local interactions on the basis of said one detected deflection or interaction and then to measure the other of said first and second deflections or the other of said first and second interactions.

84. The device according to claim 83, characterized in that said controller, said positioning arrangement and said detection arrangement are adapted

to adjust said first deflection or interaction on the basis of said detected first deflection or interaction and then to measure said second deflection or interaction for the resulting second distance or

to adjust said second deflection or interaction on the basis of said detected second deflection or interaction and then to measure said first deflection or interaction for the resulting first distance.

85. The device according to one of claims 82 to 84, characterized in that the respective deflection or the respective interaction is roughly adjusted on the basis of one of said first and second deflection or interaction and is finely adjusted on the basis of the other of said first and second deflection or interaction.

86. The device according to one of claims 82 to 84, characterized in that the respective deflection or interaction is adjusted on the basis of one of said first and second deflection or interaction according to a time constant and is adjusted on the basis of the other of said first and second deflection or interaction according to another time constant.

87. The decice according to claim 84, characterized in that said controller and said detection arrangement are adapted to measure said first deflection or interaction as a function of said second deflection or interaction or vice versa.

88. The device according to claim 82, characterized in that said controller and said detection arrangement are adapted to manipulate said sample via said positioning arrrangement and one of said first and second cantlilever probes with reference to the respective deflection or interaction of the other cantilever probe.

89. The device according to claim 79, characterized by a feedback control loop comprising said positioning arrangement and one of said first and second detection arrangements to stabilize at least one of said first and second distances with respect to said sample or said reference surface.

90. The device according to claim 89, characterized in that said feedback control loop comprises two feedback control sub-loops, one comprising one of said first and second deflection arrangements and the other comprising the other of said first and second detection arrangements and the other comprising the other of said first and second detection arrangements, said feedback control loops having different time constants.

91. The device according to claim 79, characterized in that more than two cantilever probes adapted to interact locally with the sample or the reference surface are provided, which are rigidly mechanically coupled with each other at a respective cantilever base portion and are commonly adjustable by the positioning arrangement.

92. The device according to claim 91, characterized in that said rigid mechanical coupling extends over a coupling path between said cantilever probes having a path length in the order of magnitude as dimensions of the cantilever probes itself.

93. The device according to claim 91, characterized in that said detection arrangement is adapted to independently detect a respective deflection or interaction of each cantilever probe.

94. The device according to claim 79 or 93, characterized by provisions to control a distance of the base section of at least one of said cantilever probes with respect to the sample or the reference surface via said positioning arrangement on the basis of deflection or interaction results obtained for of at least one other cantilever probe of said cantilever probes.

95. The device according to claim 93, characterized by provisions to control a distance of the base section of one of said cantilever probes with respect to the sample or the reference surface via said positioning arrangement on the basis of deflection or interaction results obtained for of at least three other cantilever probe of said cantilever probes, which are arranged around said one cantilever probe.

96. The device according to claim 79 or 93, characterized in that at least one of said cantilever probes is functionalized with respect to the sample.

97. The device according to claim 79 or 93, characterized in that said positioning arrangement is adapted to effect a lateral scanning of said sample or said reference surface by said cantilever probes.

98. The device according to claim 79 or 93, characterized in that a distance between tip sections of said cantilever probes in a height direction associated with said sample or said reference surface is adjustable.

99. The device according to claim 98, characterized in that the distance is adjustable by tilting at least on of a mounting arrangement of said cantilever probes and a cantilever substrate integral with said cantilever probes.

100. The device according to claim 79, characterized in that a distance in the order of a typical interaction length associated with the interaction of one of said cantilever probes with said sample or reference surface is provided or is adjustable between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface.

101. The device according to claim 79, characterized in that a distance of about 1 to 50 μ

m between tip sections of said cantilever probes in a height direction associated with said sample or said reference surface is provided or is adjustable.

102. The device according to claim 79 or 93, characterized in that said detection arrangement comprises an optical detection arrangement.

103. The device according to claim 102, characterized in that said detection arrangement comprises at least one laser source and for at least one of said cantilever probes a respective position sensitive detector adapted to receive a laser beam reflected by a tip portion of the respective cantilever probe.

104. The device according to claim 103, characterized in that a laser beam directed to the tip portion of said first cantilever probe and the resulting reflected laser beam extend in a first plane and a laser beam directed to the tip portion of said second cantilever probe and the resulting reflected laser beam extend in a second plane, said planes are arranged at an angle with respect to each other.

105. The device according to claim 104, characterized in that said angle amounts to about 90°

.

106. The device according to claim 79 or 93, characterized in that said detection arrangement comprises an piezo-electrical detection arrangement, wherein at least one of said cantilever probes comprises piezo-electrical material sensitive to the deflection of the respective cantilever probe.

107. The device according to claim 79 or 93, characterized in that at least on of said cantilever probes is one of an atomic force microscopy probe, lateral force microscopy probe, a tunneling microscopy probe, a magnetic force microscopy probe, an electric force microscopy probe, a near-field optical microscopy probe and an other local probe microscopy probe.

108. The device according claim 107, characterized in that said cantilever probes are of the same probe type.

109. The device according to claim 107, characterized in that at least two of said cantilever probes are of different probe type.

110. The device according to claim 79 or 93, characterized in that at least one of said cantilever probes has associated an interaction field generator generating an interaction field to bring about or to influence said local interaction of the respective cantilever probe with the sample or the reference surface.

111. The device according to claim 110, characterized in that said interaction field is an electromagnetic or optical field interacting with the sample or the reference surface.

112. The device according to claim 111, characterized by said local interaction of the respective cantilever probe with said sample or said reference surface being a detection of a response of the sample or the reference surface to the interaction field.

113. The device according to claim 112, characterized by said detection of said response comprising a detection of an optical near-field resulting from an illumination of said sample or reference surface by an optical field serving as interaction field, the respective cantilever probe having associated an aperture to serve as near-field optical microscopy probe.

114. The device according to claim 79 or 93, characterized in that at least one of said cantilever probes has associated an interaction medium supply or an interaction medium receptacle for bringing or holding interaction medium in a region around at least an interaction portion of the respective cantilever probe and at least a portion of said sample or said reference surface near said interaction portion or the respective cantilever probe, said interaction medium bringing about or influencing said local interaction of the respective cantilever probe with the sample or the reference surface.

115. A local probe measuring device for effecting local measurements refering to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface,

a second local probe for local measurements with respect to the sample or the reference surface,

a measurement condition adjustment arrangement adapted to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface and

a second measurement condition of the second local probe with respect to the sample or the reference surface,

a detection arrangement comprising

a first detection arrangement associated with the first local probe adapted to independently detect first measurement data refering to local measurements effected by said first local probe and

a second detection arrangement associated with the second local probe adapted to independently detect second measurement data refering to local measurements effected by said second local probe.

116. The device according to claim 115, characterized by a a controller adapted to control via said measurement condition adjustment arrangement said first and second measurement conditions on the basis of at least one of said first and second measurement data.

117. The device according to claim 116, characterized in that said controller and said detection arrangement are adapted to adjust via said measurement condition adjustment arrangement at least one of said first and second measurement conditions on the basis of one of said first and second measurement data and then to obtain the respective other of said first and second measurement data for the adjusted measurement condition.

118. The device according to claim 117, characterized in that said controller, said positioning arrangement and said detection arrangement are adapted

to adjust said first measurement condition on the basis of said first measurement data and then to obtain said second measurement data for the resulting second measurement condition or

to adjust said second measurement condition on the basis of said second measurement data and then to obtain said first measurement data for the resulting first measurement condition.

119. The device according to one of claims 116 to 118, characterized in that at least one of said first and second measurement conditions is roughly adjusted on the basis of one of said first and second measurement data and is finely adjusted on the basis of the other of said first and second measurement data.

120. The device according to one of claims 116 to 118, characterized in that at least one of said first and second measurement conditions is adjusted on the basis of one of said first and second measurement data according to a time constant and is adjusted on the basis of the other of said first and second measurement data according to another time constant.

121. The device according to claim 115, characterized in that said first and second measurement conditions comprise distance relations of the local probes with respect to the sample or the reference surface.

122. The device according to claim 121, characterized in that said measurement condition adjustment arrangement comprises a positioning arrangement adapted to commonly adjust said distance relations.

123. The device according to claim 115, characterized in that more than two local probes are provided for local measurements with respect to the sample or the reference surface, the measurement conditions of said local probes being commonly adjustable by said measurement condition adjustment arrangement.

124. The device according to claim 123, characterized in that said detection arrangement is adapted to independently detect measurement data refering to local measurements effected by each local probe.

125. The device according to claim 115 or 124, characterized by provisions to control measurement conditions of at least one of said local probes via said measurement condition adjustment arrangement on the basis of local measurements effected by at least one other local probe of said local probes.

126. The device according to claim 125, characterized by provisions to control measurement conditions of one of said local probes on the basis of local measurements effected by at least three other local probes of said local probes, which are arranged around said one local probe.

128. A method of effecting local measurements refering to a sample, comprising:

providing at least two local probes in a positional relation with respect to a sample or a reference surface,

adjusting a respective measurement condition for at least one of said local probes on the basis of measurements effected with respect to at least one other of said local probes,

effecting a measurement with respect said at least one local probe with reference to said measurements effected with respect to said at least one other local probe.

129. The method according to claim 128, characterized in that said local probes are rigidly mechanically coupled with each other.

130. The method according to claim 129, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

132. The method according to claim 128, characterized in that local measurement data are obtained comprising interaction data indicating a local interaction with said sample or reference surface sensed by at least one of said local probes and associated distance data indicating a distance relation of said at least one local probe with respect to said sample or said reference surface, said distance data being obtained or calibrated on the basis of measurements concomitantly effected with respect to at least one other of said local probes.

133. The method according to claim 128 or 132, characterized by scanning said local probes in a height direction associated with said sample or said reference surface.

134. The method according to claim 133, characterized by sensing interaction-distance-profiles indicating a dependency of a local interaction sensed by a respective local probe of a distance of said respective local probe with respect to said sample or said reference surface.

135. The method according to claim 134, characterized in that said interaction-distance profiles comprise force-distance-profiles.

136. The method according to claim 134, characterized in that said interaction-distance profiles comprise current-distance-profiles.

137. The method according to claim 128 or 132, characterized in that thermal position fluctuations of at least one of said local probes are detected.

138. The method according to claim 137, characterized in that said position fluctations are detected for distance relations of said at least one local probe with respect to said sample or said reference surface, which are defined by measurements concomitantly effected with respect to at least one other of said local probes.

139. The method according to claim 128, characterized in that said sample is one of an atomic, molecular and macromolecular sample.

140. The method according to claim 128, characterized in that said sample is a biological sample.

141. The method according to claim 128, characterized in that said sample is a semiconductor sample.

142. The method according to claim 128, characterized in that said sample is a magnetic storage disc type sample.

143. The method according to claim 128, characterized by the step to functionalize at least one of said local probes with respect to the sample or the reference surface.

144. The method according to claim 143, characterized in that said functionalization involves at least on of an attachment of functionalization material on the respective local probe, an chemical modification of at least a surface part of the respective local probe and an impressing an electric or magnetic field on the respective local probe.

145. The method according to claim 144, characterized in that said functionalization material is molecular material.

146. The method according to claim 145, characterized in that said molecular material is biological material.

147. The method according to claim 145, characterized in that said molecular material comprises at least one protein.

148. The method according to claim 147, characterized in that said protein is adapted to interact with at least one associated protein of the sample.

149. The method according to claim 145, characterized in that said molecular material comprises one of receptor molecules and ligand molecules.

150. The method according to claim 144, characterized in that said functionalization material is at least one of at least one single atom and at least one cluster of atoms.

151. The method according to claim 128, characterized in that at least one of an interaction field and an interaction medium is provided in interaction relation with at least one of said local probes and with said sample or said reference surface.

152. The method according to claim 151, characterized in that said interaction field is one of an electromagnetic field, an optical field, a static magnetic field and a static electric field.

153. The method according to claim 151, characterized in that said interaction medium is one of a liquid and a gas or one of a mixture of liquids and a mixture of gases.

154. The method according to claim 128, characterized in that said local probes and said sample or reference surface are held unter vacuum during said local measurements.

155. A method of effecting local manipulations refering to a sample, comprising:

providing at least two local probes in a positional relation with respect to a sample or a reference surface,

adjusting a respective manipulation condition for at least one of said local probes on the basis of measurements effected with respect to at least one other of said local probes,

manipulating said sample by means of said at least one local probe with reference to said measurements effected with respect to said at least one other local probe.

156. The method according to claim 155, characterized in that said local probes are rigidly mechanically coupled with each other.

157. The method according to claim 156, characterized in that said rigid mechanical coupling extends over a coupling path between said local probes having a path length in the order of magnitude as dimensions of the local probes itself.

159. The method according to claim 155, characterized in that said sample is one of an atomic, molecular and macromolecular sample.

160. The method according to claim 155, characterized in that said sample is a chemical or biological sample.

161. The method according to claim 160, characterized in that said manipulation involves at least on of an streching, an unfolding and unbinding of molecular bonds of proteins or polymers or other biological or chemical molecules.

162. The method according to claim 155, characterized by the step to functionalize at least one of said local probes with respect to the sample or the reference surface.

163. The method according to claim 162, characterized in that said functionalization involves at least on of an attachment of functionalization material on the respective local probe, an chemical modification of at least a surface part of the respective local probe and an impressing an electric or magnetic field on the respective local probe.

164. The method according to claim 163, characterized in that said functionalization material is molecular material.

165. The method according to claim 164, characterized in that said molecular material is biological material.

166. The method according to claim 164, characterized in that said molecular material comprises at least one protein.

167. The method according to claim 166, characterized in that said protein is adapted to interact with at least one associated protein of the sample.

168. The method according to claim 164, characterized in that said molecular material comprises one of receptor molecules and ligand molecules.

169. The method according to claim 163, characterized in that said functionalization material is at least one of at least one single atom and at least one cluster of atoms.

170. The method according to claim 155, characterized in that at least one of an interaction field and an interaction medium is provided in interaction relation with at least one of said local probes and with said sample or said reference surface.

171. The method according to claim 170, characterized in that said interaction field is one of an electromagnetic field, an optical field, a static magnetic field and a static electric field.

172. The method according to claim 170, characterized in that said interaction medium is one of a liquid and a gas or one of a mixture of liquids and a mixture of gases.

173. The method according to claim 155, characterized in that said local probes and said sample or reference surface are held under vacuum during said local manipulations.