Electrical power supply suitable in particular for DC plasma processing
First Claim
1. A power supply comprising a DC-DC converter which comprises (a) a first transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said first transformer having the same winding polarity;
- (b) a second transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said second transformer having opposite winding polarities;
said secondary winding of said first transformer having a terminal which is a first transformer output terminal, another terminal of said secondary winding of said first transformer and a terminal of said secondary winding of said second transformer being connected with each other at a node which is a second transformer output terminal, and said secondary winding of said second transformer having a terminal which is a third transformer output terminal;
(c) a first H-bridge switching circuit for selectively connecting a primary DC source to the primary winding of said first transformer, said first H-bridge switching circuit having a leading leg and a lagging leg, each of these legs including switching elements;
(d) a second H-bridge switching circuit for selectively connecting said primary DC source to the primary winding of said second transformer, said second H-bridge switching circuit having a leading leg and a lagging leg, each of these legs including switching elements;
(e) a bridge rectifier circuit connected to the secondary windings of said first and second transformers;
(f) a control circuit for providing (f.1) a first set of control pulses for effecting switching of switching elements of said leading leg of said first H-bridge switching circuit, (f.2) a second set of control pulses for effecting switching of switching elements of said lagging leg of said first H-bridge switching circuit, said second set of control pulses having an adjustable first phase delay with respect to said first set of control pulses, (f.3) a third set of control pulses for effecting switching of switching elements of said leading leg of said second H-bridge switching circuit, said third set of control pulses having an adjustable second phase delay with respect to said first set of control pulses, (f.4) a fourth set of control pulses for effecting switching of switching elements of said lagging leg of said second H-bridge switching circuit, said fourth set of control pulses having an adjustable third phase delay with respect to said third set of control pulses.
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Accused Products
Abstract
A power supply comprising a DC-DC converter which comprises
(a) a first transformer (11); (b) a second transformer (12);
(c) a first H-bridge switching circuit (13) for selectively connecting a primary DC source (14) to the primary winding of said first transformer;
(d) a second H-bridge (15) switching circuit for selectively connecting said primary DC source (14) to the primary winding of said second transformer (12);
(e) a bridge rectifier circuit (16) connected to the secondary windings of said first and second transformers; and
(f) a control circuit (17) for providing sets of control pulses for effecting switching of switching elements of the first and the second H-bridge switching circuits (13, 15).
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Citations
23 Claims
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1. A power supply comprising a DC-DC converter which comprises
(a) a first transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said first transformer having the same winding polarity; -
(b) a second transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said second transformer having opposite winding polarities;
said secondary winding of said first transformer having a terminal which is a first transformer output terminal, another terminal of said secondary winding of said first transformer and a terminal of said secondary winding of said second transformer being connected with each other at a node which is a second transformer output terminal, and said secondary winding of said second transformer having a terminal which is a third transformer output terminal;
(c) a first H-bridge switching circuit for selectively connecting a primary DC source to the primary winding of said first transformer, said first H-bridge switching circuit having a leading leg and a lagging leg, each of these legs including switching elements;
(d) a second H-bridge switching circuit for selectively connecting said primary DC source to the primary winding of said second transformer, said second H-bridge switching circuit having a leading leg and a lagging leg, each of these legs including switching elements;
(e) a bridge rectifier circuit connected to the secondary windings of said first and second transformers;
(f) a control circuit for providing (f.1) a first set of control pulses for effecting switching of switching elements of said leading leg of said first H-bridge switching circuit, (f.2) a second set of control pulses for effecting switching of switching elements of said lagging leg of said first H-bridge switching circuit, said second set of control pulses having an adjustable first phase delay with respect to said first set of control pulses, (f.3) a third set of control pulses for effecting switching of switching elements of said leading leg of said second H-bridge switching circuit, said third set of control pulses having an adjustable second phase delay with respect to said first set of control pulses, (f.4) a fourth set of control pulses for effecting switching of switching elements of said lagging leg of said second H-bridge switching circuit, said fourth set of control pulses having an adjustable third phase delay with respect to said third set of control pulses. - View Dependent Claims (2, 3, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 23)
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4. A power supply comprising a DC-DC converter which comprises
(a) a first transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said first transformer having the same winding polarity; -
(b) a second transformer having a primary winding and a secondary winding, said primary winding and said secondary winding of said second transformer having opposite winding polarities;
said secondary winding of said first transformer having a terminal which is a first transformer output terminal, another terminal of said secondary winding of said first transformer and a terminal of said secondary winding of said second transformer being connected with each other at a node which is a second transformer output terminal, and said secondary winding of said second transformer having a terminal which is a third transformer output terminal;
(c) a first half bridge switching circuit and a second half bridge switching circuit for selectively connecting a primary DC source to the primary winding of said first transformer and to the primary winding of said second transformer, said first half bridge switching circuit forming a first leg, said second half bridge switching circuit forming a second leg, each of these legs including switching elements;
(d) a circuit formed by a series connection of a first capacitor and a second capacitor, said circuit being connected in parallel with said first leg and with said second leg, said circuit formed by said series connection of said first capacitor and said second capacitor having a node which a terminal of each of said first and second capacitors is connected to, said node being connected to a terminal of each of said primary windings of said first and said second transformers;
(e) a bridge rectifier circuit connected to the secondary windings of said first and second transformers;
(f) a control circuit for providing (f.1) a first set of control pulses for effecting switching of switching elements of said first leg formed by said first half bridge switching circuit, each of said control pulses of said first set having an adjustable duration, (f.2) a second set of control pulses for effecting switching of switching elements of said second leg formed by said second half bridge switching circuit, each of said control pulses of said second set having an adjustable duration, said second set of control pulses having a predetermined phase delay with respect to said first set of control pulses. - View Dependent Claims (5, 17, 18, 19, 20, 21, 22)
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Specification