Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography
First Claim
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1. A method of fabricating a polycrystalline film in a thermal evaporation system, the polycrystalline film being capable of directly detecting radiation, the method comprising:
- placing source material in a container;
evacuating the container to create vacuum within the container; and
heating the source material to evaporate the source material, wherein the evaporated source material is deposited on a substrate, wherein the polycrystalline film is used in as deposited form to detect the radiation.
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Abstract
A method is provided for fabricating in a thermal evaporation system a polycrystalline film capable of directly detecting radiation. Source material is placed in a container, and the container is evacuated to create vacuum within the container. The source material is heated to evaporate the source material for depositing on a substrate. The polycrystalline film is used in as deposited form to detect the radiation.
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Citations
30 Claims
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1. A method of fabricating a polycrystalline film in a thermal evaporation system, the polycrystalline film being capable of directly detecting radiation, the method comprising:
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placing source material in a container;
evacuating the container to create vacuum within the container; and
heating the source material to evaporate the source material, wherein the evaporated source material is deposited on a substrate, wherein the polycrystalline film is used in as deposited form to detect the radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A thermal evaporation system for fabricating a polycrystalline film, the polycrystalline film being capable of directly detecting radiation, the system comprising:
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a container adapted for creating vacuum within and for heating source material disposed therein;
a furnace enclosing at least a portion of the container, the furnace being capable of heating the container to evaporate the source material;
a substrate holder for holding the substrate, on which the evaporated source material is deposited for growth of the polycrystalline film; and
a temperature controlling system for maintaining the source material and the substrate at respective predetermined temperature ranges to control a growth rate of the polycrystalline film, whereby the polycrystalline film is capable of being applied in a radiation detector. - View Dependent Claims (19, 20, 21)
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22. A radiography system comprising:
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an array detector capable of receiving radiation and generating corresponding electrical signal, the array detector comprising a polycrystalline film fabricated through sublimation on a readout substrate, wherein the polycrystalline film is used in as deposited form after being grown on said readout substrate; and
an image processor coupled to the array detector to generate a displayable image from the electrical signal. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30)
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Specification