Structure and method for fabricating anopto-electronic device having an electrochromic switch

• US 20030022414A1
• Filed: 07/25/2001
• Published: 01/30/2003
• Est. Priority Date: 07/25/2001
• Status: Abandoned Application

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Chason, Marc, Gamota, Daniel, Lian, Keryn, Barenburg, Barbara Foley
• Application Number:
  US09/911,627
• Publication Number:
  US 20030022414A1
• Time in Patent Office: Days
• US Class Current: 438/80
• CPC Class Codes: H01L 27/144 Devices controlled by radiation
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission
• CPC Class Codes: H01S 2301/173 The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
• CPC Class Codes: H01S 5/021 Silicon based substrates
• CPC Class Codes: H01S 5/0261 Non-optical elements, e.g. laser driver components, heaters H01S5/0265 takes precedence
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Abstract

A opto-electronic semiconductor structure having an electrochromic switch includes a monocrystalline silicon substrate and an amorphous oxide material overlying the monocrystalline silicon substrate. A monocrystalline perovskite oxide material overlies the amorphous oxide material and a monocrystalline compound semiconductor material overlies the monocrystalline perovskite oxide material. An optical source component that is adapted to transmit radiant energy may be formed within the monocrystalline compound semiconductor material. An electrochromic switch may be optically coupled to the optical source component. An optical detector component that is adapted to receive radiant energy may be formed within the monocrystalline compound semiconductor material. An electrochromic switch may be optically coupled to the optical detector component.

Claims

1. A semiconductor structure comprising:

a monocrystalline silicon substrate;

an amorphous oxide material overlying the monocrystalline silicon substrate;

a monocrystalline perovskite oxide material overlying the amorphous oxide material;

a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;

an optical source component formed within the monocrystalline compound semiconductor material and adapted to transmit radiant energy; and

an electrochromic switch optically coupled to the optical source component.

2. The semiconductor structure of claim 1, wherein the electrochromic switch can be placed in one of first and second states.

3. The semiconductor structure of claim 2, wherein the electrochromic switch comprises a first electrochromic material layer which permits a first amount of transmitted radiant energy to pass through in the first state and a second amount of transmitted radiant energy transmission to pass through in the second state where the second amount is greater than the first amount.

4. The semiconductor structure of claim 3, wherein the first electrochromic material layer comprises one of a cathodic material, an anodic material and a cathodic/anodic material.

5. The semiconductor structure of claim 3, wherein the first electrochromic material layer is disposed between first and second transparent electrically conductive layers.

6. The semiconductor structure of claim 3, wherein the electrochromic switch includes a transparent substrate formed from one of an organic polymer material and a ceramic material.

7. The semiconductor structure of claim 3, wherein the first electrochromic material layer is disposed between first and second transparent substrates.

8. The semiconductor structure of claim 3, further including an ion conductor layer and an ion storage layer wherein the ion conductor layer is disposed between the first electrochromic material layer and the ion storage layer.

9. The semiconductor structure of claim 8, wherein the ion storage layer comprises a second electrochromic material layer.

10. The semiconductor structure of claim 3, further including an optical detector component operable to be optically coupled to the optical source component when the electrochromic switch is placed in the second state.

11. The semiconductor structure of claim 10, wherein the optical detector component is formed within the monocrystalline compound semiconductor material.

12. A process for fabricating a semiconductor structure comprising:

providing a monocrystalline silicon substrate;

depositing a monocrystalline perovskite oxide film overlying the monocrystalline silicon substrate, the film having a thickness less than a thickness of the material that would result in strain-induced defects;

forming an amorphous oxide interface layer at an interface between the monocrystalline perovskite oxide film and the monocrystalline silicon substrate;

epitaxially forming a monocrystalline compound semiconductor layer overlying the monocrystalline perovskite oxide film;

forming an optical source component adapted to transmit radiant energy within the monocrystalline compound semiconductor layer; and

forming an electrochromic switch optically coupled to the optical source component.

13. The process of claim 12, wherein forming the electrochromic switch includes forming an electrochromic switch having a first state and a second state.

14. The process of claim 13, wherein forming the electrochromic switch includes forming a first electrochromic material layer which permits a first amount of transmitted radiant energy to pass through in the first state and a second amount of transmitted radiant energy to pass through in the second state where the second amount is greater than the first amount.

15. The process of claim 14, wherein the first electrochromic material layer comprises one of a cathodic material, an anodic material and a cathodic/anodic material.

16. The process of claim 14, wherein forming the electrochromic switch includes disposing the first electrochromic material layer between first and second transparent electrically conductive layers.

17. The process of claim 14, wherein forming the electrochromic switch includes providing a transparent substrate selected from one of an organic polymer and ceramic material.

18. The process of claim 14, wherein forming the electrochromic switch includes disposing the first electrochromic material layer between first and second transparent substrates.

19. The process of claim 14, wherein the step of forming the electrochromic switch includes disposing an ion conductor layer between the first electrochromic material layer and an ion storage layer.

20. The process of claim 19, wherein the ion storage layer comprises a second electrochromic material layer.

21. The process of claim 14, further including forming an optical detector component operable to be optically coupled to the optical source component when the electrochromic switch is placed in the second state.

22. The process of claim 21, wherein forming the optical detector component includes forming the optical detector component within the monocrystalline compound semiconductor material.

23. A semiconductor structure comprising:

a monocrystalline silicon substrate;

an amorphous oxide material overlying the monocrystalline silicon substrate;

a monocrystalline perovskite oxide material overlying the amorphous oxide material;

a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;

an optical detector component formed within the monocrystalline compound semiconductor material and operable to detect a radiant energy transmission; and

an electrochromic switch optically coupled to the optical detector component.

24. The semiconductor structure of claim 23, wherein the electrochromic switch can be placed in one of first and second states.

25. The semiconductor structure of claim 24, wherein the electrochromic switch comprises a first electrochromic material layer which permits a first amount of a radiant energy transmission to pass through in the first state and a second amount of a radiant energy transmission to pass through in the second state where the second amount is greater than the first amount.

26. The semiconductor structure of claim 25, wherein the first electrochromic material layer comprises one of a cathodic material, an anodic material and a cathodic/anodic material.

27. The semiconductor structure of claim 25, wherein the first electrochromic material layer is disposed between first and second transparent electrically conductive layers.

28. The semiconductor structure of claim 25, wherein the electrochromic switch includes a transparent substrate formed from one of an organic polymer material and a ceramic material.

29. The semiconductor structure of claim 25, wherein the first electrochromic material layer is disposed between first and second transparent substrates.

30. The semiconductor structure of claim 25, further including an ion conductor layer and an ion storage layer wherein the ion conductor layer is disposed between the first electrochromic material layer and the ion storage layer.

31. The semiconductor structure of claim 30, wherein the ion storage layer comprises a second electrochromic material layer.

32. The semiconductor structure of claim 25, further including an optical source component operable to be optically coupled to the optical detector component when the electrochromic switch is placed in the second state.

33. The semiconductor structure of claim 32, wherein the optical source component is formed within the monocrystalline compound semiconductor material.

34. A process for fabricating a semiconductor structure comprising:

providing a monocrystalline silicon substrate;

depositing a monocrystalline perovskite oxide film overlying the monocrystalline silicon substrate, the film having a thickness less than a thickness of the material that would result in strain-induced defects;

forming an amorphous oxide interface layer at an interface between the monocrystalline perovskite oxide film and the monocrystalline silicon substrate;

epitaxially forming a monocrystalline compound semiconductor layer overlying the monocrystalline perovskite oxide film;

forming an optical detector component operable to detect a radiant energy transmission within the monocrystalline compound semiconductor layer; and

forming an electrochromic switch optically coupled to the optical detector component.

35. The process of claim 34, wherein forming the electrochromic switch includes forming an electrochromic switch having a first state and a second state.

36. The process of claim 35, wherein forming the electrochromic switch includes forming a first electrochromic material layer which permits a first amount of a radiant energy transmission to pass through in the first state and a second amount of a radiant energy transmission to pass through in the second state where the second amount is greater than the first amount.

37. The process of claim 36, wherein the first electrochromic material layer comprises one of a cathodic material, an anodic material and a cathodic/anodic material.

38. The process of claim 36, wherein forming the electrochromic switch includes disposing the first electrochromic material layer between first and second transparent electrically conductive layers.

39. The process of claim 36, wherein forming the electrochromic switch includes providing a transparent substrate selected from one of an organic polymer and ceramic material.

40. The process of claim 36, wherein forming the electrochromic switch includes disposing the first electrochromic material layer between first and second transparent substrates.

41. The process of claim 36, wherein the step of forming the electrochromic switch includes disposing an ion conductor layer between the first electrochromic material layer and an ion storage layer.

42. The process of claim 41, wherein the ion storage layer comprises a second electrochromic material layer.

43. The process of claim 36, further including forming an optical source component operable to be optically coupled to the optical detector component when the electrochromic switch is placed in the second state.

44. The process of claim 43, wherein forming the optical source component includes forming the optical source component within the monocrystalline compound semiconductor material.