Substrate processing system managing apparatus information of substrate processing apparatus

• US 20030023340A1
• Filed: 07/02/2002
• Published: 01/30/2003
• Est. Priority Date: 07/05/2001
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: Dainippon Screen Manufacturing Company Limited (SCREEN Holdings Co., Ltd.)
• Inventors: Kamei, Kenji, Hamada, Tetsuya, Inoue, Hidekazu, Kitamoto, Toru
• Granted Patent: US 7,047,100 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/31337 Failure information database
• CPC Class Codes: G05B 2219/31365 Send message to most appropriate operator as function of kind of error
• CPC Class Codes: G05B 2219/31402 Keep log book, for activities of a station, equipment
• CPC Class Codes: G05B 2219/32207 Action upon failure value, send warning, caution message to terminal
• CPC Class Codes: G05B 23/0264 Control of logging system, e.g. decision on which data to store; time-stamping measurements
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.

Claims

1. A substrate processing system having a substrate processing apparatus and a computer processing apparatus information of said substrate processing apparatus connected to a network, comprising:

an apparatus information storage element storing acquired said apparatus information; and

an apparatus information uncasing element rendering said apparatus information stored in said apparatus information storage element readable from said computer through said network.

2. The substrate processing system according to claim 1, further comprising an operation information recording element recording time-series information as to operation of said substrate processing apparatus as operation information, wherein

said apparatus information includes said operation information.

3. The substrate processing system according to claim 2, further comprising a warning element generating a warning signal when said substrate processing apparatus causes a failure, wherein

said apparatus information storage element stores said apparatus information when said warning signal is generated.

4. The substrate processing system according to claim 3, further comprising an extraction element extracting failure-relevant operation information relevant to the cause of generated said warning signal from said operation information, wherein

said apparatus information includes said failure-relevant operation information.

5. The substrate processing system according to claim 4, further comprising a storage element storing a table associating said warning signal and said failure-relevant operation information with each other.

6. The substrate processing system according to claim 5, wherein

said operation information includes time-series information as to a substrate processing step.

7. The substrate processing apparatus according to claim 6, further comprising a failure information generation element generating failure information as to said failure in association with said failure-relevant operation information corresponding to said warning signal when said warning signal is generated, wherein

said apparatus information includes said failure information.

8. The substrate processing system according to claim 1, further comprising:

a warning element generating a warning signal when said substrate processing apparatus causes a failure, and

a failure information generation element generating failure information as to said failure when said warning signal is generated, wherein

said apparatus information includes said failure information.

9. The substrate processing system according to claim 8, further comprising a posting element posting the occurrence of said failure to said computer through said network when said warning signal is generated.

10. The substrate processing system according to claim 9, further comprising a countermeasure information acquisition element acquiring countermeasure information against said failure based on said apparatus information.

11. A substrate processing apparatus capable of making communication through a network, comprising:

an apparatus information transmission element transmitting apparatus information of said substrate processing apparatus to said network.

12. The substrate processing apparatus according to claim 11, further comprising an operation information recording element recording time-series information as to operation as operation information, wherein

said apparatus information includes said operation information.

13. The substrate processing apparatus according to claim 12, further comprising a warning element generating a warning signal when a failure takes place, wherein

said apparatus information transmission element transmits said apparatus information when said warning signal is generated.

14. The substrate processing apparatus according to claim 13, further comprising an extraction element extracting failure-relevant operation information relevant to the cause of generated said warning signal from said operation information, wherein

said apparatus information includes said failure-relevant operation information.

15. The substrate processing apparatus according to claim 14, further comprising a storage element storing a table associating said warning signal and said failure-relevant operation information with each other.

16. The substrate processing apparatus according to claim 15, wherein

said operation information includes time-series information as to a substrate processing step.

17. The substrate processing apparatus according to claim 16, further comprising a failure information generation element generating failure information as to said failure in association with said failure-relevant operation information corresponding to said warning signal when said warning signal is generated, wherein

said apparatus information includes said failure information.

18. The substrate processing apparatus according to claim 11, further comprising:

a warning element generating a warning signal when said substrate processing apparatus causes a failure, and

a failure information generation element generating failure information as to said failure when said warning signal is generated, wherein

said apparatus information includes said failure information.

19. The substrate processing apparatus according to claim 18, further comprising a posting element posting the occurrence of said failure to an external computer through said network when said warning signal is generated.

20. The substrate processing apparatus according to claim 19, further comprising a countermeasure information acquisition element acquiring countermeasure information against said failure based on said apparatus information.

21. A method of managing apparatus information of a substrate processing apparatus, comprising steps of:

storing acquired said apparatus information; and

rendering stored said apparatus information readable from an external computer through a network.

22. A program for a computer included in a substrate processing apparatus, wherein execution of said program by said computer enables said substrate processing apparatus to transmit apparatus information of said substrate processing apparatus to a network to which said substrate processing apparatus is coupled.

23. A computer-readable recording medium on which a program for a computer included in a substrate processing apparatus is recorded, wherein execution of said program by said computer enables said substrate processing apparatus to transmit apparatus information of said substrate processing apparatus to a network to which said substrate processing apparatus is coupled.

24. A substrate processing system comprising:

a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit;

a computer connected with said substrate processing apparatus through a network; and

a matching property confirmation element confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

25. The substrate processing system according to claim 24, wherein

said matching property confirmation element confirms the matching properties on the basis of version information of said software modules presently installed in said system control part and said unit control part respectively when said software module is installed in said system control part or said unit control part.

26. The substrate processing system according to claim 25, further comprising a version information storage element storing said version information of said software modules presently installed in said system control part and said unit control part respectively when said software module is installed in said system control part or said unit control part.

27. The substrate processing apparatus according to claim 26, further comprising a table holding element holding a matching property confirmation table registering version information of software modules mutually having matching properties, wherein

said matching property confirmation element determines matching when said matching property confirmation table registers all version information of said software modules installed in said system control part and said unit control part respectively stored in said version information storage element, while otherwise determining mismatching.

28. The substrate processing system according to claim 27, further comprising a posting element posting mismatching to said computer through said network when said matching property confirmation element determines mismatching.

29. A substrate processing system comprising:

a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit;

a computer connected with said substrate processing apparatus through a network; and

an information storage server comprising a version information storage element storing version information of software modules installed in said system control part and said unit control part and a version information uncasing element rendering said version information stored in said version information storage element readable from said computer through said network.

30. The substrate processing system according to claim 29, wherein

said system control part transmits version information of software modules presently installed in said system control part and said unit control part to said information storage server when a software module is installed in said system control part or said unit control part, and

said information storage server stores said transmitted version information in said version information storage element.

31. The substrate processing system according to claim 30, wherein

said information storage server further comprises a matching property confirmation element confirming the matching properties of software modules installed in said system control part and said unit control part respectively when said software module is installed in said system control part or said unit control part by referring to said version information of said software modules installed in said system control part and said unit control part respectively stored in said version information storage element.

32. The substrate processing system according to claim 31, wherein

said information storage server further comprises a table holding element holding a matching property confirmation table registering version information of software modules mutually having matching properties, and

said matching property confirmation element determines matching when said matching property confirmation table registers all version information of said software modules installed in said system control part and said unit control part stored in said version information storage element, while otherwise determining mismatching.

33. The substrate processing system according to claim 31, wherein

said computer further comprises a table holding element holding a matching property confirmation table registering version information of software modules mutually having matching properties, and

said matching property confirmation element refers to said matching property confirmation table through said network for determining matching when said matching property confirmation table registers all version information of said software modules installed in said system control part and said unit control part stored in said version information storage element, while otherwise determining mismatching.

34. The substrate processing system according to claim 32, wherein said information storage server further comprises a posting element posting mismatching to said computer through said network when said matching property confirmation element determines mismatching.

35. A substrate processing apparatus management method managing a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit, comprising a step of:

confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

36. The substrate processing apparatus management method according to claim 35, confirming said matching property on the basis of version information of said software module installed in each of said system control part and said unit control part.

37. A substrate processing apparatus comprising:

a processing unit performing prescribed processing on a substrate;

a system control part controlling the overall apparatus;

a unit control part individually controlling said processing unit; and

a matching property confirmation element confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

38. The substrate processing apparatus according to claim 37, wherein

said matching property confirmation element confirms the matching properties on the basis of version information of said software modules presently installed in said system control part and said unit control part respectively when said software module is installed in said system control part or said unit control part.

39. The substrate processing apparatus according to claim 38, further comprising a version information storage element storing said version information of said software modules presently installed in said system control part and said unit control part respectively when said software module is installed in said system control part or said unit control part.

40. The substrate processing apparatus according to claim 39, further comprising a table holding element holding a matching property confirmation table registering version information of software modules mutually having matching properties, wherein

said matching property confirmation element determines matching when said matching property confirmation table registers all version information of said software modules installed in said system control part and said unit control part respectively stored in said version information storage element, while otherwise determining mismatching.

41. A substrate processing apparatus comprising:

a processing unit performing prescribed processing on a substrate;

a system control part controlling overall said apparatus; and

a unit control part individually controlling said processing unit, wherein

said system control part transmits version information of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

42. A program for a computer included in a substrate processing apparatus, said substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling the overall apparatus and a unit control part individually controlling said processing unit, wherein

execution of said program by said computer enables said substrate processing to confirm the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

43. A computer-readable recording medium on which a program for a computer included in a substrate processing apparatus is recorded, said substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling the overall apparatus and a unit control part individually controlling said processing unit, wherein

execution of said program by said computer enables said substrate processing to confirm the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.

44. A substrate processing system comprising a substrate processing apparatus capable of making communication through a network, comprising:

an additional information storage element storing additional information, relevant to said substrate processing apparatus, additionally distributed by a vendor of said substrate processing apparatus; and

an additional information acquisition element acquiring stored said additional information through said network.

45. The substrate processing system according to claim 44, further comprising an additional information storage element storing said additional information acquired by said additional information acquisition element.

46. The substrate processing system according to claim 45, wherein

said additional information includes countermeasure information against a failure of said substrate processing apparatus.

47. The substrate processing system according to claim 46, further comprising:

a warning element generating a warning signal when said substrate processing apparatus causes said failure, and

a table storage element storing a table associating said warning signal with said countermeasure information against said failure resulting in said warning signal.

48. The substrate processing system according to claim 47, wherein

said additional information acquisition element selectively acquires said countermeasure information against said failure resulting in generated said warning signal.

49. The substrate processing system according to claim 48, further comprising a display element displaying said countermeasure information against said failure resulting in said warning signal when said warning signal is generated.

50. A substrate processing apparatus capable of making communication through a network, comprising:

an additional information acquisition element acquiring additional information from a storage device through said network, said additional information being relevant to said substrate processing apparatus and additionally distributed by a vendor of said substrate processing apparatus.

51. The substrate processing apparatus according to claim 50, further comprising an additional information storage element storing said additional information acquired by said additional information acquisition element.

52. The substrate processing apparatus according to claim 51, wherein

said additional information includes countermeasure information against a failure of said substrate processing apparatus.

53. The substrate processing apparatus according to claim 52, further comprising:

a warning element generating a warning signal when said substrate processing apparatus causes said failure, and

a table storage element storing a table associating said warning signal with said countermeasure information against said failure resulting in said warning signal.

54. The substrate processing apparatus according to claim 53, wherein

said additional information acquisition element selectively acquires said countermeasure information against said failure resulting in generated said warning signal.

55. The substrate processing apparatus according to claim 54, further comprising a display element displaying said countermeasure information against said failure resulting in said warning signal when said warning signal is generated.

56. A method of acquiring additional information relevant to a substrate processing apparatus, comprising:

an additional information storage step of storing said additional information; and

an additional information acquisition step of acquiring stored said additional information through a network.

57. A program for a computer included in a substrate processing apparatus, wherein execution of said program by said computer enables said substrate processing apparatus to acquire additional information, relevant to said substrate processing apparatus, additionally distributed by a vendor of said substrate processing apparatus.

58. A computer-readable recording medium on which a program for a computer included in a substrate processing apparatus is recorded, wherein execution of said program by said computer enables said substrate processing apparatus to acquire additional information, relevant to said substrate processing apparatus, additionally distributed by a vendor of said substrate processing apparatus.