Light emitting device

• US 20030025166A1
• Filed: 07/15/2002
• Published: 02/06/2003
• Est. Priority Date: 07/17/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Koyama, Jun, Yamazaki, Shunpei
• Granted Patent: US 6,952,023 B2
• Time in Patent Office: Days
• US Class Current: 257/397
• CPC Class Codes: H01L 21/3226 of silicon on insulator
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/6675 Amorphous silicon or polysilicon transistors
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/78603 characterised by the insulating substrate or support H01L29/78657 takes precedence
• CPC Class Codes: H01L 29/78636 with supplementary region or layer for improving the flatness of the device
• CPC Class Codes: H01L 29/78645 with multiple gate
• CPC Class Codes: H01L 29/78648 arranged on opposing sides of the channel
• CPC Class Codes: H01L 29/78696 characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel H01L29/78612 takes precedence; transistors having a drain offset region or a lightly doped drain [LDD] H01L29/78621
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals

Abstract

An object of the invention is to provide a technique for improving the characteristics of a TFT and realizing an optimum structure of the TFT for the driving conditions of a pixel section and a driving circuit by a small number of photo masks. Therefore, a light emitting device has a semiconductor film, a first electrode and a first insulating film nipped between the semiconductor film and the first electrode. Further, the light emitting device has a second electrode and a second insulating film nipped between the semiconductor film and the second electrode. The first and second electrodes are overlapped with each other through a channel forming area arranged in the semiconductor film. In the case of a TFT in which a reduction in off-electric current is considered important in comparison with an increase in on-electric current, a constant voltage (common voltage) is applied to the first electrode at any time. In the case of a TFT in which the increase in on-electric current is considered important in comparison with the reduction in off-electric current, the same voltage is applied to the first and second electrodes.

Claims

1. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, and said second and third wirings are formed over said second insulating film, and a third insulating film is formed so as to cover said second and third wirings, and said fourth wiring is formed over said third insulating film;

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor;

wherein one of said two impurity regions of said first thin film transistor is connected to said third wiring, and the other is connected to said first and second electrodes of said second thin film transistor, and

wherein one of said two impurity regions of said second thin film transistor is connected to said fourth wiring, and the other is connected to a pixel electrode.

2. A light emitting device according to claim 1, wherein said adjacent second wirings are connected to a fifth wiring formed over said third insulating film through a contact hole formed in said third insulating film.

3. A light emitting device according to claim 1, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

4. A light emitting device according to claim 1, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

5. A light emitting device according to claim 1, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

6. A light emitting device according to claim 1, wherein said first insulating film is flattened by chemical mechanical polishing.

7. A light emitting device according to claim 1, wherein said light emitting layer comprises organic compound.

8. An electronic device comprising said light emitting device according to claim 1, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

40. A light emitting device according to claim 4, wherein said adjacent second wirings are connected to a fifth wiring formed over said second insulating film through a contact hole formed in said third insulating film.

9. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, and said second and third wirings are formed over said second insulating film, and a third insulating film is formed so as to cover said second and third wirings, and said fourth wiring is formed over said third insulating film;

wherein said first wiring is connected to said first electrode of said first thin film transistor and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of said two impurity regions of said first thin film transistor is connected to said third wiring,

wherein said first and second electrodes of said second thin film transistor are connected to each other, and

wherein one of said two impurity regions of said second thin film transistor is connected to a pixel electrode.

10. A light emitting device according to claim 9, wherein said adjacent second wirings are connected to a fifth wiring formed over said third insulating film through a contact hole formed in said third insulating film.

11. A light emitting device according to claim 9, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

12. A light emitting device according to claim 9, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

13. A light emitting device according to claim 9, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

14. A light emitting device according to claim 9, wherein said first insulating film is flattened by chemical mechanical polishing.

15. A light emitting device according to claim 9, wherein said light emitting layer comprises organic compound.

16. An electronic device comprising said light emitting device according to claim 9, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

17. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said third and fourth wirings are formed over said second insulating film, a third insulating film is formed so as to cover said third and fourth wirings, and said second wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring, and the other is connected to said first and second electrodes of said second thin film transistor, and

wherein one of two impurity regions of said second thin film transistor is connected to said fourth wiring, and the other is connected to a pixel electrode.

18. A light emitting device according to claim 17, said device further comprising:

a fifth wiring formed over said third insulating film;

a sixth wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said fifth wiring, and the other is connected to said sixth wiring through said first contact hole,

wherein said fifth wiring is connected to said third wiring through said second contact hole,

wherein said sixth wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

19. A light emitting device according to claim 17, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

20. A light emitting device according to claim 17, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

21. A light emitting device according to claim 17, wherein said first insulating film is flattened by chemical mechanical polishing.

22. A light emitting device according to claim 17, wherein said light emitting layer comprises organic compound.

23. An electronic device comprising said light emitting device according to claim 17, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

24. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said third and fourth wirings are formed over said second insulating film, a third insulating film is formed so as to cover said third and fourth wirings, and said second wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring,

wherein said first and second electrodes of said second thin film transistor are connected to each other, and

wherein one of two impurity regions of said second thin film transistor is connected to a pixel electrode.

25. A light emitting device according to claim 24, said device further comprising:

a fifth wiring formed over said third insulating film;

a sixth wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said fifth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said fifth wiring is connected to said third wiring through said second contact hole,

wherein said sixth wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

26. A light emitting device according to claim 24, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

27. A light emitting device according to claim 24, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

28. A light emitting device according to claim 24, wherein said first insulating film is flattened by chemical mechanical polishing.

29. A light emitting device according to claim 24, wherein said light emitting layer comprises organic compound.

30. An electronic device comprising said light emitting device according to claim 24, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

31. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said third wiring is formed over said second insulating film, a third insulating film is formed so as to cover said third wiring, and said second and fourth wirings are formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring, and the other is connected to said first and second electrodes of said second thin film transistor, and

wherein one of two impurity regions of said second thin film transistor is connected to said fourth wiring, and the other is connected to a pixel electrode.

32. A light emitting device according to claim 31, wherein said adjacent second wirings are connected to a fifth wiring formed over said second insulating film through a contact hole formed in said third insulating film.

33. A light emitting device according to claim 31, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

34. A light emitting device according to claim 31, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

35. A light emitting device according to claim 31, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

36. A light emitting device according to claim 31, wherein said first insulating film is flattened by chemical mechanical polishing.

37. A light emitting device according to claim 31, wherein said light emitting layer comprises organic compound.

38. An electronic device comprising said light emitting device according to claim 31, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

39. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said third wiring is formed over said second insulating film, a third insulating film is formed so as to cover said third wiring, and said second and fourth wirings are formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring,

wherein said first and second electrodes of said second thin film transistor are connected to each other, and

wherein one of two impurity regions of said second thin film transistor is connected to a pixel electrode.

41. A light emitting device according to claim 39, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

42. A light emitting device according to claim 39, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

43. A light emitting device according to claim 39, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

44. A light emitting device according to claim 39, wherein said first insulating film is flattened by chemical mechanical polishing.

45. A light emitting device according to claim 39, wherein said light emitting layer comprises organic compound.

46. An electronic device comprising said light emitting device according to claim 39, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

47. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first and fourth wirings, said third wiring is formed over said second insulating film, a third insulating film is formed so as to cover said third wiring, and said second wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring, and the other is connected to said first and second electrodes of said second thin film transistor, and

wherein one of two impurity regions of said second thin film transistor is connected to said fourth wiring, and the other is connected to a pixel electrode.

48. A light emitting device according to claim 47, wherein said adjacent fourth wirings are connected to a fifth wiring formed on said second insulating film through a contact hole formed in said first and second insulating films.

49. A light emitting device according to claim 47, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

50. A light emitting device according to claim 47, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

51. A light emitting device according to claim 47, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

52. A light emitting device according to claim 47, wherein said first insulating film is flattened by chemical mechanical polishing.

53. A light emitting device according to claim 47, wherein said light emitting layer comprises organic compound.

54. An electronic device comprising said light emitting device according to claim 47, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

55. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first and fourth wirings, said third wiring is formed over said second insulating film, a third insulating film is formed so as to cover said third wiring, and said second wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrode of said first thin film transistor, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity regions of said first thin film transistor is connected to said third wiring,

wherein said first and second electrodes of said second thin film transistor are connected to each other, and

wherein one of two impurity regions of said second thin film transistor is connected to a pixel electrode.

56. A light emitting device according to claim 55, wherein said adjacent fourth wirings are connected to a fifth wiring formed over said second insulating film through a contact hole formed in said first and second insulating films.

57. A light emitting device according to claim 55, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

58. A light emitting device according to claim 57, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

59. A light emitting device according to claim 57, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

60. A light emitting device according to claim 57, wherein said first insulating film is flattened by chemical mechanical polishing.

61. A light emitting device according to claim 57, wherein said light emitting layer comprises organic compound.

62. An electronic device comprising said light emitting device according to claim 57, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

63. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said second and third wirings are formed over said second insulating film, a third insulating film is formed so as to cover said second and third wirings, and said fourth wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrodes of said first and second thin film transistors, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity region of said first thin film transistor is connected to said third wiring, and the other is connected to said second electrode of said second thin film transistor, and

wherein one of two impurity regions of said second thin film transistor is connected to said fourth wiring, and the other is connected to a pixel electrode.

64. A light emitting device according to claim 63, wherein said adjacent second wirings are connected to a fifth wiring formed over said third insulating film through a contact hole formed in said third insulating film.

65. A light emitting device according to claim 63, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

66. A light emitting device according to claim 63, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

67. A light emitting device according to claim 63, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

68. A light emitting device according to claim 63, wherein said first insulating film is flattened by chemical mechanical polishing.

69. A light emitting device according to claim 63, wherein said light emitting layer comprises organic compound.

70. An electronic device comprising said light emitting device according to claim 63, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.

71. A light emitting device comprising:

a first wiring;

a second wiring;

a third wiring;

a fourth wiring;

a first thin film transistor comprising at least two impurity regions;

a second thin film transistor comprising at least two impurity regions; and

a light emitting element,

wherein each of said first and second thin film transistors comprises a first electrode, a first insulating film over said first electrode, a semiconductor film over said first insulating film, a second insulating film over said semiconductor film, and a second electrode over said second insulating film,

wherein said first insulating film is formed so as to cover said first wiring, said second and third wirings are formed over said second insulating film, a third insulating film is formed so as to cover said second and third wirings, and said fourth wiring is formed over said third insulating film,

wherein said first wiring is connected to said first electrodes of said first and second thin film transistors, and said second wiring is connected to said second electrode of said first thin film transistor,

wherein one of two impurity region of said first thin film transistor is connected to said third wiring, and

wherein one of two impurity regions of said second thin film transistor is connected to a pixel electrode.

72. A light emitting device according to claim 71, wherein said adjacent second wirings are connected to a fifth wiring formed over said third insulating film through a contact hole formed in said third insulating film.

73. A light emitting device according to claim 71, said device further comprising:

a sixth wiring formed over said third insulating film;

a seventh wiring formed over said third insulating film;

a first contact hole formed in said second and third insulating films;

a second contact hole formed in said third insulating film;

a third contact hole formed in said third insulating film; and

a fourth contact hole formed in said second insulating film,

wherein one of said two impurity regions of said first thin film transistor is connected to said sixth wiring, and the other is connected to said seventh wiring through said first contact hole,

wherein said sixth wiring is connected to said third wiring through said second contact hole,

wherein said seventh wiring is connected to said second electrode of said second thin film transistor through said third contact hole, and

wherein said second electrode of said second thin film transistor is connected to said first electrode of said second thin film transistor through said fourth contact hole.

74. A light emitting device according to claim 71, wherein said semiconductor film comprises a channel forming region between said two impurity regions, and said first and second electrodes are overlapped with each other through said channel forming area.

75. A light emitting device according to claim 71, wherein dielectric constants of said first and second insulating films are approximately the same, and a film thickness in a portion overlapped with said first electrode of said first insulating film and a film thickness in a portion overlapped with said second electrode of said second insulating film are approximately the same.

76. A light emitting device according to claim 71, wherein said first insulating film is flattened by chemical mechanical polishing.

77. A light emitting device according to claim 71, wherein said light emitting layer comprises organic compound.

78. An electronic device comprising said light emitting device according to claim 71, wherein said electronic device is selected from the group consisting of a display device, a digital still camera, a lap-top computer, a mobile computer, a portable type image reproduction apparatus, a goggle type display, a video camera, and a portable telephone.