Cooling structure for multichip module

• US 20030025197A1
• Filed: 10/03/2002
• Published: 02/06/2003
• Est. Priority Date: 12/21/1999
• Status: Active Grant

• Current Assignee: Makoto Imai, Naoki Ogawa, Takashi Kojima, Yasushi Yamada, Yuji Yagi
• Original Assignee: Makoto Imai, Naoki Ogawa, Takashi Kojima, Yasushi Yamada, Yuji Yagi
• Inventors: Kojima, Takashi, Yamada, Yasushi, Ogawa, Naoki, Imai, Makoto, Yagi, Yuji
• Granted Patent: US 6,969,907 B2
• Time in Patent Office: Days
• US Class Current: 257/712
• CPC Class Codes: H01L 2224/32225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/32245 the item being metallic
• CPC Class Codes: H01L 2224/33181 On opposite sides of the body
• CPC Class Codes: H01L 23/3672 Foil-like cooling fins or heat sinks being part of lead-frames H01L23/49568
• CPC Class Codes: H01L 25/072 the devices being arranged next to each other
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/1305 Bipolar Junction Transistor [BJT]
• CPC Class Codes: H01L 2924/13055 Insulated gate bipolar transistor [IGBT]
• CPC Class Codes: Y10S 257/93 Thermoelectric, e.g. peltier effect cooling

Abstract

A first electronic device, a second electronic device which generates less heat than the first electric device, and an electrode are connected by a heat leveling plate formed of an electrically conductive material having high thermal conductivity. A heat radiation plate is provided below an insulated substrate to which the first and second electronic devices are mounted. The second electronic device is cooled by a heat radiation path which extends through the insulated substrate and the heat radiation plate and a heat radiation path which extends through the second electronic device and the electrode to the heat radiation plate. The first and the second electronic device have substantially the same temperature due to heat radiation through the heat leveling plate. As a result, cooling effect of the electronic devices can be enhanced.

Claims

1. A cooling structure for a multichip module having a plurality of electronic devices which generate different amounts of heat relative to each other, the cooling structure comprising:

a first member which is provided on a first face of the multichip module and which transmits heat generated by the electronic devices to the outside of the module; and

a second member which is provided on a second face that is different from the first face, which is in contact with the electronic devices, and which has thermal conductivity.

2. A cooling structure according to claim 1, wherein the first member transmits heat generated by the electronic devices to a cooling medium.

3. A cooling structure according to claim 2, wherein the cooling medium includes air and water.

4. A cooling structure according to claim 1, wherein the second member has electrical conductivity and is electrically in contact with the electronic devices.

5. A cooling structure according to claim 2, wherein the second member comprises an insulating member and a wiring pattern which is electrically in contact with the electronic devices.

6. A cooling structure according to claim 1, wherein the second member has electrical conductivity and is electrically in contact with the electronic devices.

7. A cooling structure according to claim 2, wherein the second member comprises an insulating member and a wiring pattern which is electrically in contact with the electronic devices.

8. A cooling structure according to claim 1, further comprising a third member that supports the electronic devices, wherein a coefficient of thermal expansion of the second member and that of the third member are in a predetermined range at steady driving state of the multichip module.

9. A cooling structure according to claim 8, wherein the coefficient of thermal expansion of the second member is substantially the same as that of the third member.

10. A cooling structure according to claim 8, wherein the third member is a substrate on which the electric devices are arranged.

11. A cooling structure according to claim 1, wherein a coefficient of thermal expansion of the first member and that of the second member are in a predetermined range at steady driving state of the multichip module.

12. A cooling structure according to claim 4, further comprising a third member that supports the electronic devices, wherein a coefficient of thermal expansion of the second member and that of the third member are in a predetermined range at steady driving state of the multichip module.

13. A cooling structure according to claim 12, wherein the coefficient of thermal expansion of the second member is substantially the same as that of the third member.

14. A cooling structure according to claim 12, wherein the third member is a substrate on which the electric devices are arranged.

15. A cooling structure according to claim 4, wherein a coefficient of thermal expansion of the first member and that of the second member are in a predetermined range at steady driving state of the multichip module.

16. A cooling structure according to claim 6, further comprising a third member that supports the electronic devices, wherein a coefficient of thermal expansion of the second member and that of the third member are in a predetermined range at steady driving state of the multichip module.

17. A cooling structure according to claim 14, wherein the coefficient of thermal expansion of the second member is substantially the same as that of the third member.

18. A cooling structure according to claim 14, wherein the third member is a substrate on which the electric devices are arranged.

19. A cooling structure according to claim 6, wherein a coefficient of thermal expansion of the first member and that of the second member are in a predetermined range at steady driving state of the multichip module.

20. A cooling structure according to claim 1, wherein the first and second members are so located to sandwich the electronic devices.