Monolithic tunable wavelength multiplexers and demultiplexers and methods for fabricating same
First Claim
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1. A monolithically-integrated multiplexer system comprising:
- a monocrystalline substrate;
a monocrystalline accommodating buffer layer overlying said substrate;
a radiation emitter system overlying said accommodating buffer layer, wherein said radiation emitter system is configured to emit radiation having a plurality of wavelengths;
a main waveguide overlying said accommodating buffer layer and positioned adjacent to said radiation emitter system, wherein said main waveguide is configured to receive and transmit radiation emitted from said radiation emitter system; and
a radiation receiver in alignment with said main waveguide, wherein said radiation receiver is configured to receive radiation emitted from said main waveguide.
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Abstract
The present invention provides a wavelength-tunable optical device structure which monolithically integrates both active and passive device components on a single substrate. Monolithically-integrated active and passive optical device components may be fabricated by growing high-quality active optical devices, such as optical emitters and optical detectors, on a single substrate and using electro-optical crystalline oxide materials to tune optical devices, such as directional couplers, to transmit radiation having selected wavelengths. In this manner, cost-effective, monolithically-integrated, tunable wavelength multiplexers and/or demultiplexers may be formed.
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Citations
150 Claims
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1. A monolithically-integrated multiplexer system comprising:
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a monocrystalline substrate;
a monocrystalline accommodating buffer layer overlying said substrate;
a radiation emitter system overlying said accommodating buffer layer, wherein said radiation emitter system is configured to emit radiation having a plurality of wavelengths;
a main waveguide overlying said accommodating buffer layer and positioned adjacent to said radiation emitter system, wherein said main waveguide is configured to receive and transmit radiation emitted from said radiation emitter system; and
a radiation receiver in alignment with said main waveguide, wherein said radiation receiver is configured to receive radiation emitted from said main waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A monolithically-integrated demultiplexer system comprising:
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a monocrystalline substrate;
a monocrystalline accommodating buffer layer overlying said substrate;
a radiation detector system overlying said accommodating buffer layer;
a main waveguide overlying said accommodating buffer layer and positioned adjacent to said radiation detector system, wherein said main waveguide is configured to receive and transmit radiation to said radiation detector system; and
a radiation source in alignment with said main waveguide, wherein said radiation source is configured to emit radiation having a plurality of wavelengths. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86. A process for fabricating a multiplexer system, the process comprising the steps of:
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providing a monocrystalline substrate;
epitaxially growing an accommodating buffer layer over at least one of said substrate and an amorphous interface layer;
epitaxially growing a template layer over said accommodating buffer layer;
forming a radiation emitter system overlying said template layer;
forming a main waveguide overlying at least one of said accommodating buffer layer and said template layer; and
forming a radiation receiver overlying said template layer. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112)
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113. A process for fabricating a demultiplexer system, the process comprising the steps of:
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providing a monocrystalline substrate;
epitaxially growing an accommodating buffer layer over at least one of said substrate and an amorphous interface layer;
epitaxially growing a template layer over said accommodating buffer layer;
forming a radiation detector system overlying said template layer;
forming a main waveguide overlying said accommodating buffer layer; and
forming a structure for coupling a radiation source with the main waveguide. - View Dependent Claims (114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149)
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150. A process for fabricating an integrated optical device structure, the process comprising the steps of:
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providing a monocrystalline substrate;
epitaxially growing an accommodating buffer layer over at least one of said substrate and an amorphous interface layer;
epitaxially growing a template layer over said accommodating buffer layer;
forming at least two waveguide structures overlying at least one of said accommodating buffer layer and said template layer; and
forming at least one of an optical emitter and an optical detector overlying said template layer, wherein said at least one of an optical emitter and an optical detector optically communicates with one of said at least two waveguide structures.
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Specification