Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films
First Claim
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1. A material in the form of particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin, inorganic material deposited on the surface thereof.
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Abstract
Particles have an ultrathin, conformal coating are made using atomic layer deposition methods. The base particles include ceramic and metallic materials. The coatings can also be ceramic or metal materials that can be deposited in a binary reaction sequence. The coated particles are useful as fillers for electronic packaging applications, for making ceramic or cermet parts, as supported catalysts, as well as other applications.
116 Citations
48 Claims
- 1. A material in the form of particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin, inorganic material deposited on the surface thereof.
- 9. A method for depositing an ultrathin inorganic material on substrate particles comprising conducting a sequence of two or more self-limiting reactions at the surface of substrate particles to form coated particles having an ultrathin layer of an inorganic bonded to the surface of said substrate particles.
- 44. A material in the form of metal, metal alloy, metal salt, metal organic, metal oxide, metal hydroxide or mixed lattice substrate particles having an average diameter of less than about 1 millimeter wherein the substrate particles have an ultra-thin, conformal coating of alumina on the surface thereof.
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