Passive electrical components formed on carbon coated insulating substrates
First Claim
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1. A substrate for electrical components comprising:
- an insulating layer having at least a first surface; and
a carbon layer on the first surface.
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Abstract
A substrate having a diamond or diamond-like carbon coating of at least one micron thickness on an underlayer of an insulating material such as AlN. Such a substrate is advantageously used as a mounting for passive electrical components such as microwave and radio-frequency (rf) resistors, capacitors, attenuators, terminators and loads.
8 Citations
20 Claims
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1. A substrate for electrical components comprising:
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an insulating layer having at least a first surface; and
a carbon layer on the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A circuit comprising:
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an insulating layer having at least a first surface;
a carbon layer on the first surface; and
at least one component formed on the carbon layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of forming a passive electrical component comprising the steps of:
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providing an electrically insulating underlayer;
forming on the underlayer a carbon layer; and
forming at least one of a resistor, a capacitor, an attenuator, a termination or a load on the carbon layer. - View Dependent Claims (20)
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Specification