Positioning apparatus
First Claim
1. A positioning apparatus, comprising:
- a box body including a process chamber exposed to a decompression environment in the interior of the box body and an opening allowing said process chamber to communicate with an outside;
a moving member for shielding said opening of said box body with a slight clearance between said box body and the moving member and movable with respect to said opening of said box body; and
, a differential pumping seal for sealing said slight clearance between said opening of said box body and said moving member, wherein a portion of said moving member to be moved into the interior of said process chamber, when said moving member moves, is formed as an adsorption preventive area.
1 Assignment
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Accused Products
Abstract
In the present positioning apparatus, a positioning apparatus, comprising: a box body including a process chamber exposed to a decompression environment in the interior of the box body and an opening allowing said process chamber to communicate with an outside; a moving member for shielding said opening of said box body with a slight clearance between said box body and the moving member and movable with respect to said opening of said box body; and a differential pumping seal for sealing said slight clearance between said opening of said box body and said moving member, wherein a portion of said moving member to be moved into the interior of said process chamber, when said moving member moves, is formed as an adsorption preventive area.
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Citations
16 Claims
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1. A positioning apparatus, comprising:
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a box body including a process chamber exposed to a decompression environment in the interior of the box body and an opening allowing said process chamber to communicate with an outside;
a moving member for shielding said opening of said box body with a slight clearance between said box body and the moving member and movable with respect to said opening of said box body; and
,a differential pumping seal for sealing said slight clearance between said opening of said box body and said moving member, wherein a portion of said moving member to be moved into the interior of said process chamber, when said moving member moves, is formed as an adsorption preventive area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification