Method and system for simulating processing condition of sample

• US 20030033130A1
• Filed: 09/06/2001
• Published: 02/13/2003
• Est. Priority Date: 08/07/2001
• Status: Abandoned Application

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kimura, Koichi, Hara, Tsutomu, Yamamoto, Hideyuki, Kagoshima, Akira
• Application Number:
  US09/946,439
• Publication Number:
  US 20030033130A1
• Time in Patent Office: Days
• US Class Current: 703/14
• CPC Class Codes: G05B 19/41885 characterised by modeling, simulation of the manufacturing system
• CPC Class Codes: G05B 2219/32347 Knowledge based simulation engine, use answers from user, database
• CPC Class Codes: G05B 2219/34038 Web, http, ftp, internet, intranet server
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A server on the Internet stores a semiconductor'"'"'s working recipe and user information. Next, a user transmits, to the server, data on arbitrary working conditions. Moreover, using the data and the semiconductor'"'"'s working recipe, the server executes the arithmetic-calculation, then transmitting only the arithmetic-calculation result back to the user.

Claims

1. A simulation method of executing a simulation of a sample processing condition by an information processing apparatus connected to the Internet, comprising the steps of:

setting up, in said information processing apparatus, a function of executing said simulation of said sample processing and a data storing region for storing working data on said sample processing;

providing, on said Internet, an information publicizing area for browsing information;

receiving said sample working condition and a calculation executing instruction from a client via said Internet;

executing said calculation using said simulation function of said sample processing and said data storing region; and

publicizing a calculation result on said Internet.

2. The simulation method as claimed in claim 1, wherein an access right to said function of executing said simulation and an access right to said data storing region are granted to only a specified client.

3. The simulation method as claimed in claim 1, further comprising the steps of:

adding, to data included in a region where said calculation result is displayed, personal information on a person who has granted said working condition; and

granting, based on said personal information, a right to be able to retrieve said calculation result, or a right to browse said calculation result.

4. The simulation method as claimed in claim 1, wherein data included in a region where said calculation result is displayed includes a calculating time and cost-billing information.

5. The simulation method as claimed in claim 1, wherein, when receiving said data on said sample working condition in said step of receiving said data on said sample working condition from said client via said Internet, said data are collected as a result of being classified depending on said working condition into a case where said working condition falls within a design condition, a case where said working condition falls on a boarder line thereof, and a case where said working condition falls outside said design condition.

6. The simulation method as claimed in claim 1, further comprising the step of utilizing a Web page so as to bill a cost to said client-side terminal at a stage where said simulation has been terminated.

7. The simulation method as claimed in claim 1, further comprising the step of utilizing a Web page so as to bill a cost to said client-side terminal at a stage where said client inputs, onto said Web page, information on conditions such as material and working environment needed for said working.

8. The simulation method as claimed in claim 1, further comprising the step of utilizing a Web page so as to bill a cost to said client-side terminal at a stage where said client executes a user registration.

9. A simulation method of executing a simulation of a sample processing condition by a server connected to the Internet, comprising the steps of:

storing a working recipe of said sample and user information into said server;

transmitting an arbitrary working condition on said sample processing from a client-side terminal to said server; and

executing, in said server, an arithmetic-calculation with use of said data and said working recipe of said sample, and transmitting only an arithmetic-calculation result back to said client-side terminal.

10. A simulation method of executing a simulation of a sample processing condition by starting-up a simulation engine of a server from a client-side terminal connected to said server via the Internet, comprising the steps of:

utilizing an information publicizing area so as to transmit an arbitrary working condition on said sample processing from said client-side terminal to said server, said information publicizing area being provided by said server on said Internet,; and

utilizing said information publicizing area so as to receive, in said client-side terminal, only a result that has been arithmetically-calculated in said server with use of said data and a working recipe of said sample.

11. A simulation system for executing a simulation of a sample processing condition by an information processing apparatus connected to the Internet, said information processing apparatus comprising:

a function unit for providing, on said Internet, an information publicizing area for browsing information;

a function unit for executing said simulation of said sample processing; and

a data storing region unit for storing working data on said sample processing;

wherein said information processing apparatus receives said working condition and a calculation executing instruction from a client via said Internet, and executes said arithmetic-calculation using said simulation function of said sample processing and said data storing region unit, and publicizes an arithmetic-calculation result on said Internet.

12. The simulation system as claimed in claim 11, wherein personal information on a person who has granted said working condition is added to data included in a region where said arithmetic-calculation result is displayed, and a right to be able to retrieve said arithmetic-calculation result, or a right to browse said arithmetic-calculation result is granted based on said personal information.

13. The simulation system as claimed in claim 11, wherein data included in a region where said arithmetic-calculation result is displayed includes a calculating time and cost-billing information.

14. The simulation system as claimed in claim 11, further comprising a settling system connected to said Internet for settling a cost charged for a service between an owner of a server and said client.

15. A simulation system for executing a simulation of a sample processing condition by an information processing apparatus connected to the Internet, comprising:

a server connected to said Internet for storing a database on a working and a working recipe and for providing, on said Internet, an information publicizing area for browsing information; and

a client-side terminal that has a function of utilizing said information publicizing area so as to transmit, to said server, data on an arbitrary working condition on said sample;

wherein said server executes an arithmetic-calculation using said data, said database on said working, and said working recipe, and publicizes, on said Internet, only an arithmetic-calculation result and data on success or failure of said result.