Mems devices suitable for integration with chip having integrated silicon and compound semiconductor devices, and methods for fabricating such devices
First Claim
1. A microelectromechanical device comprising:
- a monocrystalline substrate;
a piezoelectric material selected from the group consisting of alkaline earth titanates, zirconates, hafnates, niobates, tantalates, and the tin-based perovskites overlying the monocrystalline substrate; and
one or more electrodes proximate the piezoelectric material for applying one or more piezoelectric action inducing electric fields to the perovskite material.
2 Assignments
0 Petitions
Accused Products
Abstract
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. In addition, formation of a compliant substrate may include utilizing surfactant enhanced epitaxy, epitaxial growth of single crystal silicon onto single crystal oxide, and epitaxial growth of Zintl phase materials.
-
Citations
45 Claims
-
1. A microelectromechanical device comprising:
-
a monocrystalline substrate;
a piezoelectric material selected from the group consisting of alkaline earth titanates, zirconates, hafnates, niobates, tantalates, and the tin-based perovskites overlying the monocrystalline substrate; and
one or more electrodes proximate the piezoelectric material for applying one or more piezoelectric action inducing electric fields to the perovskite material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
-
27. A method of fabricating a piezoelectric device, the method comprising the steps of:
-
obtaining a diamond lattice monocrystalline substrate;
growing a piezoelectric layer including a material selected from the group consisting of alkaline earth titanates, zirconates, hafnates, niobates, tantalates, and the tin-based perovskites over the monocrystalline substrate;
etching the piezoelectric layer to define a piezoelectric transducer;
forming one or more electrodes proximate the piezoelectric transducer; and
polarizing the piezoelectric transducer. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
-
Specification