Optical modulator and method of manufacture thereof

• US 20030035196A1
• Filed: 08/17/2001
• Published: 02/20/2003
• Est. Priority Date: 08/17/2001
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Walker, James A.
• Granted Patent: US 6,661,562 B2
• Time in Patent Office: Days
• US Class Current: 359/295
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

An optical modulator having an optical modulator window coupled to a substrate and a method of manufacture thereof. In one embodiment, the optical modulator includes at least one drive electrode that adjusts a portion of the optical modulator window to attenuate light passing therethrough. The optical modulator further includes a sense element configured to measure a characteristic associated with the optical modulator window.

Claims

1. An optical modulator having an optical modulator window coupled to a substrate, comprising:

at least one drive electrode configured to adjust a portion of said optical modulator window to attenuate light passing therethrough; and

a sense element configured to measure a characteristic associated with said optical modulator window.

2. The optical modulator as recited in claim 1 wherein said sense element provides a determination of an attenuation of said light.

3. The optical modulator as recited in claim 1 comprising a pair of drive electrodes located on opposing sides of said optical modulator window.

4. The optical modulator as recited in claim 1 wherein said sense element is coupled to said optical modulator window.

5. The optical modulator as recited in claim 1 wherein said drive electrode is tongue-shaped.

6. The optical modulator as recited in claim 1 wherein said sense element is coupled to an amplifier circuit.

7. The optical modulator as recited in claim 1 wherein said sense element is configured to measure a capacitance associated with the optical modulator window.

8. An optical modulator, comprising:

a substrate;

a gap layer located over said substrate;

a modulator region located over said gap layer;

a drive electrode located proximate to said modulator region; and

a sense element located proximate to said modulator region.

9. The optical modulator as recited in claim 8 wherein said modulator region comprises an optical modulator window.

10. The optical modulator as recited in claim 9 comprising a pair of drive electrodes located proximate to said modulator region and on opposing sides of said optical modulator window.

11. The optical modulator as recited in claim 8 comprising a plurality of drive electrodes and a plurality of sense elements located proximate to said modulator region.

12. The optical modulator as recited in claim 8 wherein said drive electrode is tongue-shaped.

13. The optical modulator as recited in claim 8 wherein said modulator region is formed from at least silicon nitride.

14. The optical modulator as recited in claim 8 wherein said drive electrodes and sense elements are formed from a material selected from the group consisting of:

aluminum,

platinum,

tungsten,

conductive silicon, and

gold.

15. A method of manufacturing an optical modulator, comprising:

providing a substrate;

forming a gap layer over said substrate;

forming a modulator region over said gap layer;

forming a drive electrode over said modulator region; and

forming a sense element over said modulator region proximate said drive electrode.

16. The method as recited in claim 15 further comprising forming an optical modulator window in said modulator region.

17. The method as recited in claim 16 further comprising forming a pair of drive electrodes over said modulator region and on opposing sides of said optical modulator window.

18. The method as recited in claim 15 further comprising forming a plurality of drive electrodes and a plurality of sense elements over said modulator region.

19. The method as recited in claim 15 wherein said drive electrode is tongue-shaped.

20. The method as recited in claim 15 wherein said modulator region is formed from at least silicon nitride.

21. The method as recited in claim 15 wherein said drive electrodes and sense elements are formed from a material selected from the group consisting of:

aluminum,

platinum,

tungsten,

conductive silicon, and

gold.