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Acoustic sensor, its manufacturing method, and semiconductor electret condenser microphone using the same acoustic sensor

  • US 20030035558A1
  • Filed: 10/21/2002
  • Published: 02/20/2003
  • Est. Priority Date: 09/03/1997
  • Status: Active Grant
First Claim
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1. A manufacturing method of acoustic sensor comprising a step of forming a necessary electronic circuit on a wafer, and opening a through hole away from said electronic circuit, a step of forming an electrode layer on the wafer surface away from said through hole, a step of laminating an electret film away from part of said electrode layer and said through hole, a step of laminating a spacer on said electret film, a step of forming a diaphragm with a spacing to said electret film on said spacer, and a step of dividing into individual sensors.

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