Optical scanner and method of fabricating the same
First Claim
1. An optical scanner comprising:
- a base substrate on which an interconnection layer having a predetermined pattern is formed;
a frame having a rectangular frame shape which is formed on the base substrate;
a H-shaped stage which has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis;
supporters which have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage; and
a stage driving structure which has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively.
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Accused Products
Abstract
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.
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Citations
22 Claims
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1. An optical scanner comprising:
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a base substrate on which an interconnection layer having a predetermined pattern is formed;
a frame having a rectangular frame shape which is formed on the base substrate;
a H-shaped stage which has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis;
supporters which have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage; and
a stage driving structure which has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An optical scanner comprising:
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a base substrate on which an interconnection layer having a predetermined pattern is formed;
a rectangular frame which is formed on the base substrate;
a plurality of stages which are arrayed in the frame;
supporters which suspend the stages from the frame; and
a stage driving structure which has moving comb electrodes and fixed comb electrodes which are formed beneath the stage and on the base substrate opposite to the stage, respectively, wherein each of the stages has a H shape and includes a central area that is positioned on a central axis and four extended areas that extend from two sides of the central area through which the central axis passes, parallel to the central axis, and each of the supporters has support beams that are connected to the frame and torsion bars that extends from the support beams and are connected to the central area of the stage. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of fabricating an optical scanner comprising:
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forming an upper structure which has a rectangular first partial frame, a central area supported by supporters having support beams that are positioned inside separated areas in the first partial frame and extend from the first frame and torsion bars that extend from the support beams, and directly connected to the torsion bars, and a H-shaped stage that extends from the central area, parallel to the torsion bars;
forming a lower structure which has a second partial frame opposite to the first partial frame and a substrate that supports the second partial frame and is spaced apart from the stage; and
bonding the first partial frame to the second partial frame by eutectic bonding to combine the upper and lower structures into one structure. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification