Process for producing photovoltaic devices
First Claim
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1. A process for making a photovoltaic device comprising depositing at least one thin film layer on a substrate using one or more sources of material to be deposited, whereby the substrate and a means for depositing the material move in opposite relation to each other thereby forming on the substrate at least one thin film of the material.
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Abstract
A continuous process for depositing a thin film layer or layers on a substrate during the production of thin film photovoltaic devices comprising moving the substrate at an elevated temperature in a reduced pressure environment past one or more sources of material to be deposited thereby forming on the substrate at least one thin film of the material from the source.
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Citations
27 Claims
- 1. A process for making a photovoltaic device comprising depositing at least one thin film layer on a substrate using one or more sources of material to be deposited, whereby the substrate and a means for depositing the material move in opposite relation to each other thereby forming on the substrate at least one thin film of the material.
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11. A process for making a photovoltaic device comprising (a) depositing a CTO layer on a substrate by moving the substrate past one or more sources of the CTO layer, (b) scribing the CTO layer, (c) depositing an amorphous silicon layer on the substrate by moving the substrate past one or more sources of the amorphous silicon;
- (d) scribing the amorphous silicon layer; and
(e) depositing a metal layer on the substrate by moving the substrate past one or more sources of the metal layer and (f) laser scribing the metal layer, where each of the steps (a) through (e) are conducted at or about the same pressure. - View Dependent Claims (12)
- (d) scribing the amorphous silicon layer; and
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13. An apparatus suitable for manufacturing a semiconductor layer comprising a means for transporting a substrate;
- at least one deposition chamber for maintaining a pressure below atmospheric pressure;
a means for continuously depositing a semiconductor layer on a substrate as a substrate and the means for depositing the semiconductor layer move in opposite relation to each other. - View Dependent Claims (14)
- at least one deposition chamber for maintaining a pressure below atmospheric pressure;
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15. An apparatus for depositing at least one layer on a substrate to form a photovoltaic device comprising:
- a means for transporting the substrate, at least one deposition chamber, a means for depositing photovoltaically active layers on the substrate, means for depositing a front contact layer on the substrate, means for depositing a back contact layer on the substrate, wherein at least one of the depositing means can accomplish the deposition in a continuous manner as the substrate passes the depositing means.
- View Dependent Claims (16, 17, 18, 19, 20)
- 21. A photovoltaic device formed by depositing one or more layers on a substrate wherein at least one of the layers is deposited in a continuous manner as the substrate and means for depositing the layer move in opposite relation to each other.
- 24. A semiconductor layer having an oscillating level of impurities through at least a portion of the depth of the layer.
Specification