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Active control of electron temperature in an electrostatically shielded radio frequency plasma source

  • US 20030045012A1
  • Filed: 08/14/2002
  • Published: 03/06/2003
  • Est. Priority Date: 02/15/2000
  • Status: Active Grant
First Claim
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1. A method for generating a plasma having a selected electron temperature, comprising:

  • generating electrical power having components at at least two different frequencies;

    deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and

    selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.

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