Active control of electron temperature in an electrostatically shielded radio frequency plasma source
First Claim
1. A method for generating a plasma having a selected electron temperature, comprising:
- generating electrical power having components at at least two different frequencies;
deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and
selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.
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Abstract
A method and apparatus for generating a plasma having a selected electron temperature, by: generating electrical power having components at at least two different frequencies; deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.
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Citations
24 Claims
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1. A method for generating a plasma having a selected electron temperature, comprising:
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generating electrical power having components at at least two different frequencies;
deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and
selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. Apparatus for generating a plasma having a selected electron temperature, comprising:
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generating means for generating electrical power having components at at least two different frequencies;
electromagnetic energy deriving and coupling means connected to said generating means for deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and
selecting means coupled to said electromagnetic energy deriving and coupling means for selecting a power level for the electromagnetic energy at each frequency in order to cause the plasma to have the selected electron temperature. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification