Method to prevent electrical shorts between adjacent metal lines
First Claim
1. A method to prevent electrical shorts between adjacent metal lines on a semiconductor substrate having an insulating layer with a pair of damascene structures connecting to the semiconductor substrate and a scratch on the upper surface of the insulating layer between the damascene structures, comprising the steps of:
- (a) forming a diffusion barrier layer on the pair of damascene structures and the scratch;
(b) forming a metal layer to fill the pair of damascene structures;
(c) chemical mechanical polishing the metal layer to form a metal line; and
(d) removing the diffusion barrier layer disposed on the surface of the scratch by etching.
1 Assignment
0 Petitions
Accused Products
Abstract
A method to prevent electrical shorts between adjacent metal lines on a semiconductor substrate having an insulating layer with a pair of damascene structures connecting to the semiconductor substrate and a scratch on the upper surface of the insulating layer, between the damascene structures, is provided. A diffusion barrier layer is deposited on the damascene structures and the scratch. Then, a metal layer is formed to fill the damascene structures. Next, the metal is chemical-mechanically polished to form a metal line. Finally, the diffusion barrier layer disposed on the surface of the scratch is removed by etching process.
-
Citations
8 Claims
-
1. A method to prevent electrical shorts between adjacent metal lines on a semiconductor substrate having an insulating layer with a pair of damascene structures connecting to the semiconductor substrate and a scratch on the upper surface of the insulating layer between the damascene structures, comprising the steps of:
-
(a) forming a diffusion barrier layer on the pair of damascene structures and the scratch;
(b) forming a metal layer to fill the pair of damascene structures;
(c) chemical mechanical polishing the metal layer to form a metal line; and
(d) removing the diffusion barrier layer disposed on the surface of the scratch by etching. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
Specification