MEMS BASED ANGULAR ACCELEROMETER
First Claim
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2-1. An angle measurement system according to claim 2 wherein;
- said integrators are implemented in software by the microprocessor, said low pass filter is implemented in software by the microprocessor, said high pass filter is implemented in software by the microprocessor.
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Abstract
A micro-electromechanical system (MEMS) is described for economical sensing of angular accelerations, especially for use in biomechanical applications. The device design is inspired by that of the semi-circular canals of the inner ear, utilizing a fluid filled channel and differential pressure transducer. Using modem fabrication techniques, very sensitive angular acceleration instruments may be realized. By combining these fast response sensors with other sensors, such as DC response linear accelerometers, allows broader frequencies of human motion to be monitored.
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Citations
4 Claims
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2-1. An angle measurement system according to claim 2 wherein;
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said integrators are implemented in software by the microprocessor, said low pass filter is implemented in software by the microprocessor, said high pass filter is implemented in software by the microprocessor.
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Specification
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Current AssigneeChristopher P. Townsend, Steven W. Arms
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Original AssigneeChristopher P. Townsend, Steven W. Arms
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InventorsARMS, STEVEN W., TOWNSEND, CHRISTOPHER P.
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Application NumberUS09/429,471Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current73/504.17CPC Class CodesA61B 2562/0219 Inertial sensors, e.g. acce...A61B 5/11 Measuring movement of the e...G01P 15/0888 for indicating angular acce...
