Apparatus and method for detection and measurement of environmental parameters
First Claim
1. A device for in-situ measurement and recording of at least one parameter in a process, said device comprising:
- a sensor for detecting said parameter and converting to a sensor output; and
a data logger coupled to said sensor for receiving and logging said sensor output.
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Accused Products
Abstract
The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage. Logged data can be retrieved and analyzed to determine the time and location of detrimental activities such as electrostatic discharge on reticles.
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Citations
75 Claims
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1. A device for in-situ measurement and recording of at least one parameter in a process, said device comprising:
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a sensor for detecting said parameter and converting to a sensor output; and
a data logger coupled to said sensor for receiving and logging said sensor output. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 16, 17, 18)
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14. A device for in-situ measurement and recording of at least one parameter in a process, said device comprising:
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means for detecting said parameter and converting to a sensor output; and
means for receiving and logging said sensor output. - View Dependent Claims (15)
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19. A method for in-situ measurement and recording of at least one parameter in a semiconductor fabrication process comprising a plurality of stages, said method comprising:
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(a) monitoring said parameter in a stage of said plurality of stages;
(b) converting said parameter into data;
(c) logging said data and an identification of said stage; and
(d) repeating (a)-(d) for said plurality of stages. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A device for in-situ monitoring of at least one environmental parameter in a photolithographic process comprising a plurality of stages, said device comprising:
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at least one sensor for converting said environmental parameter of an associated stage into a sensor output;
an analog to digital converter for converting said sensor output to digital data; and
a communication module to communicate said digital data and an identification of said associated stage of said plurality of stages. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A device for use in conjunction with a reticle for in-situ monitoring of at least one electrical parameter in a semiconductor fabrication process comprising a plurality of stages, said device comprising:
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a sensor for converting said electrical parameter of a stage into a sensor output;
an analog to digital converter for converting said sensor output to digital data;
a data logger comprising a timestamping module for logging said digital data and an identification of said stage; and
an RF (radio frequency) communication module coupled to said data logger. - View Dependent Claims (40, 41)
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42. A method for in-situ measurement and recording of at least one parameter in a semiconductor fabrication process comprising at least one stage, said method comprising:
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(a) monitoring said parameter in said stage;
(b) converting said parameter into data; and
(c) logging said data and an identification of said stage. - View Dependent Claims (43, 44, 45, 46, 47, 48)
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49. A device for monitoring environmental parameters comprising:
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an electrostatic sensor for detecting electrostatic field and converting said electrostatic field into a first output;
an electrostatic discharge (ESD) sensor for detecting an electrostatic discharge and converting said electrostatic discharge into a second sensor output;
an analog to digital converter coupled to said electrostatic sensor and said ESD sensor for converting said first and second sensor outputs to first and second digital data, respectively; and
a data logger comprising a timestamping module for logging said first and second digital data. - View Dependent Claims (50)
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51. A method for localizing electrostatic discharges (ESD) by detecting electrostatic discharges and electrostatic field, the method comprising:
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detecting an electrostatic discharge and converting it into a first output;
detecting said electrostatic field and converting it into a second output; and
determining a valid local electrostatic discharge based on said first and second outputs. - View Dependent Claims (52, 53)
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54. A device for localizing electrostatic discharges affecting a unit by detecting an
electrostatic discharge and electrostatic field, the device comprising: -
an electrostatic sensor for detecting said electrostatic field affecting said unit and generating a first output; and
an ESD sensor for detecting said electrostatic discharge affecting said unit and generating a second output. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62)
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63. A method for localizing electrostatic discharges (ESD) by detecting electrostatic discharges and electrostatic field, the method comprising:
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detecting an electrostatic discharge and converting it into a first output;
detecting a change in said electrostatic field and converting it into a second output; and
determining a valid local electrostatic discharge based on said first and second outputs. - View Dependent Claims (64, 65)
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66. A device for localizing electrostatic discharges affecting a unit by detecting an
electrostatic discharge and electrostatic field; -
an electrostatic sensor for detecting a change in said electrostatic field and generating a first output; and
an ESD sensor for detecting said electrostatic discharge and generating a second output. - View Dependent Claims (67, 68, 69, 70, 71, 72, 73, 74, 75)
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Specification