Multiple-pass interferometry
First Claim
1. Apparatus comprising:
- a multiple-pass interferometer including reflectors to reflect at least two beams along multiple passes through the interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, the paths of the beams being sheared during the first set of passes and during the second set of passes if at least one of the reflectors has an alignment other than the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes cancels shear imparted during the first set of passes.
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Accused Products
Abstract
Interferometry system including a multiple-pass interferometer having reflectors to reflect at least two beams along multiple passes through the interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, the paths of the beams being sheared during the first set of passes and during the second set of passes if at least one of the reflectors has an alignment other than the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes cancels shear imparted during the first set of passes.
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Citations
70 Claims
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1. Apparatus comprising:
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a multiple-pass interferometer including reflectors to reflect at least two beams along multiple passes through the interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, the paths of the beams being sheared during the first set of passes and during the second set of passes if at least one of the reflectors has an alignment other than the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes cancels shear imparted during the first set of passes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 34, 36, 42, 43, 44, 45, 46, 47, 55, 56, 57, 64)
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31. Apparatus comprising:
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a multiple-pass interferometer including reflectors to reflect at least a first beam along a first path and a second beam along a second path, the first and second paths each including at least a first set of passes and a second set of passes through the interferometer, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, the relative shear between the paths of the beams changes as the beams make the first and second set of passes through the interferometer when at least one of the reflectors has an alignment other than the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes due to the reflector being cancels shear imparted during the first set of passes. - View Dependent Claims (32, 33, 35, 37)
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38. Apparatus comprising:
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a multiple-pass interferometer including reflectors to reflect at least two beams along multiple passes through the interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments, the shear between the paths of the two beams changes during the first set of passes and during the second set of passes if one of the reflectors moves from the first alignment to a second alignment different from the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes due to a deviation of one of the reflectors from the first alignment cancels shear imparted during the first set of passes due to the deviation. - View Dependent Claims (39, 40, 41)
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48. A method comprising:
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directing at least two beams along multiple passes through an interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, and causing shear that is imparted in the first set of passes to be cancelled by shear imparted in the second set of passes by redirecting the beams after the first set of passes and before the second set of passes. - View Dependent Claims (49, 50, 51, 52, 53, 54, 58, 59, 60, 61, 65, 66, 67, 68, 69, 70)
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62. A method comprising:
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directing at least two beams along multiple passes through an interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments, and redirecting the two beams after the first set of passes and before the second set of passes to cause shear that is imparted in the first set of passes caused by one of the reflectors moving from the first alignment to a second alignment to be cancelled by shear imparted in the second set of passes caused by the movement of the reflector from the first alignment to the second alignment. - View Dependent Claims (63)
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Specification