Enhanced detection of metal plating additives
First Claim
Patent Images
1. A method of detecting one or more analytes in a metal plating solution, comprising the steps of:
- collecting and analyzing an absorbance spectrum of said plating bath to determine one or more regions of low absorbance;
chemically incorporating a molecular tag into said one or more analytes to form one or more spectrophotometrically enhanced analyte-tag complexes;
analyzing said plating bath using a spectroscopic method to collect a plating bath spectrum, said spectrum containing one or more peaks corresponding to each of said one or more analyte-tag complexes in said bath;
quantifying the concentrations of each of said one or more analytes in said bath based on one or more of the peak height and area of each of said analyte-tag complexes.
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Abstract
A method for detecting and quantifying analytes such as chemical additives in metal plating bath solutions is provided. Molecular tags are incorporated into the chemical structure of the analytes of interest to affect the spectral properties of the resulting analyte-tag complexes such that they are more readily detectable in the plating bath solution by absorbance, fluorescence, or Raman spectroscopic methods.
54 Citations
25 Claims
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1. A method of detecting one or more analytes in a metal plating solution, comprising the steps of:
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collecting and analyzing an absorbance spectrum of said plating bath to determine one or more regions of low absorbance;
chemically incorporating a molecular tag into said one or more analytes to form one or more spectrophotometrically enhanced analyte-tag complexes;
analyzing said plating bath using a spectroscopic method to collect a plating bath spectrum, said spectrum containing one or more peaks corresponding to each of said one or more analyte-tag complexes in said bath;
quantifying the concentrations of each of said one or more analytes in said bath based on one or more of the peak height and area of each of said analyte-tag complexes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 25)
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22. A method of detecting one or more analytes in a metal plating solution, comprising the steps of:
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collecting and analyzing an absorbance spectrum of said plating bath to determine one or more regions of low absorbance;
chemically incorporating a molecular tag that has one or more absorbance bands in one of said regions of low absorbance into said one or more analytes to form one or more spectrophotometrically enhanced complexes;
analyzing said plating bath using absorbance spectroscopy to collect a plating bath spectrum, said spectrum containing one or more peaks corresponding to each of said one or more analyte complexes in said bath;
quantifying the concentrations of each of said one or more analytes in said bath based on one or more of the peak height and area of the peaks of each of said analyte complexes.
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23. A method of detecting one or more analytes in a metal plating solution, comprising the steps of:
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collecting and analyzing an absorbance spectrum of said plating bath to determine one or more regions of low absorbance;
chemically incorporating a fluorescent molecular tag whose excitation and emission wavelengths are in one of said regions of low absorbance into said one or more analytes to form one or more spectrophotometrically enhanced complexes;
analyzing said plating bath using fluorescence spectroscopy to collect a plating bath spectrum, said spectrum containing one or more fluorescent emission peaks corresponding to each of said one or more analyte complexes in said bath;
quantifying the concentrations of each of said one or more analytes in said bath based on one or more of the peak height and area of each of said analyte complexes.
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24. A method of detecting one or more analytes in a metal plating solution, comprising the steps of:
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collecting and analyzing an absorbance spectrum of said plating bath to determine one or more regions of low absorbance;
chemically incorporating a molecular tag into said one or more analytes to form one or more spectrophotometrically enhanced complexes, said molecular tag increasing the intensity of Raman emissions from said analyte-tag complex in response to excitation by incident light at a wavelength in one of said regions of low absorbance;
analyzing said plating bath using Raman spectroscopy to collect a Raman spectrum, said spectrum containing one or more Raman emission peaks corresponding to each of said one or more analyte complexes in said bath;
quantifying the concentrations of each of said one or more analytes in said bath based on one or more of the peak height and area of each of said analyte complexes.
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Specification