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Micromechanical component and corresponding production method

  • US 20030049878A1
  • Filed: 09/09/2002
  • Published: 03/13/2003
  • Est. Priority Date: 04/11/2000
  • Status: Active Grant
First Claim
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1. A micromechanical component comprising:

  • a substrate (1);

    a micromechanical functional plane (100) provided on the substrate;

    a covering plane (200) provided on the micromechanical function plane (100); and

    a printed circuit trace plane (300) provided on the covering plane (200);

    wherein the covering plane (200) features a monocrystalline region (14) which is epitaxially grown on an underlying monocrystalline region (7;

    24); and

    the covering plane (200) features a preferably polycrystalline region (15) which is epitaxially grown on an underlying polycrystalline starting layer (13) at the same time.

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