Mechanical resonator device having phenomena-dependent electrical stiffness
First Claim
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1. A mechanical resonator device having a resonant frequency, the device comprising:
- a resonator; and
an electrode adjacent the resonator to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of the resonant frequency caused by the phenomena into consideration.
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Abstract
A mechanical resonator device which has a phenomena-dependent electrical stiffness is provided. The phenomena may be temperature or acceleration, for example. The device includes a substrate and a resonator supported above the substrate by supports. The device further includes an electrode supported above the substrate adjacent the resonator by supports to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of resonant frequency of the device caused by the phenomena into consideration.
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26 Claims
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1. A mechanical resonator device having a resonant frequency, the device comprising:
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a resonator; and
an electrode adjacent the resonator to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of the resonant frequency caused by the phenomena into consideration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification