Apparatus for the synthesis of layers, coatings or films

• US 20030051664A1
• Filed: 09/20/2001
• Published: 03/20/2003
• Est. Priority Date: 09/20/2001
• Status: Active Grant

• Current Assignee: HelioVolt Corporation
• Original Assignee: HelioVolt Corporation
• Inventors: Stanbery, Billy J.
• Granted Patent: US 6,787,012 B2
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C23C 14/0005 Separation of the coating from the substrate
• CPC Class Codes: C23C 14/0623 Sulfides, selenides or tellurides
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/305 Sulfides, selenides, or tellurides
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: C23C 26/00 Coating not provided for in groups C23C2/00 - C23C24/00
• CPC Class Codes: H01L 31/0322 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
• CPC Class Codes: H01L 31/03928 including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
• CPC Class Codes: H01L 31/1892 methods involving the use of temporary, removable substrates
• CPC Class Codes: Y02E 10/541 CuInSe2 material PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.

Claims

1. An apparatus, comprising:

a first holder;

a second holder coupled to the first holder;

a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;

a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and

a release layer coupled to the raised patterned surface of the reusable tool.

2. The apparatus of claim 1, wherein the first holder is selected from the group consisting of a platten, a roller and a conveyor.

3. The apparatus of claim 2, wherein the first holder is adapted to hold a plurality of reusable tools.

4. The apparatus of claim 1, wherein the second holder is selected from the group consisting of a platten, a roller and a conveyor.

5. The apparatus of claim 1, wherein the linkage includes a pressure generator adapted to generate a pressure between the release layer and the second holder.

6. The apparatus of claim 5, wherein the pressure generator can exert a pressure of from approximately 0.01 atm to approximately 10.0 atm between the release layer and the second holder.

7. The apparatus of claim 1, further comprising a heater coupled to the first holder.

8. The apparatus of claim 7, wherein the heater can establish a temperature within a precursor layer that can be coupled to the second holder of between the release layer and the second holder of from approximately 520°

C. to approximately 635°

C.

9. The apparatus of claim 7, where the heater applies an electrical bias to the reusable tool while simultaneously passing a current pulse through the reusable tool laterally.

10. The apparatus of claim 7, wherein the heater includes an electrically biased, heated piston that can be brought into contact with the first holder.

11. The apparatus of claim 7, wherein the heater radiatively heats the first holder to a reaction temperature while simultaneously biasing the reusable tool via an electrical contact that is coupled to the reusable tool.

12. The apparatus of claim 7, wherein the first holder includes a roller and the heater is located within the roller.

13. The apparatus of claim 7, further comprising a cooler coupled to the first holder.

14. The apparatus of claim 1, wherein the release layer includes at least one fluoride selected from the group consisting of CaF₂ and SrF₂.

15. The apparatus of claim 1, further comprising a circuit coupled to the first holder and the second holder to apply an electrostatic field across the first holder and the second holder.

16. The apparatus of claim 15, wherein the circuit can apply an electrostatic field strength of from approximately 0.03 volts/micron to approximately 3.5 volts/micron.

17. The apparatus of claim 16, wherein the electrostatic field strength can be from approximately 0.3 volts/micron to approximately 1.0 volts/micron.

18. The apparatus of claim 1, further comprising a precursor deposition subassembly coupled to the first holder, the precursor deposition subassembly adapted to couple a precursor layer to the first holder.

19. The apparatus of claim 18, wherein the precursor deposition subassembly is adapted to perform at least one deposition technique selected from the group consisting of sputtering followed by plasma discharge, particle deposition, physical vapor deposition and chemical vapor deposition.

20. The apparatus of claim 1, further comprising a precursor deposition subassembly coupled to the second holder, the precursor deposition subassembly adapted to couple a precursor layer to the second holder.

21. The apparatus of claim 20, wherein the precursor deposition subassembly is adapted to perform at least one deposition technique selected from the group consisting of sputtering followed by plasma discharge, particle deposition, physical vapor deposition and chemical vapor deposition.

22. A photovoltaic device made with the apparatus of claim 1.

23. An electrical power generation system comprising the photovoltaic device of claim 22.

24. An electronic device made with the apparatus of claim 1.

25. A photodiode made with the apparatus of claim 1.