Manufacturing apparatus of a semiconductor device having a sensing system

• US 20030051814A1
• Filed: 09/17/2002
• Published: 03/20/2003
• Est. Priority Date: 09/18/2001
• Status: Abandoned Application

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Kwon, Gi-Chung
• Application Number:
  US10/246,254
• Publication Number:
  US 20030051814A1
• Time in Patent Office: Days
• US Class Current: 156/345.24
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A manufacturing apparatus of a semiconductor device includes: a chamber having a sidewall; a window viewer of transparent material passing through the sidewall of the chamber; a window frame fixing the window viewer in the sidewall, the window frame having at least one opening; an image pickup device in the at least one opening, the image pickup device making image data showing a state of the chamber; and a logical operator connected to the image pickup device, the logical operator deciding whether the state of the chamber is normal or not by analyzing the image data.

Claims

1. An apparatus of manufacturing a semiconductor device, comprising:

a chamber having a sidewall;

a window viewer of transparent material passing through the sidewall of the chamber;

a window frame fixing the window viewer in the sidewall, the window frame having at least one opening;

an image pickup device in the at least one opening, the image pickup device making image data showing a state of the chamber; and

a logical operator connected to the image pickup device, the logical operator deciding whether the state of the chamber is normal or not by analyzing the image data.

2. The apparatus according to claim 1, wherein the window viewer includes a quartz.

3. The apparatus according to claim 1, wherein the window frame includes a bracket in the at least one opening, the bracket fixing the image pickup device.

6. The apparatus according to claim 1, wherein the image pickup device includes one of a charge coupled device (CCD) camera, a personal computer camera, an optical fiber scope and a wide viewing lens.

7. The apparatus according to claim 1, wherein the logic operator comprises:

a first conversion unit transforming the image data into manageable data;

a control unit analyzing the manageable data; and

an indicating unit showing analysis results of the control unit.

8. The apparatus according to claim 7, wherein the control unit compares the manageable data with reference data previously inputted.

9. The apparatus according to claim 8, wherein the control unit includes a data base, the reference data being saved in the data base.

10. The apparatus according to claim 7, wherein the indicating unit includes an image display device, a buzzer or a warning flare.

11. The apparatus according to claim 7, wherein the chamber comprises:

a plate dividing an interior of the chamber into first and second regions;

a plasma generation source in the first region; and

a chuck in the second region, the chuck having a bias source therein.

12. The apparatus according to claim 10, wherein the logic operator further comprises:

a second conversion unit connected to the plasma generation source; and

a third conversion unit connected to the bias source.

13. The apparatus according to claim 11, wherein the second conversion unit transmits an off signal to the plasma generation source according to the analysis results.

14. The apparatus according to claim 11, wherein the third conversion unit transmits an off signal to the bias source according to the analysis results.

4. The apparatus according to claim 4, wherein the bracket has a cylinder shape.

5. The apparatus according to claim 4, wherein the bracket is substantially normal to the sidewall.