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Method for forming a product sensor, and a product sensor

  • US 20030052077A1
  • Filed: 09/19/2002
  • Published: 03/20/2003
  • Est. Priority Date: 03/31/2000
  • Status: Active Grant
First Claim
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1. A method for forming a product sensor, which product sensor is formed on a substrate and provided with at least one electric circuit comprising at least one capacitor and at least one coil, at least part of the electric circuit is formed by applying a first conductive layer on the product sensor by evaporation, at least at the location of the electric circuit, wherein the production of the product sensor comprises:

  • a first plating step, in which a first conductive layer is evaporated on at least one surface of the substrate;

    a step of adding an etching resist, in which the first conductive layer is coated with the etching resist in substantially other parts than at the electric circuit;

    a step of adding a fuse mask, in which the fuse mask is inserted on the first conductive layer at the location of one or more fuses to be made;

    a depositing step, in which a second conductive layer is deposited on those parts of the first conductive layer which do not contain electrolytic resist; and

    an etching step, in which the electrolytic resist and that part of the first conductive layer which is under the electrolytic resist are removed substantially entirely.

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