Passive zero shear interferometers

• US 20030053073A1
• Filed: 07/29/2002
• Published: 03/20/2003
• Est. Priority Date: 08/02/2001
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A.
• Granted Patent: US 6,847,452 B2
• Time in Patent Office: Days
• US Class Current: 356/498
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02003 using beat frequencies
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position

Abstract

Beam shear can be reduced in an interferometric system by conditioning an input beam prior to directing the input beam to an interferometer. Accordingly, apparatus and methods for conditioning an interferometer input beam are disclosed.

Claims

1. An interferometry system, comprising:

a beam conditioning assembly positioned to direct an input light beam to reflect from a measurement object and derive a conditioned beam from the input beam after it reflects from the measurement object; and

an interferometer positioned to receive the conditioned beam, wherein during operation the interferometer splits the conditioned beam into a measurement beam and at least one other beam, directs the measurement beam to reflect from the measurement object, and overlaps the measurement beam after it reflects from the measurement object with the other beam to form an output beam.

2. The interferometry system of claim 1, wherein the measurement object comprises a plane mirror.

3. The interferometry system of claim 2, wherein during operation the beam conditioning assembly causes the measurement beam to be orthogonal to the plane mirror for a range of orientations of the plane mirror.

4. The interferometry system of claim 2, wherein the beam conditioning assembly comprises an optical system that directs the input beam to reflect from the plane mirror to cause a change in propagation direction of the conditioned beam in response to a change in the angular orientation of the plane mirror with respect to the input beam.

5. The interferometry system of claim 4, wherein the optical system causes the input beam to contact the plane mirror once.

6. The interferometry system of claim 4, wherein the optical system comprises a single pass interferometer.

7. The interferometry system of claim 4, wherein the beam conditioning assembly further comprises an afocal system that scales the change in the propagation direction of the conditioned beam by an amount related to a magnification factor of the afocal system.

8. The interferometry system of claim 7, wherein the magnification factor is 2.

9. The interferometry system of claim 7, wherein the beam conditioning assembly further comprises an image inverter positioned to invert the change in the propagation direction to cause the measurement beam to be orthogonal to the plane mirror for a range of orientations of the plane mirror.

10. The interferometry system of claim 9, wherein during operation the beam conditioning assembly further shears the input beam to reduce shear of the conditioned beam entering the interferometer.

11. The interferometry system of claim 10, wherein the beam conditioning assembly further comprises a double pass optical system that causes the input beam to reflect from the plane mirror twice.

12. The interferometry system of claim 11, wherein the double pass optical system comprises an etalon oriented relative to a preselected orientation of the plane mirror so that the etalon substantially transmits the input beam and substantially reflects a first intermediate beam corresponding to the input beam once-reflected from the plane mirror.

13. The interferometry system of claim 12, wherein the etalon substantially transmits a second intermediate beam corresponding to the input beam twice-reflected from the plane mirror.

14. The interferometry system of claim 11, wherein the double pass optical system comprises a double pass interferometer positioned to direct an input beam having a first polarization state to contact the plane mirror twice.

15. The interferometry system of claim 14, wherein the double pass optical system further comprises a first polarizing beam splitter and a first waveplate, which receive the input beam, splits the input beam into a first component having the first polarization state and a second component, and rotates a polarization state of the second component to be substantially parallel to the first polarization state, and further directs the first and second components towards the double pass interferometer.

16. The interferometry system of claim 11, wherein the beam conditioning assembly includes a second afocal system which during operation changes the shear of the twice-reflected input beam by an amount related to a magnification factor of the afocal system.

17. The interferometry system of claim 16, wherein the magnification factor is 0.5.

18. The interferometry system of claim 3, wherein during operation the beam conditioning assembly shears the input beam to reduce shear of the conditioned beam entering the interferometer.

19. The interferometry system of claim 2, wherein during operation the beam conditioning assembly shears the input beam in response to a change in the angular orientation of the plane mirror with respect to the input beam, thereby reducing shear of the output beam.

20. The interferometry system of claim 2, wherein the beam conditioning assembly comprises a first optical system that causes the measurement beam to be orthogonal to the plane mirror for a range of orientations of the plane mirror and a second optical system that reduces shear of the conditioned input beam entering the interferometer.

21. The interferometry system of claim 20, wherein the beam conditioning system directs the input beam to the second optical system and then to the first optical system.

22. The interferometry system of claim 20, wherein the first optical system causes the input beam to contact the plane mirror an odd number of times.

23. The interferometry system of claim 22, wherein the first optical system comprises a single pass plane mirror interferometer.

24. The interferometry system of claim 20, wherein the first optical system comprises an afocal system that scales a change in a propagation direction of the conditioned beam by an amount related to a magnification factor of the afocal system.

25. The interferometry system of claim 20, wherein the first optical system comprises an image inverter positioned to invert a change in a propagation direction of the conditioned beam.

26. The interferometry system of claim 20, wherein the second optical system causes the input beam to contact the plane mirror an even number of times.

27. The interferometry system of claim 26, wherein the second optical system comprises a double pass plane mirror interferometer.

28. The interferometry system of claim 20, wherein the second optical system comprises an afocal system that changes a shear of the conditioned beam.

29. The interferometry system of claim 1, wherein the measurement object is a retroreflector.

30. The interferometry system of claim 29, wherein the beam conditioning assembly comprises an afocal system and relay optics.

31. The interferometry system of claim 30, wherein the retroreflector directs the input beam towards the afocal system which changes a shear of the conditioned beam by an amount related to a magnification factor of the afocal system.

32. The interferometry system of claim 31, wherein the beam conditioning assembly reduces shear between the measurement beam and the at least one other beam in the output beam for a range of orientations and positions of the retroreflector.

33. The interferometry system of claim 29, wherein the interferometer is a single pass interferometer.

34. The interferometry system of claim 1, further comprising a light source positioned relative to the beam conditioning assembly so that during operation the light source directs the input beam toward the beam conditioning assembly.

35. The interferometry system of claim 34, wherein the input beam comprises first and second components having respective first and second frequencies and polarization states, wherein the first and second frequencies are different and the first and second polarization states are orthogonal.

36. The interferometry system of claim 1, further comprising a detector positioned to receive the output beam from the interferometer.

37. The interferometry system of claim 1, further comprising a reference detector positioned to receive a reference beam derived from the conditioned beam.

38. The interferometry system of claim 1, further comprising a second interferometer positioned to receive a secondary beam derived from the conditioned beam, wherein during operation the second interferometer splits the secondary beam into a secondary measurement beam and at least one other beam and directs the secondary measurement beam toward the measurement object, and overlaps a reflected secondary measurement beam and the other beam to form a secondary output beam.

39. The interferometry system of claim 1, further comprising an angle measuring interferometer positioned to receive a conditioned angle measurement beam derived from the conditioned beam or the measurement beam.

40. The interferometry system of claim 39, wherein during operation the angle measuring interferometer splits the conditioned angle measurement beam into first and second components, directs the first and second components along first and second paths, and overlaps the first and second components at a detector.

41. The interferometry system of claim 40, wherein during operation the overlapping first and second components cause the detector to generate an interference signal related to a propagation direction of the conditioned angle measurement beam.

42. The interferometry system of claim 41, wherein the interference signal is related to the orientation of the measurement object.

43. The interferometry system of claim 39, wherein the angle measuring interferometer comprises an etalon and transmission of the conditioned angle measurement beam through the etalon is related to a propagation direction of the conditioned angle measurement beam.

44. A lithography system for fabricating integrated circuits comprising:

first and second components, the first and second components being movable relative to one another; and

the interferometry system of claim 1 secured to the second component, wherein the measurement object is rigidly secured to the first component and during operation the interferometry system measures the position of the first component relative to the second component.

45. The lithography system of claim 44, wherein one of the first and second components is a movable stage which during operation supports a wafer.

46. An interferometry method, comprising:

deriving a conditioned beam from an input beam by directing the input beam to contact a measurement object at least once;

splitting the conditioned beam into a measurement beam and at least one other beam;

directing the measurement beam to reflect from the measurement object at least once; and

overlapping the reflected measurement beam and the at least one other beam to form an output beam.

47. The interferometry method of claim 46, wherein the conditioned beam is derived to reduce a shear between the overlapping reflected measurement beam and the at least one other beam in the output beam for a range of positions of the measurement object.

48. The interferometry method of claim 46, wherein the measurement object is a plane mirror.

49. The interferometry method of claim 48, wherein the measurement beam is orthogonal to the plane mirror for a range of incident angles of the input beam on the plane mirror.

50. The interferometry method of claim 49, wherein deriving the conditioned beam comprises directing the input beam to reflect from the plane mirror to change a propagation direction of the measurement beam in response to a change in the angular orientation of the plane mirror with respect to the input beam.

51. The interferometry method of claim 50, wherein deriving the conditioned beam further comprises directing a reflected input beam through an afocal system to scale the change in propagation direction by an amount related to a magnification factor of the afocal system.

52. The interferometry method of claim 51, wherein deriving the conditioned beam further comprises directing the reflected input beam through an image inverter to invert the change in propagation direction to cause the measurement beam to be orthogonal to the plane mirror for a range of orientations of the plane mirror.

53. The interferometry method of claim 52, wherein deriving the conditioned beam further comprises shearing the reflected input beam in response to changes in the orientation of the plane mirror with respect to the input beam.

54. The interferometry method of claim 53, wherein deriving the conditioned beam further comprises directing the sheared input beam through a second afocal system to scale the shear by an amount related to a magnification of the second afocal system.

55. The interferometry method of claim 54, wherein the reflected input beam is sheared to reduce shear of the conditioned beam entering the interferometer.

56. The interferometry method of claim 46, further comprising detecting an intensity of the output beam.

57. The interferometry method of claim 46, wherein the measurement object is a retroreflector.

58. The interferometry method of claim 46, further comprising deriving a conditioned angle measurement beam from the output beam or measurement beam and directing the conditioned angle measurement beam to an angle measuring interferometer.

59. The interferometry method of claim 58, wherein the angle measuring interferometer splits the conditioned angle measurement beam into first and second components, directs the first and second components along first and second paths, and overlaps the first and second components at a detector.

60. The interferometry method of claim 59, wherein the overlapping first and second components cause the detector to generate an interference signal related to a propagation direction of the conditioned angle measurement beam.

61. The interferometry method of claim 60, wherein the interference signal is related to the orientation of the measurement object.

62. The interferometry method of claim 46, wherein the input beam contacts the measurement object an odd number of times.

63. The interferometry method of claim 62, wherein the input beam contacts the measurement object three times.

64. The interferometry method of claim 46, wherein the measurement beam contacts the measurement object an odd number of times.

65. The interferometry method of claim 64, wherein the measurement beam contacts the measurement object once.

66. The interferometry method of claim 46, wherein the measurement beam contacts the measurement object an even number of times.

67. The interferometry method of claim 66, wherein the measurement beam contacts the measurement object twice.

68. An interferometry system, comprising:

a beam conditioning assembly positioned to direct an input light beam to reflect from a measurement object and derive a conditioned beam from the input beam after it reflects from the measurement object; and

an interferometer positioned to receive the conditioned beam and split the conditioned beam into a measurement beam and at least one other beam, the interferometer directs the measurement beam to reflect from the measurement object, and overlaps the measurement beam after it reflects from the measurement object with the other beam to form an output beam,

wherein for a range of orientations of the measurement object the beam conditioning assembly causes the measurement beam to be orthogonal to the measurement object.