Variable geometry mirror having high-precision, high geometry controllability

• US 20030053227A1
• Filed: 09/17/2002
• Published: 03/20/2003
• Est. Priority Date: 09/17/2001
• Status: Active Grant

• Current Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Original Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Inventors: Kaneko, Shinji
• Granted Patent: US 6,682,199 B2
• Time in Patent Office: Days
• US Class Current: 359/846
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence

Abstract

A flexible thin film is supported by a frame member through two end portions opposing each other. A reflection surface is provided on the flexible thin film to reflect light. A first electrode is provided integrally with the flexible thin film. A second electrode is substantially fixed to the frame member so as to oppose the first electrode on an opposite side of the reflection surface. A third electrode is substantially fixed to the frame member so as to oppose the first electrode on the same side as the reflection surface. An optical opening for introducing light into the reflection surface is provided on the side of the reflection surface. At least one of the second and third electrodes is divided in the direction connecting the two end portions. The configuration of the reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between the first electrode and the divided second or third electrode.

Claims

1. A variable geometry cylinder mirror comprising:

a frame member;

a flexible thin film in which two end portions opposing each other are supported by said frame member;

a reflection surface which is provided on said flexible thin film and reflects light;

a first electrode provided integrally with said flexible thin film;

a second electrode substantially fixed to said frame member so as to oppose said first electrode on an opposite side of said reflection surface; and

a third electrode substantially fixed to said frame member so as to oppose said first electrode on the same side as said reflection surface,

wherein an optical opening to introduce light into said reflection surface is provided on the side of said reflection surface,

at least any one of said second and third electrodes is divided in the direction connecting said two end portions, and

the configuration of said reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between said first electrode and said divided second or third electrode.

2. The variable geometry cylinder mirror according to claim 1, wherein the reflection surface of said flexible thin film is formed of metallic thin film and serves as said first electrode.

3. The variable geometry cylinder mirror according to claim 1, wherein an openings are provided on both sides of said reflection surface in said flexible member across a straight line connecting the end portions supported by said frame member.

4. The variable geometry cylinder mirror according to claim 1, wherein in a region between the end portion supported by said frame member and said reflection surface in said flexible thin film, stiffness thereof in the direction in which said second or third electrode is divided is reduced.

5. The variable geometry cylinder mirror according to claim 4, wherein the region in which the stiffness of said flexible thin film is reduced is wave-like.

6. The variable geometry cylinder mirror according to claim 5, wherein said flexible thin film is composed of overlaid layers of metallic thin film and silicon nitride or metallic thin film and silicon oxide.

7. The variable geometry cylinder mirror according to claim 4, wherein as for the sectional area of said flexible thin film in a direction perpendicular to the direction in which said second or third electrode is divided, that of the region in which the stiffness of said flexible thin film is reduced is smaller than that of a region corresponding to said reflection surface.

8. The variable geometry cylinder mirror according to claim 4, wherein an opening or a cutout is provided in the region in which the stiffness of said flexible thin film is reduced.

9. The variable geometry cylinder mirror according to claim 1, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

10. The variable geometry cylinder mirror according to claim 7, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

11. The variable geometry cylinder mirror according to claim 8, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

12. The variable geometry cylinder mirror according to claim 1, wherein said third electrode and a supporting member thereof are provided outside said optical opening.

13. The variable geometry cylinder mirror according to claim 1, wherein said third electrode is disposed within said optical opening while said third electrode disposed within said optical opening and the supporting member thereof have property allowing light to be transmitted through.

25. The variable geometry cylinder mirror according to claim 1, wherein said flexible thin film having said frame member, said reflection surface and said first electrode is manufactured by:

a diffused layer forming step of forming a diffused layer having a predetermined shape of a conductive type in a first main face of a mono-crystal silicon substrate of another conductive type;

a thin film laminating step of laminating a thin film on the first main face of the mono-crystal silicon substrate;

an etching step of, with a predetermined voltage applied to the diffused layer of said conductive type, carrying out electrochemical etching from a second main face in an etching solution; and

a cutting and separating step of cutting and separating frame-like mono-crystal silicon which is part of said mono-crystal silicon substrate form portions corresponding to said flexible thin film and said frame member.

27. The variable geometry cylinder mirror according to claim 5, wherein said flexible thin film having said frame member, said reflection surface and said first electrode is manufactured by:

a groove forming step of forming parallel grooves in a first main face of a flat substrate;

a thin film forming step of forming a thin film on the first main face of said substrate;

an etching step of etching until the thin film formed in said thin film forming step is exposed from a second main face of said substrate; and

a cutting and separating step of cutting and separating a fame-like portion which is part of said substrate from portions corresponding to said flexible thin film and said frame member.

14. A variable geometry cylinder mirror comprising:

a frame member;

a flexible thin film in which two end portions opposing each other are supported by said frame member;

a reflection surface which is provided on said flexible thin film and reflects light;

a first electrode provided integrally with said flexible thin film; and

a second electrode substantially fixed to said frame member so as to oppose said first electrode on an opposite side of said reflection surface, the second electrode being divided in the direction connecting said two end portions,

wherein the configuration of said reflection is controlled to a desired configuration by applying a desired voltage selectively to between said first electrode and said divided second or third electrode.

15. The variable geometry cylinder mirror according to claim 14, wherein the reflection surface of said flexible thin film is formed of metallic thin film and serves as said first electrode.

16. The variable geometry cylinder mirror according to claim 14, wherein an openings are provided on both sides of said reflection surface in said flexible member across a straight line connecting the end portions supported by said frame member.

17. The variable geometry cylinder mirror according to claim 14, wherein in a region between the end portion supported by said frame member and said reflection surface in said flexible thin film, stiffness thereof in the direction in which said second electrode is divided is reduced.

18. The variable geometry cylinder mirror according to claim 17, wherein the region in which the stiffness of said flexible thin film is reduced is wave-like.

19. The variable geometry cylinder mirror according to claim 18, wherein said flexible thin film is composed of overlaid layers of metallic thin film and silicon nitride or metallic thin film and silicon oxide.

20. The variable geometry cylinder mirror according to claim 17, wherein as for the sectional area of said flexible thin film in a direction perpendicular to the direction in which said second electrode is divided, that of the region in which the stiffness of said flexible thin film is reduced is smaller than that of a region corresponding to said reflection surface.

21. The variable geometry cylinder mirror according to claim 17, wherein an opening or a cutout is provided in the region in which the stiffness of said flexible thin film is reduced.

22. The variable geometry cylinder mirror according to claim 14, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

23. The variable geometry cylinder mirror according to claim 20, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

24. The variable geometry cylinder mirror according to claim 21, wherein said flexible thin film is composed of overlaid layers of metallic thin film and polymer material thin film.

26. The variable geometry cylinder mirror according to claim 14, wherein said flexible thin film having said frame member, said reflection surface and said first electrode is manufactured by:

a diffused layer forming step of forming a diffused layer having a predetermined shape of a conductive type in a first main face of a mono-crystal silicon substrate of another conductive type;

a thin film laminating step of laminating a thin film on the first main face of the mono-crystal silicon substrate;

an etching step of, with a predetermined voltage applied to the diffused layer of said conductive type, carrying out electrochemical etching from a second main face in an etching solution; and

cutting and separating step of cutting and separating frame-like mono-crystal silicon which is part of said mono-crystal silicon substrate form portions corresponding to said flexible thin film and said frame member.

28. The variable geometry cylinder mirror according to claim 18, wherein said flexible thin film having said frame member, said reflection surface and said first electrode is manufactured by:

a groove forming step of forming parallel grooves in a first main face of a flat substrate;

a thin film forming step of forming a thin film on the first main face of said substrate;

an etching step of etching until the thin film formed in said thin film forming step is exposed from a second main face of said substrate; and

a cutting and separating step of cutting and separating a fame-like portion which is part of said substrate from portions corresponding to said flexible thin film and said frame member.