Optical and optoelectronic articles
First Claim
1. An optical or optoelectronic article comprising:
- an optical glass substrate;
a polymeric substrate proximate the optical glass substrate; and
an amorphous diamond-like film deposited on at least a portion of the glass substrate and at least a portion of the polymeric substrate.
1 Assignment
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Accused Products
Abstract
Optical and optoelectronic articles incorporating an amorphous diamond-like film are disclosed. Specifically, the invention includes optical or optoelectronic articles containing an amorphous diamond-like film overlying two or more proximate substrates, and to methods of making optical and optoelectronic articles. In certain implementations, the film comprises at least about 30 atomic percent carbon, from about 0 to about 50 atomic percent silicon, and from about 0 to about 50 atomic percent oxygen on a hydrogen-free basis. Another embodiment includes optical or optoelectronic articles containing an amorphous diamond-like film that is further coated with a metallic or polymeric material for attachment to a device package.
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Citations
23 Claims
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1. An optical or optoelectronic article comprising:
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an optical glass substrate;
a polymeric substrate proximate the optical glass substrate; and
an amorphous diamond-like film deposited on at least a portion of the glass substrate and at least a portion of the polymeric substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of depositing a diamond-like film onto a glass and polymeric substrate, the method comprising:
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a. providing a capacitively coupled reactor system, comprising at least one grounded and one powered electrode in an evacuable reaction chamber;
b. at least partially evacuating the chamber;
c. applying radio frequency power to at least one electrode;
d. introducing a carbon-containing source into the chamber to form a plasma comprising reactive species in proximity to the electrodes and to further form an ion sheath proximate at least one electrode; and
e. exposing an article containing a glass substrate and a proximate polymeric substrate to the reactive species within the ion sheath to form an amorphous diamond-like film on at least the portion where the glass substrate and the polymeric substrate are proximate. - View Dependent Claims (20, 21)
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22. A method of making an optical or optoelectronic package comprising:
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a. providing a capacitively coupled reactor system, comprising at least two electrodes in an evacuable reaction chamber;
b. at least partially evacuating the chamber;
c. pre-cleaning an article containing a glass substrate and a proximate polymeric substrate, d. applying radio frequency power to at least one electrode;
e. introducing a carbon-containing source into the chamber to form a plasma comprising reactive species in proximity to the electrodes and to further form an ion sheath proximate at least one electrode;
e. exposing at least a portion of an article containing a glass substrate and a proximate polymeric substrate to the reactive species within the ion sheath to form an amorphous diamond-like film on at least the portion where the glass substrate and the polymeric substrate are proximate;
f. post-annealing the diamond-like film;
g. metalizing at least a portion of the substrate coated with amorphous diamond-like film; and
h. affixing a portion of the metal to a package.
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23. An optical article comprising:
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an optical glass substrate;
an amorphous diamond-like film deposited on at least a portion of the glass substrate;
at least one coating on the diamond-like film; and
a package enclosing at least a portion of the amorphous diamond-like film.
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Specification