Loadport equipped with automatic height adjustment means and method for operating
First Claim
1. A loadport equipped with automatic height adjustment means comprising:
- a movable platform adapted for carrying a wafer cassette thereon and for moving vertically in an up-and-down direction;
at least two support members for supporting said movable platform and for moving said platform in an up-and-down direction;
a distance sensor mounted on a bottom surface of said movable platform for measuring a height of said movable platform; and
a process controller for receiving a first signal from said distance sensor, comparing to a pre-stored datum and then sending a second signal to said at least two support members to move said movable platform until said first signal equals said pre-stored datum.
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Abstract
A loadport for a semiconductor fabrication machine that is equipped with an automatic height adjustment means and a method for operating the loadport are described. The loadport consists of a moveable platform for carrying a wafer cassette thereon and supported by at least two support members capable of moving the platform in an up-and-down direction. A distance sensor is mounted on a bottom surface of the platform for measuring a height of the platform. A process controller is used to receive a first signal from the distance sensor, comparing to a pre-stored datum and then sending a second signal to the at least two support members to move the platform until the first signal equals the pre-stored datum.
19 Citations
20 Claims
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1. A loadport equipped with automatic height adjustment means comprising:
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a movable platform adapted for carrying a wafer cassette thereon and for moving vertically in an up-and-down direction;
at least two support members for supporting said movable platform and for moving said platform in an up-and-down direction;
a distance sensor mounted on a bottom surface of said movable platform for measuring a height of said movable platform; and
a process controller for receiving a first signal from said distance sensor, comparing to a pre-stored datum and then sending a second signal to said at least two support members to move said movable platform until said first signal equals said pre-stored datum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for automatically adjusting the height of a loadport comprising the steps of:
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providing a movable platform capable of being moved in an up-and-down direction;
mounting the movable platform on at least two support members;
mounting a distance sensor on a bottom surface of said movable platform;
connecting a process controller to said distance sensor and said at least two support members;
measuring a height of said movable platform and sending a first signal to said process controller;
comparing said first signal with a pre-stored datum in said process controller and determining a deviation; and
adjusting the height of said movable platform by said at least two support members until said deviation becomes zero. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification
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- Resources
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Current AssigneeTaiwan Semiconductor Manufacturing Company Limited
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Original AssigneeTaiwan Semiconductor Manufacturing Company Limited
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InventorsHuang, Y.C., Lan, H.S., Tseng, D.M., Chang, C.D.
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Application NumberUS09/955,512Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current414/217CPC Class CodesH01L 21/67772 involving removal of lid, d...H01L 21/68 for positioning, orientatio...
