User configurable multivariate time series reduction tool control method
First Claim
1. A method of controlling a manufacturing tool, comprising:
- measuring different manufacturing parameters of said tool;
transforming a plurality of time series of said manufacturing parameters into intermediate variables based on restrictions and historical reference statistics;
generating at least one surrogate variable based on said intermediate variables;
if said surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of said intermediate variables, that caused said surrogate variable to exceed said predetermined limit and identifying a first manufacturing parameter associated with said first intermediate variable; and
inhibiting further operation of said tool until said first manufacturing parameter has been modified to bring said surrogate value within said predetermined limit.
5 Assignments
0 Petitions
Accused Products
Abstract
A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
-
Citations
25 Claims
-
1. A method of controlling a manufacturing tool, comprising:
-
measuring different manufacturing parameters of said tool;
transforming a plurality of time series of said manufacturing parameters into intermediate variables based on restrictions and historical reference statistics;
generating at least one surrogate variable based on said intermediate variables;
if said surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of said intermediate variables, that caused said surrogate variable to exceed said predetermined limit and identifying a first manufacturing parameter associated with said first intermediate variable; and
inhibiting further operation of said tool until said first manufacturing parameter has been modified to bring said surrogate value within said predetermined limit. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A computer implemented method of controlling a tool using multivariate analysis, comprising:
-
measuring a set of tool variables with sensors;
storing values of said variables in a computer connected to receive data from said sensors, said computer generating a surrogate variable having a value representative of whether said tool is in control, said surrogate variable being a function of a plurality of intermediate variables;
determining if said value of said surrogate variable is outside of a predetermined limit, said computer identifying an out-of-control intermediate variable of said intermediate variables that primarily contributed to said value of said surrogate variable;
identifying an out-of-control tool variable of said tool variables that primarily contributed to said out-of-control intermediate variable; and
inhibiting further operation of said tool until said out-of-control tool variable has been modified to bring said surrogate value within said predetermined limit. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
-
-
15. A computerized method of determining corrections for a manufacturing process, comprising:
-
measuring a set of manufacturing parameters;
performing a first T2 score computation using said manufacturing parameters;
providing a first inverse matrix using intermediate variables obtained from said first T2 score computation;
using said first inverse matrix to create a generalized formulation for such matrices;
using said generalized formulation to compute a second T2 score for said inverse matrix with one variable missing; and
subtracting said second T2 score from said first T2 score. - View Dependent Claims (16, 17, 18, 19)
-
-
20. A computer interface for creating a file for transformation of various process recipes, process tools and products in a statistical analysis of a manufacturing process, said computer interface comprising:
-
an input device for inputting data;
a correction device for correcting missing data in a time series of said data by determining a length of said times series and an interpolation interval of said time series;
a first selector for selecting a transformation function;
a generator for generating one or more control charts from a Hotelling function using said data corrected by said correction device and using said transformation function; and
a second selector for selecting between said control charts. - View Dependent Claims (21, 22, 23, 24, 25)
-
Specification