Substrate processing apparatus comprising ring-shaped motor

• US 20030056815A1
• Filed: 09/10/2002
• Published: 03/27/2003
• Est. Priority Date: 09/26/2001
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: Sakai, Takamasa
• Granted Patent: US 7,073,521 B2
• Time in Patent Office: Days
• US Class Current: 134/153
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft
• CPC Class Codes: H02K 1/16 Stator cores with slots for windings
• CPC Class Codes: H02K 17/12 for multi-phase current
• CPC Class Codes: H02K 41/025 Asynchronous motors
• CPC Class Codes: H02K 5/203 specially adapted for liquids, e.g. cooling jackets
• CPC Class Codes: H02K 7/088 radially supporting the rotor directly
• CPC Class Codes: H02K 7/14 Structural association with mechanical loads, e.g. with hand-held machine tools or fans with fan or impeller for cooling the machine H02K9/06
• CPC Class Codes: H02K 9/19 for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

In a substrate processing apparatus for performing a substrate processing with a substrate being rotated, a ring-shaped motor is provided and a water pipe, a drainpipe and gas supply pipes are connected to a stationary part of the motor covered with a rotating part thereof. A gas from the gas supply pipes is supplied between the stationary part and the rotating part of the motor, thereby making the rotating part rotatable with a mechanism of a static pressure gaseous bearing (and a mechanical rotary). A group of induction coils are provided in a ring shape, and the water pipe and the drainpipe are connected to a duct for cooling water formed in the stationary part along the group of induction coils. This constitution allows removal of heat generated by the group of induction coils, to thereby achieving an adequate high-speed rotation of the substrate.

Claims

1. A substrate processing apparatus for processing a substrate, comprising:

a motor having a ring-shaped stationary part and a ring-shaped rotating part with a predetermined central axis as a center thereof, said rotating part rotating about said central axis; and

a holding part provided on said rotating part, for holding said substrate,

wherein said stationary part comprises;

a group of induction coils in a ring shape, being supplied with multiphase alternating current;

a duct for cooling water provided along said group of induction coils; and

a gas supply line for supplying gas to a clearance between said rotating part and said stationary part to make said rotating part smoothly rotatable with a mechanism of a static pressure gaseous bearing, and

said rotating part has a conductive member or a magnetic member having an endring which gains a rotating force by a traveling magnetic field caused along said group of induction coils.

2. The substrate processing apparatus according to claim 1, wherein

said clearance corresponding to said mechanism of a static pressure gaseous bearing has a portion which is convex or concave towards said central axis.

3. The substrate processing apparatus according to claim 1, wherein

said duct is provided between said group of induction coils and said clearance.

4. The substrate processing apparatus according to claim 1, further comprising

a supply unit for supplying an upper surface and a lower surface of said substrate with processing solution.

5. The substrate processing apparatus according to claim 1, wherein

said conductive member or said magnetic member has a portion opposed to one side of said group of induction coils and a portion opposed to the other side of said group of induction coils in a direction of said central axis.

6. The substrate processing apparatus according to claim 1, comprising

a plurality of pairs of said motor and said holding part which are so disposed as to be overlapped one another in a direction of said central axis.

7. A substrate processing apparatus for processing a substrate, comprising:

a motor having a ring-shaped stationary part and a ring-shaped rotating part with a predetermined central axis as a center thereof, said rotating part rotating about said central axis; and

a holding part provided on said rotating part, for holding said substrate,

wherein said motor has a plurality of rotating members which rotate between said stationary part and said rotating part to make said rotating part rotatable with respect to said stationary part,

said stationary part comprises;

a group of induction coils in a ring shape, being supplied with multiphase alternating current; and

a duct for cooling water provided along said group of induction coils, and

said rotating part has a conductive member or a magnetic member having an endring which gains a rotating force by a traveling magnetic field caused along said group of induction coils.

8. The substrate processing apparatus according to claim 7, wherein

each of said plurality of rotating members is a rolling bearing receiving a radial load.

9. The substrate processing apparatus according to claim 7, wherein

said stationary part has a gas supply line for supplying gas between said rotating part and said stationary part.

10. The substrate processing apparatus according to claim 7, further comprising

a supply unit for supplying an upper surface and a lower surface of said substrate with processing solution.

11. The substrate processing apparatus according to claim 7, wherein

said conductive member or said magnetic member has a portion opposed to one side of said group of induction coils and a portion opposed to the other side of said group of induction coils in a direction of said central axis.

12. The substrate processing apparatus according to claim 7, comprising

a plurality of pairs of said motor and said holding part which are so disposed as to be overlapped one another in a direction of said central axis.

13. A substrate processing apparatus for processing a substrate, comprising:

a plurality of processing units,

wherein each of said plurality of processing units comprises;

a motor having a ring-shaped stationary part and a ring-shaped rotating part with a predetermined central axis as a center thereof, said rotating part rotating about said central axis; and

a holding part provided on said rotating part, for holding said substrate, and

said plurality of processing units are arranged so that at least part of adjacent ones are overlapped in a direction of central axes of said motors.

14. The substrate processing apparatus according to claim 13, wherein

each of said plurality of processing units further comprises a supply unit for supplying an upper surface and a lower surface of said substrate with processing solution.

15. The substrate processing apparatus according to claim 13, wherein

said stationary part comprises:

a group of induction coils in a ring shape, being supplied with multiphase alternating current;

a duct for cooling water provided along said group of induction coils; and

a gas supply line for supplying gas to a clearance between said rotating part and said stationary part to make said rotating part rotatable smoothly with a mechanism of a static pressure gaseous bearing, and

said rotating part has a conductive member or a magnetic member having an endring which gains a rotating force by a traveling magnetic field caused along said group of induction coils.

16. The substrate processing apparatus according to claim 15, wherein

said clearance corresponding to said mechanism of a static pressure gaseous bearing has a portion which is convex or concave towards said central axis.

17. The substrate processing apparatus according to claim 15, wherein

said duct is provided between said group of induction coils and said clearance.

18. The substrate processing apparatus according to claim 15, wherein

said conductive member or said magnetic member has a portion opposed to one side of said group of induction coils and a portion opposed to the other side of said group of induction coils in a direction of said central axis.

19. The substrate processing apparatus according to claim 13, wherein

said motor has a plurality of rotating members which rotate between said stationary part and said rotating part to make said rotating part rotatable with respect to said stationary part,

said stationary part comprises:

a group of induction coils in a ring shape, being supplied with multiphase alternating current; and

a duct for cooling water provided along said group of induction coils, and

said rotating part has a conductive member or a magnetic member having an endring which gains a rotating force by a traveling magnetic field caused along said group of induction coils.

20. The substrate processing apparatus according to claim 19, wherein

each of said plurality of rotating members is a rolling bearing receiving a radial load.

21. The substrate processing apparatus according to claim 19, wherein

said stationary part has a gas supply line for supplying gas between said rotating part and said stationary part.

22. The substrate processing apparatus according to claim 19, wherein

said conductive member or said magnetic member has a portion opposed to one side of said group of induction coils and a portion opposed to the other side of said group of induction coils in a direction of said central axis.