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Optical alignment detection system

  • US 20030058445A1
  • Filed: 08/21/2002
  • Published: 03/27/2003
  • Est. Priority Date: 08/02/2000
  • Status: Active Grant
First Claim
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1. An optical alignment detection system for detecting the alignment of a first object relative to a second object, the optical alignment system comprising:

  • one or more light scattering elements fixed relative to the first object;

    two or more light sources fixed relative to the second object, the two or more light sources adapted to provide light such that a light beam from at least one of the light sources intersects one or more of the light scattering elements to produce a scattered light profile; and

    one or more detector for detecting the scattered light profile.

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