Optical system

• US 20030058547A1
• Filed: 09/20/2002
• Published: 03/27/2003
• Est. Priority Date: 09/20/2001
• Status: Active Grant

• Current Assignee: Shinmaywa Industries Limited
• Original Assignee: Hitachi, Ltd., Shinmaywa Industries Limited
• Inventors: Kajiyama, Hiroshi, Abe, Makoto, Kondo, Katsumi, Kato, Akira, Sugita, Tatsuya, Onisawa, Kenichi, Hori, Takanobu, Tokomoto, Isao, Hirota, Shoichi, Adachi, Masaya
• Granted Patent: US 7,133,218 B2
• Time in Patent Office: Days
• US Class Current: 359/642
• CPC Class Codes: C23C 14/0694 Halides
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: G02B 1/113 using inorganic layer materials only

Abstract

Disclosed is an optical system that has superior optical characteristic and wear resistance and can be formed at low temperatures. An optical system 101 for adjusting visible light transmittance to have a desired value comprises fluoride 103, and at least part of the optical system has a crystal grain diameter of 3 nm to 10 nm. The fluoride 103 has a specific surface area of 1 m²/g to 5 m²/g.

Claims

1. An optical system comprising fluoride, at least part of the optical system having a crystal grain diameter of 3 nm to 10 nm.

2. The optical system according to claim 1, wherein the fluoride is magnesium fluoride.

3. The optical system according to claim 1, wherein the fluoride is formed on a silica substrate.

4. The optical system according to claim 1, wherein the fluoride is formed on a resin substrate.

5. The optical system according to claim 1, which is a dielectric multilayered film reflector.

6. The optical system according to claim 1, which is an optical waveguide.

7. The optical system according to claim 1, which is an antireflection coating.

8. The optical system according to claim 2, which is a polarizer used in a display.

9. The optical system according to claim 2, which is a touch panel used in a display.

10. The optical system according to claim 9, wherein the touch panel comprises a polarizer having a magnesium fluoride film and a ¼

wavelength plate.

11. An optical system being manufactured at a temperature ranging from normal temperature to 100°

C. and being at least partially comprised of fluoride.

12. An optical system comprising a magnesium fluoride film formed on a substrate by a process of placing the substrate on a film deposition side of a bias supply electrode disposed in a vacuum chamber;

a process of evaporating magnesium fluoride;

a process of supplying a radio frequency voltage to the bias supply electrode used as one electrode to generate plasma in the vacuum chamber; and

a process of applying to the bias supply electrode a bias voltage that varies in the form of a wave as having a negative mean value and a positive maximum value and has a frequency between 100 kHz and 2.45 GHz.

13. An optical system comprising fluoride, at least part of the optical system having a specific surface area of 1 m²/g to 5 m²/g.

14. The optical system according to claim 13, wherein the part of the optical system is a surface layer portion.

15. The optical system according to claim 13, wherein the fluoride is magnesium fluoride.

16. The optical system according to claim 13, which is an antireflection coating.