Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device
First Claim
Patent Images
1. A laser irradiation apparatus, comprising:
- a laser;
a first forming means for providing a laser beam emitted from the laser with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
a second forming means for setting a convergent position in the first direction of the laser beam on an irradiation surface; and
a third forming means for providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction.
1 Assignment
0 Petitions
Accused Products
Abstract
If an optical path length of an optical system is reduced and a length of a laser light on an irradiation surface is increased, there occurs curvature of field which is a phenomenon that a convergent position deviates depending on an incident angle or incident position of a laser light with respect to a lens. To avoid this phenomenon, an optical element having a negative power such as a concave lens or a concave cylindrical lens is inserted to regulate the optical path length of the laser light and a convergent position is made coincident with a irradiation surface to form an image on the irradiation surface.
-
Citations
135 Claims
-
1. A laser irradiation apparatus, comprising:
-
a laser;
a first forming means for providing a laser beam emitted from the laser with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
a second forming means for setting a convergent position in the first direction of the laser beam on an irradiation surface; and
a third forming means for providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction. - View Dependent Claims (6, 11, 16, 21)
-
-
2. A laser irradiation apparatus, comprising:
-
a laser;
a first optical system for dividing a laser beam emitted from the laser into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
a second optical system for superposing into one the plurality of laser beams which are divided in the first direction;
a third optical system for setting a convergent position of the superposed laser beam on an irradiation surface;
a fourth optical system for dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction; and
a fifth optical system for superposing into one the plurality of laser beams which are divided in the second direction. - View Dependent Claims (7, 12, 17, 22)
-
-
3. A laser irradiation apparatus, comprising:
-
a laser;
a first cylindrical lens array for dividing a laser beam emitted from the laser into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
a first cylindrical lens for superposing into one the plurality of laser beams which are divided in the first direction;
a second cylindrical lens for setting a convergent position of the superposed laser beam on an irradiation surface;
a second cylindrical lens array for dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction; and
a third cylindrical lens for superposing into one the plurality of laser beams which are divided in the second direction. - View Dependent Claims (8, 13, 18, 23)
-
-
4. A laser irradiation apparatus, comprising:
-
a laser;
a first cylindrical lens array for dividing a laser beam emitted from the laser into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
a cylindrical lens for superposing into one the plurality of laser beams which are divided in the first direction;
a second cylindrical lens array for dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction; and
a convex cylindrical lens and a concave lens or a concave cylindrical lens for setting a convergent position of the laser beam superposed in the first direction on an irradiation surface and superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface. - View Dependent Claims (9, 14, 19, 24)
-
-
5. A laser irradiation apparatus, comprising:
-
a laser;
a first cylindrical lens array for dividing a laser beam emitted from the laser into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
a cylindrical lens for superposing into one the plurality of laser beams which are divided in the first direction;
a second cylindrical lens array for dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction; and
a toroidal lens or a crossed cylindrical lens for setting a convergent position of the laser beam superposed in the first direction on an irradiation surface and superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface. - View Dependent Claims (10, 15, 20, 25)
-
-
26. A method of laser irradiation, comprising:
-
providing a laser beam with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
regulating an optical path length of the laser beam to set a convergent position in the first direction on an irradiation surface;
providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (36, 46, 56, 66)
-
-
27. A method of laser irradiation, comprising:
-
providing a laser beam with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction;
regulating an optical path length of the laser beam to set a convergent position in the second direction on an irradiation surface;
providing the laser beam with a uniform energy distribution; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (37, 47, 57, 67)
-
-
28. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface;
regulating an optical path length of the superposed laser beam to set a convergent position in the first direction on the irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (38, 48, 58, 68)
-
-
29. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface;
regulating an optical path length of the superposed laser beam to set a convergent position in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (39, 49, 59, 69)
-
-
30. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a first cylindrical lens;
regulating an optical path length of the superposed laser beam by using a second cylindrical lens to set a convergent position of the superposed laser beam in the first direction on the irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface by using a third cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (40, 50, 60, 70)
-
-
31. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a first cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface by using a third cylindrical lens;
regulating an optical path length of the superposed laser beam by using a third cylindrical lens to set a convergent position of the superposed laser beam in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (41, 51, 61, 71)
-
-
32. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
regulating an optical path length to set a convergent position of the laser beam, which is divided in the first direction and superposed in the second direction, in the first direction on the irradiation surface, and superposing the laser beam on the irradiation surface in the second direction by using a convex cylindrical lens and a concave lens or a concave cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (42, 52, 62, 72)
-
-
33. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
superposing the laser beam, which is divided in the first direction and superposed in the second direction, in the first direction on the irradiation surface, and regulating an optical path length in the second direction to set a convergent position on the irradiation surface by using a convex cylindrical lens and a concave lens or a concave cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (43, 53, 63, 73)
-
-
34. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
regulating an optical path length to set a convergent position of the laser beam, which is superposed in the first direction and divided in the second direction, in the first direction on the irradiation surface, and superposing the laser beam on the irradiation surface in the second direction by using a toroidal lens or a crossed cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (44, 54, 64, 74)
-
-
35. A method of laser irradiation, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
superposing the laser beam, which is divided in the first direction and superposed in the second direction, in the first direction on the irradiation surface, and regulating an optical path length in the second direction to set a convergent position on the irradiation surface by using a toroidal lens or a crossed cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (45, 55, 65, 75)
-
-
76. A method of manufacturing a semiconductor device, comprising:
-
providing a laser beam with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
regulating an optical path length of the laser beam to set a convergent position in the first direction on an irradiation surface;
providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (86, 96, 106, 116, 126)
-
-
77. A method of manufacturing a semiconductor device, comprising:
-
providing a laser beam with a uniform energy distribution in a first direction perpendicular to an optical axis of the laser beam;
providing the laser beam with a uniform energy distribution in a second direction perpendicular to both the optical axis and the first direction;
regulating an optical path length of the laser beam to set a convergent position in the second direction on an irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (87, 97, 107, 117, 127)
-
-
78. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
superposing into one the plurality of laser beams which are divided in the first direction of the superposed laser beam on an irradiation surface;
regulating an optical path length of the superposed laser beam to set a convergent position in the first direction on the irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (88, 98, 108, 118, 128)
-
-
79. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface;
regulating an optical path length of the superposed laser beam to set a convergent position of the superposed laser beam in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (89, 99, 109, 119, 129)
-
-
80. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a first cylindrical lens;
regulating an optical path length of the superposed laser beam by using a third cylindrical lens to set a convergent position of the superposed laser beam in the second direction on the irradiation surface;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface by using a third cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (90, 100, 110, 120, 130)
-
-
81. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a first cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface by using a second cylindrical lens;
regulating an optical path length of the superposed laser beam by using a third cylindrical lens to set a convergent position of the superposed laser beam in the second direction on the irradiation surface; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (91, 101, 111, 121, 131)
-
-
82. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
regulating an optical path length to set a convergent position of the laser beam, which is superposed in the first direction and divided in the second direction, in the first direction on the irradiation surface, and superposing the laser beam on the irradiation surface in the second direction by using a convex cylindrical lens and a concave lens or a concave cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (92, 102, 112, 122, 132)
-
-
83. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
superposing the laser beam, which is divided in the first direction and superposed in the second direction, in the first direction on the irradiation surface, and regulating an optical path length in the second direction to set a convergent position on the irradiation surface by using a convex cylindrical lens and a concave lens or a concave cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (93, 103, 113, 123, 133)
-
-
84. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
regulating an optical path length to set a convergent position of the laser beam, which is superposed in the first direction and divided in the second direction, in the first direction on the irradiation surface by using a toroidal lens or a crossed cylindrical lens, and superposing the laser beam on the irradiation surface in the second direction; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (94, 104, 114, 124, 134)
-
-
85. A method of manufacturing a semiconductor device, comprising:
-
dividing a laser beam into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam by using a first cylindrical lens array;
dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction by using a second cylindrical lens array;
superposing into one the plurality of laser beams which are divided in the first direction on an irradiation surface by using a cylindrical lens;
superposing the laser beam, which is divided in the first direction and superposed in the second direction, in the first direction on the irradiation surface, and regulating an optical path length in the second direction to set a convergent position on the irradiation surface by using a toroidal lens or a crossed cylindrical lens; and
irradiating the laser beam to an irradiation subject while moving the beam relative to the subject. - View Dependent Claims (95, 105, 115, 125, 135)
-
Specification