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Pattern evaluation system, pattern evaluation method and program

  • US 20030059104A1
  • Filed: 09/24/2002
  • Published: 03/27/2003
  • Est. Priority Date: 09/26/2001
  • Status: Active Grant
First Claim
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1. A pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern, said pattern evaluation system comprising:

  • an edge model producing part which produces a pattern edge model; and

    an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with said pattern edge model to detect coordinates of an edge point of the pattern.

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