Pattern evaluation system, pattern evaluation method and program
First Claim
Patent Images
1. A pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern, said pattern evaluation system comprising:
- an edge model producing part which produces a pattern edge model; and
an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with said pattern edge model to detect coordinates of an edge point of the pattern.
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Abstract
a pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern includes an edge model producing part which produces a pattern edge model and an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with the pattern edge model to detect coordinates of an edge point of the pattern.
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Citations
20 Claims
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1. A pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern, said pattern evaluation system comprising:
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an edge model producing part which produces a pattern edge model; and
an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with said pattern edge model to detect coordinates of an edge point of the pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A pattern evaluation method comprising:
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acquiring an image data of a pattern to be evaluated;
producing a pattern edge model; and
carrying out an image matching processing to an image of the pattern with said pattern edge model to detect coordinates of an edge point of the pattern. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A program which causes a computer to execute a pattern evaluation method comprising:
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acquiring an image data of a pattern to be evaluated;
producing a pattern edge model; and
carrying out an image matching processing to an image of the pattern with said pattern edge model to detect coordinates of an edge point of the pattern. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification