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Device for holding a substrate

  • US 20030059348A1
  • Filed: 03/11/2002
  • Published: 03/27/2003
  • Est. Priority Date: 03/13/2001
  • Status: Active Grant
First Claim
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1. A device for holding a substrate, characterized by upper and lower plates adapted to receive the substrate sandwiched in the interface between the plates, each plate having at least one opening with a projecting rim surrounding the opening and directed away from the interface, wherein the openings in the upper and lower plates are at least partially aligned in the sandwiched position of the plates.

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