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Method and apparatus for analyzing manufacturing data

  • US 20030061212A1
  • Filed: 07/12/2002
  • Published: 03/27/2003
  • Est. Priority Date: 07/16/2001
  • Status: Active Grant
First Claim
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1. A method for data mining information obtained in an integrated circuit fabrication factory (“

  • fab”

    ) that includes steps of;

    gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab;

    formatting the data and storing the formatted data in a source database;

    extracting portions of the data for use in data mining in accordance with a user specified configuration file;

    data mining the extracted portions of data in response to a user specified analysis configuration file;

    storing results of data mining in a results database; and

    providing access to the results.

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