CHEMICALLY INERT FLOW CONTROL WITH NON-CONTAMINATING BODY

• US 20030061888A1
• Filed: 11/23/1999
• Published: 04/03/2003
• Est. Priority Date: 11/23/1999
• Status: Active Grant

• Current Assignee: NT International, Inc. (Entegris Incorporated)
• Original Assignee: NT International, Inc. (Entegris Incorporated)
• Inventors: PETERSON, TOM, CUCCI, JERRY, CHINNOCK, BOB, WINK, DAN, GOULD, CHUCK, LANCTOT, JANE
• Granted Patent: US 6,578,435 B2
• Time in Patent Office: Days
• US Class Current: 73/861.52
• CPC Class Codes: G01F 1/36 the pressure or differential pressure being created by the use of flow constriction
• CPC Class Codes: G01F 1/38 the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/0324 With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/776 Control by pressures across flow line valve

Abstract

A fluid control module that may be connected in-line within a chemically corrosive or ultra pure fluid flow circuit that delivers fluids in either a liquid or gaseous state. The fluid control module of the present invention may be utilized to control the flow, pressure or volume of fluid flowing through the fluid flow circuit and is capable of automatically adjusting or “calibrating” the module to compensate for changes in atmospheric pressure or drift in the pressure sensors of the fluid control module. The fluid control module also includes a rapid or macro adjustment of the control valve to reach the desired flow rate at a quicker pace.

Claims

19. A chemically inert fluid control module adapted to be connected within a fluid flow circuit, said module comprising:

a chemically inert housing having a fluid conduit extending through said housing, said conduit having a constriction disposed within said conduit, said constriction having a reduced cross-sectional area thereby restricting flow within the conduit;

means for sensing a change in pressure within the fluid conduit, wherein a portion of the means for sensing exposed to fluid is chemically inert; and

means for controlling a size of an opening in a valve positioned within said fluid flow conduit, wherein a portion of the means for controlling exposed to fluid is chemically inert, said means for sensing and said means for controlling being contained within said housing.

20. The fluid control module as recited in claim 19, wherein said means for sensing includes first and second pressure sensors coupled to the conduit, wherein said constriction is positioned between said first and second pressure sensors.

21. The fluid control module as recited in claim 19, wherein said valve includes a redundant chemically inert diaphragm.

22. The fluid control module as recited in claim 19, wherein said valve includes a chemically inert diaphragm.

23. The fluid control module as recited in claim 19, wherein said means for controlling is driven by a means for actuating the valve between an open and closed position.

24. The fluid control module as recited in claim 19, wherein said means for controlling flow is driven pneumatically.

25. The fluid control module as recited in claim 19, further including a controller coupled to said means for controlling and said means for sensing.

26. The fluid control module as recited in claim 25, wherein said controller determines a pressure within the fluid conduit.

27. The fluid control module as recited in claim 25, wherein said controller determines a flow rate within the fluid conduit.

28. The fluid control module as recited in claim 25, wherein said controller compensates for changes in atmospheric pressure.

29. The fluid control module as recited in claim 20, further including a controller coupled to said means for controlling and said means for sensing.

30. The fluid control module as recited in claim 29, wherein said controller resets said means for sensing when flow within said flow conduit stops.

31. The fluid control module as recited in claim 29, wherein said controller determines a pressure within the fluid conduit.

32. The fluid control module as recited in claim 29, wherein said controller determines a flow rate within the fluid conduit.

33. The fluid control module as recited in claim 29, wherein said controller adjusts the signal to compensate for a pressure differential present when the rate of flow is zero.

34. The fluid control module as recited in claim 19, wherein the portion of the means for sensing exposed to fluid is comprised of sapphire.

35. The fluid control module as recited in claim 29, wherein said controller includes a means for macro and micro adjustment of the control means.

36. A chemically inert fluid control module adapted to be connected with a fluid flow circuit, said module comprising:

a chemically inert housing having a fluid conduit extending through said housing;

a control valve coupled to the conduit, wherein a portion of the valve exposed to fluid is chemically inert;

a first pressure sensor coupled to the conduit, wherein a portion of the pressure sensor exposed to fluid is chemically inert;

a second pressure sensor coupled to the conduit, wherein a portion of the pressure sensor exposed to fluid is chemically inert; and

a constriction disposed within said conduit between said first and second pressure sensors, said constriction having a reduced cross-sectional area thereby restricting flow within the conduit.

1. A chemically inert fluid control module adapted to be connected with a fluid flow circuit, said module comprising:

a chemically inert fluid conduit;

an adjustable control valve coupled to the conduit, wherein a portion of the valve exposed to fluid is chemically inert;

a first pressure sensor coupled to the conduit, wherein a portion of the pressure sensor exposed to fluid is chemically inert;

a constriction disposed within said conduit, said constriction having a reduced cross-sectional area thereby restricting flow of fluid within the conduit; and

a chemically inert housing enclosing said control valve and said first pressure sensor.

2. The fluid control module as recited in claim 1, further including a second pressure sensor coupled to the conduit, wherein said constriction is positioned between said first and second pressure sensor.

3. The fluid control module as recited in claim 1, wherein said control valve includes a redundant chemically inert diaphragm.

4. The fluid control module as recited in claim 1, wherein said control valve includes a chemically inert diaphragm.

5. The fluid control module as recited in claim 1, wherein said control valve is driven by a means for actuating a valve between an open and closed position.

6. The fluid control module as recited in claim 1, wherein said control valve is driven pneumatically.

7. The fluid control module as recited in claim 1, further including a controller coupled to said control valve and said pressure sensor.

8. The fluid control module as recited in claim 7, wherein the controller produces a signal proportional to a fluid flow rate within the fluid conduit.

9. The fluid control module as recited in claim 7, wherein the controller produces a signal proportional to a pressure within the fluid conduit.

10. The fluid control module as recited in claim 7, wherein said controller compensates for changes in atmospheric pressure.

11. The fluid control module as recited in claim 7, wherein said controller includes a means for macro and micro adjustment of the control valve.

12. The fluid control module as recited in claim 2, further including a controller coupled to said control valve and said pressure sensor.

13. The fluid control module as recited in claim 12, wherein said controller resets said pressure sensor when flow within said flow conduit stops.

14. The fluid control module as recited in claim 12, wherein said controller determines a pressure within the fluid conduit.

15. The fluid control module as recited in claim 12, wherein said controller determines a flow rate within the fluid conduit.

16. The fluid control module as recited in claim 15, wherein said controller adjusts the signal to compensate for a pressure differential present when the rate of flow is zero.

17. The fluid control module as recited in claim 1, wherein the portion of the pressure sensor exposed to fluid is comprised of sapphire.

18. The fluid control module as recited in claim 7, wherein said controller adjusts the signal to compensate for a pressure differential present when a rate of flow is zero.

37. The fluid control module as recited in claim 36, wherein said control valve includes a redundant chemically inert diaphragm.

38. The fluid control module as recited in claim 36, wherein said control valve includes a chemically inert diaphragm.

39. The fluid control module as recited in claim 36, wherein said flow control valve is driven pneumatically.

40. The fluid control module as recited in claim 36, further including a controller coupled to said control valve and said pressure sensor.

41. The fluid control module as recited in claim 40, wherein said controller determines a pressure within the fluid conduit.

42. The fluid control module as recited in claim 40, wherein said controller determines a flow rate within the fluid conduit.

43. The fluid control module as recited in claim 40, wherein said controller compensates for changes in atmospheric pressure.

44. The flow control module as recited in claim 40, wherein said controller resets said pressure sensor when flow within said flow conduit stops.

45. The flow control module as recited in claim 40, wherein said controller adjusts the signal to compensate for a pressure differential present when the rate of flow is zero.

46. The flow control module as recited in claim 36, wherein the portion of the pressure sensor exposed to fluid is comprised of sapphire.

38-1. The fluid control module as recited in claim 36, wherein said control valve is driven by a means for actuating the valve between an open and closed position.