Capacitor and method for fabricating the same
First Claim
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1. A capacitor comprising:
- a lower electrode formed on a substrate;
an insulation film formed on the substrate with the lower electrode formed on, and having an opening on the lower electrode;
a capacitor dielectric film formed on the lower electrode in the opening, and having a larger film thickness at a peripheral part of the opening than at a central part of the opening; and
an upper electrode formed on the capacitor dielectric film.
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Abstract
The capacitor comprises: a lower electrode 12 formed on a substrate 10; an insulation film 16 having an opening 24 on the lower electrode 12; a capacitor dielectric film 30 formed on the lower electrode 12 in the opening 24 and having a larger thickness at a peripheral part of the opening 24 than at a central part of the opening; and an upper electrode 32 formed on the capacitor dielectric film 30. Thus, degradation of the breakdown voltage and stress resistance of the peripheral part of the opening 24, which is due to the coverage of the capacitor dielectric film, can be suppressed.
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Citations
20 Claims
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1. A capacitor comprising:
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a lower electrode formed on a substrate;
an insulation film formed on the substrate with the lower electrode formed on, and having an opening on the lower electrode;
a capacitor dielectric film formed on the lower electrode in the opening, and having a larger film thickness at a peripheral part of the opening than at a central part of the opening; and
an upper electrode formed on the capacitor dielectric film. - View Dependent Claims (6)
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2. A capacitor comprising:
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a lower electrode formed on a substrate;
a first insulation film formed on the substrate with the lower electrode formed on, and having a first opening on the lower electrode;
a second insulation film formed on the first insulation film, and having a second opening in a region where the first opening is formed;
a capacitor dielectric film formed on the lower electrode in the opening, and extended over the second insulation film; and
an upper electrode formed on the capacitor dielectric film. - View Dependent Claims (3, 4, 5, 7)
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8. A method for fabricating a capacitor comprising the steps of:
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forming a lower electrode on a substrate;
forming a first insulation film on the substrate with the lower electrode formed on;
forming a second insulation film on the first insulation film;
forming an opening reaching the lower electrode in the first insulation film and the second insulation film;
forming a capacitor dielectric film on the lower electrode, extended over the second insulation film; and
forming an upper electrode on the capacitor dielectric film. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification