Production system and method for a composite product

• US 20030063555A1
• Filed: 09/30/2002
• Published: 04/03/2003
• Est. Priority Date: 10/01/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Granted Patent: US 7,277,769 B2
• Time in Patent Office: Days
• US Class Current: 370/200
• CPC Class Codes: G05B 2219/35113 Generation of compound, composite surface
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

To provide a production system which is constituted by a plurality of production facilities forming a production line, in which a work in process undergoes a plurality of processes to be completed as a product, and in which occurrence of a product defect or malfunction due to a contamination at a manufacturing stage of a composite product is prevented to avoid a risk in development of the composite product. First and second production lines are discriminated physically or geometrically or as body corporate, and installed in places remote from each other. In the first production line, a group of first substrates is processed by a first process to form a first device group in each of a plurality of regions into which each first substrate is divided, thereby producing a half-finished product. In the second production line, each first substrate is divided into second substrates, and a group of second substrates is processed by a second process to form a second element group. Each of divisions in each second substrate is separated and is integrated with another constituent member to form a module. A composite product in which this module is incorporated is produced.

Claims

1. A production system for a composite product that is provided with a plurality of facilities forming a production line in which a product is produced as a result of a plurality of processes, comprising:

a first production line which is formed by a plurality of production facilities, and a second production line formed by a plurality of production facilities, the first and second production lines being installed in places remote from each other, wherein the first production line is provided with a first manufacturing apparatus group formed by a plurality of manufacturing apparatuses, and first production control means for performing production control or progress control, the first production control means having first storage means for storing first quality information or characteristic information about a first element group formed on a first substrate in the first manufacturing apparatus group;

the second production line is provided with a second manufacturing apparatus group formed by a plurality of manufacturing apparatuses, and second production control means for performing production control or progress control with the first substrate divided into second substrates, the second production control means having second storage means for storing second quality information or characteristic information about a second element group formed on each second substrate in the second manufacturing apparatus group, or third quality information or product information relating to a state where the first element group and the second element group are combined;

the first production control means and the second production control means or the first storage means and the second storage means are capable of communicating the information with each other; and

a function is provided in which the first quality information or characteristic information and the second quality information or characteristic information or the third quality information or characteristic information are collated with each other to ascertain an address of a division identified as nondefective in the second substrates.

2. A production system for a composite product that is provided with a plurality of facilities forming a production line in which a product is produced as a result of a plurality of processes, comprising:

a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and in which a plurality of processing conditions can be set and a second production line using a product licensed from a patent holder, the first and second production lines being installed in places remote from each other,

wherein the first production line is provided with a first manufacturing apparatus group formed by a plurality of manufacturing apparatuses, and first production control means for performing production control or progress control, the first production control means having first storage means for storing first quality information or characteristic information about a first element group formed on a first substrate in the first manufacturing apparatus group;

the second production line is provided with a second manufacturing apparatus group formed by a plurality of manufacturing apparatuses, and second production control means for performing production control or progress control with the first substrate divided into second substrates, the second production control means having second storage means for storing second quality information or characteristic information about a second element group formed on each second substrate in the second manufacturing apparatus group, or third quality information or product information relating to a state where the first element group and the second element group are combined;

the first production control means and the second production control means or the first storage means and the second storage means are capable of communicating the information with each other; and

a function is provided in which the first quality information or characteristic information and the second quality information or characteristic information or the third quality information or characteristic information are collated with each other to ascertain an address of a division identified as nondefective in the second substrates.

3. A production method comprising:

treating a group of first substrates as a first lot in a first production line in accordance with a first process to form a first element group in each of a plurality of regions into which each of the first substrates is divided wherein said first production line is provided with a plurality of production facilities;

collecting at least one of first information about the first element group formed on each of the first substrates between particular process steps in the first process;

dividing each of the first substrates into second substrates in a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

treating a group of the second substrates as a second lot in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

15. A production method for a composite product according to claim 3, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

4. A production method comprising:

treating a group of first substrates as a first lot in a first production line in accordance with a first process to form a first element group in each of a plurality of regions into which each of the first substrates is divided wherein said first production line is provided with a plurality of production facilities;

collecting at least one of first information about the first element group formed on each of the first substrates between particular process steps in the first process;

forming on the first substrates a protective film for preventing the first element group from breaking due to an environmental contamination or static electricity;

transporting the first substrates from the first production line to a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

dividing each of the first substrates into second substrates in the second production line;

treating a group of the second substrates as a second lot in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

16. A production method for a composite product according to claim 4, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

5. A production method comprising:

attaching a first identifier to each of first substrates in a first production line wherein said first production line is provided with a plurality of production facilities;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

in each of a plurality of regions into which each of the first substrates is divided, forming a first element group by a process under a processing conditions programmed according to the first and second identifiers;

collecting first information about the first element group formed on each of first substrates between particular process steps in the first process in correspondence with the first identifier;

dividing each of the first substrates into second substrates in a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

treating a group of the second substrates as a second lot in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

17. A production method for a composite product according to claim 5, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

6. A production method comprising:

attaching a first identifier to each of first substrates in a first production line;

accommodating a group of the first substrates in a carrier wherein said first production line is provided with a plurality of production facilities;

attaching a second identifier for identification of the group of first substrates to the carrier;

in each of a plurality of regions into which each of the first substrates is divided, forming a first element group by a process under a processing conditions programmed according to the first and second identifiers;

collecting first quality information or characteristic information about the first element group formed on each of the first substrates between particular process steps in the first process by being related to the first identifier;

forming on the first substrates a protective film for preventing the first element group from breaking due to an environmental contamination or static electricity;

transporting the first substrates from the first production line to a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

dividing each of the first substrates into second substrates in the second production line;

treating a group formed by the second substrates as a second lot to be processed by a second process after removing the protective film to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

18. A production method for a composite product according to claim 6, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

7. A production method comprising:

attaching a first identifier to each of first substrates in the first production line wherein said first production line is provided with a plurality of production facilities;

assigning process processing conditions with respect to each of the first substrates in the first identifier;

storing information on the processing conditions in storage means;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

storing control information as the set of process processing conditions according to the first identifier in the storage means;

managing process progress information from the second identifiers and process processing information from the first identifiers with an information processor;

forming a first element group in each of a plurality of regions into which each of the first substrates is divided;

collecting first quality information or characteristic information about the first element group formed on each of the first substrates between particular process steps in the first process by being related to the first identifier to be stored in storage means;

dividing each of the first substrates into second substrates in a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

treating a group of the second substrates as a second lot in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

19. A production method for a composite product according to claim 7, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

8. A production method comprising:

attaching a first identifier to each of first substrates in a first production line wherein said first production line is provided with a plurality of production facilities;

assigning process processing conditions with respect to each of first substrates in correspondence with the first identifier;

storing information on processing conditions in storage means;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of the first substrates to the carrier;

storing control information as the set of process processing conditions according to the first identifier in the storage means;

managing process progress information from the second identifiers and process processing information from the first identifiers with an information processor;

forming a first element group in each of a plurality of regions into which each of the first substrates is divided;

collecting first information about the first element group formed on each of the first substrates between particular process steps in the first process by being related to the first identifier to be stored in storage means;

dividing each of the first substrates into second substrates in a second production line wherein said second production line is provided with a plurality of production facilities, the first and second production lines being installed in places remote from each other;

treating a group of the second substrates as a second lot to in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

20. A production method for a composite product according to claim 8, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

9. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line wherein said first production line is provided with a plurality of production facilities;

treating a group of first substrates as a first lot in accordance with a first process to form a first element group in each of a plurality of regions into which each of first substrates is divided;

collecting first information about a first element group formed on each of the first substrates between particular process steps in the first process;

using a product licensed from the patent holder formed by a plurality of processes to which a plurality of processing conditions are applicable in the second production line;

dividing each of the first substrates into second substrates in the second production line;

treating a group of the second substrates as a second lot to in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

21. A production method for a composite product according to claim 9, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

10. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line wherein said first production line is provided with a plurality of production facilities;

treating a group of first substrates as a first lot in accordance with a first process to form a first element group in each of a plurality of regions into which each of first substrates is divided;

collecting first information about a first element group formed on each of the first substrates between particular process steps in the first process;

forming on the first substrates a protective film for preventing the first element group from breaking due to an environmental contamination or static electricity;

transporting the first substrates from the first production line to the second production line;

using a product licensed from the patent holder formed by a plurality of processes to which a plurality of processing conditions are applicable in the second production line;

dividing each of the first substrates into second substrates in the second line;

treating a group of the second substrates as a second lot in accordance with a second process after removing the protective film to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting, in a process thereof, second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

22. A production method for a composite product according to claim 10, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

11. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line wherein said first production line is provided with a plurality of production facilities;

attaching a first identifier to each of first substrates;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

producing, by a process under a processing condition, a product in which a first device group is formed in each of a plurality of regions into which each first substrate is divided, the process and the processing conditions being programmed according to the first and second identifiers;

collecting first information about the first device group formed on each of the first substrates between particular process steps in the first process while the product is being formed, the method also using a second production line in which a product licensed from a patent holder is used, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, the method comprising, as processing in the second processing line;

dividing each of the first substrates into second substrates;

treating as a second lot a group formed by the second substrates;

processing the group of second substrates by a second process to form a second device group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting, in a process thereof, second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

23. A production method for a composite product according to claim 11, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

12. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line;

attaching a first identifier to each of first substrates;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

producing, by a process under a processing conditions, a product in which a first element group is formed in each of a plurality of regions into which each first substrate is divided, the process and the processing conditions being programmed according to the first and second identifiers;

collecting first information about the first element group formed on each first substrate between particular process steps in the first process while the product is being formed;

forming on the first substrates a protective film for preventing the first element group from breaking due to an environmental contamination or static electricity;

transporting the first substrates from the first production line to the second production line;

using a second production line in which a product licensed from a patent holder is used, which is constituted by a plurality of production facilities, and in which a plurality of processing conditions can be set, the method comprising, as processing in the second processing line;

dividing each first substrates into second substrates;

treating as a second lot a group formed by the second substrates;

processing the group of second substrates by a second process after removing the protective film to form a second element group in correspondence with each of a plurality of regions into which each second substrate is divided;

collecting, in a process thereof, second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

24. A production method for a composite product according to claim 12, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

13. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line;

attaching a first identifier to each of first substrates;

assigning process processing conditions with respect to each first substrate by relating the process processing conditions to the first identifier;

storing information on the processing conditions in storage means;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

storing control information as the set of process processing conditions according to the first identifier in the storage means;

managing process progress information from the second identifiers and process processing information from the first identifiers with an information processor;

producing a product in which a first device group is formed in each of a plurality of regions into which each of the first substrates is divided; and

collecting first information about the first device group formed on each of the first substrates between particular process steps in the first process;

storing the first information in the storage means by relating the information to the first identifier;

using a second production line in which a product licensed from a patent holder is used, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, the method comprising, as processing in the second processing line;

dividing each of the first substrates into second substrates in a second production line;

treating a group of the second substrates as a second lot to in accordance with a second process to form a second element group in correspondence with each of a plurality of regions into which each of the second substrates is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

25. A production method for a composite product according to claim 13, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.

14. A production method comprising:

using a first production line which is formed based on a production method licensed from a patent holder, which is constituted by a plurality of production facilities, and to which a plurality of processing conditions are applicable, as processing in the first processing line;

attaching a first identifier to each of first substrates;

assigning process processing conditions with respect to each of first substrates by relating the process processing conditions to the first identifier;

storing information on the processing conditions in storage means;

accommodating a group of the first substrates in a carrier;

attaching a second identifier for identification of the group of first substrates to the carrier;

storing control information as the set of process processing conditions according to the first identifier in the storage means;

managing process progress information from the second identifiers and process processing information from the first identifiers with an information processor;

producing a product in which a first element group is formed in each of a plurality of regions into which each of the first substrates is divided;

collecting first quality information or characteristic information about the first element group formed on each of the first substrates between particular process steps in the first process, and storing the collected information in the storage means by relating the information to the first identifier;

forming on the first substrates a protective film for preventing the first element group from breaking due to an environmental contamination or static electricity;

transporting the first substrates from the first production line to the second production line;

using a second production line in which a product licensed from a patent holder is used, which is constituted by a plurality of production facilities, and in which a plurality of processing conditions can be set, the method comprising, as processing in the second processing line;

dividing each of the first substrates into second substrates;

treating as a second lot a group formed by the second substrates;

processing the group of second substrates by a second process after removing the protective film to form a second element group in correspondence with each of a plurality of regions into which each second substrate is divided;

collecting second information about the second element group or third information about a state of the first element group and the second element group in which the first and second element groups between particular process steps in the second process;

collating the first information and the second information or the third information to form information indicating addresses of the regions identified as nondefective in the second substrates;

separating respective regions from the second substrates to form a plurality of unit functional member;

selecting only functional members recognized as nondefective based on the information indicating the addresses;

combining each selected functional member and at least one constituent member other than the functional member into a module; and

producing a product in which this module is incorporated.

26. A production method for a composite product according to claim 14, wherein the first information has first quality information or characteristic information, the second information has the second quality information or characteristic information and the third information has the third quality information or product information.