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Multi-beam multi-column electron beam inspection system

  • US 20030066963A1
  • Filed: 08/15/2002
  • Published: 04/10/2003
  • Est. Priority Date: 02/19/2000
  • Status: Active Grant
First Claim
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1. An electron optics assembly for a multi-column electron beam inspection system comprising:

  • a single focus electrode mounting plate, a multiplicity of mounting plate apertures extending through said mounting plate, such that there is a corresponding mounting plate aperture for each column; and

    a multiplicity of independently alignable focus electrodes coupled to said mounting plate, such that there is a corresponding independently alignable focus electrode for each column.

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