Multi-beam multi-column electron beam inspection system

• US 20030066963A1
• Filed: 08/15/2002
• Published: 04/10/2003
• Est. Priority Date: 02/19/2000
• Status: Active Grant

• Current Assignee: Multibeam Corporation
• Original Assignee: Multibeam Systems, Inc. (Multibeam Corporation)
• Inventors: Parker, N. William, Miller, S. Daniel
• Granted Patent: US 6,734,428 B2
• Time in Patent Office: Days
• US Class Current: 250/310
• CPC Class Codes: G21K 1/087 by electrical means
• CPC Class Codes: G21K 5/10 with provision for relative movement of beam source and object to be irradiated
• CPC Class Codes: H01J 2237/04924 electrostatic
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

An electron optics assembly for a multi-column electron beam inspection tool comprises a single accelerator structure and a single focus electrode mounting plate for all columns; the electron optical components are one per column and are independently alignable. The accelerator structure comprises first and final accelerator electrodes with a set of accelerator plates in between; the first and final accelerator plates have an aperture for each column and the accelerator plates have a single aperture such that the electron optical axes for all columns pass through the single aperture. Independently alignable focus electrodes are attached to the focus electrode mounting plate, allowing each electrode to be aligned to the electron optical axis of its corresponding column. There is one electron gun per column, mounted on the top of the single accelerator structure. In other embodiments, the electron guns are mounted to a single gun mounting plate positioned above the accelerator structure.

Claims

1. An electron optics assembly for a multi-column electron beam inspection system comprising:

a single focus electrode mounting plate, a multiplicity of mounting plate apertures extending through said mounting plate, such that there is a corresponding mounting plate aperture for each column; and

a multiplicity of independently alignable focus electrodes coupled to said mounting plate, such that there is a corresponding independently alignable focus electrode for each column.

2. An electron optics assembly as in claim 1 further comprising a multiplicity of independently alignable scanning deflectors positioned above and coupled to said focus electrode mounting plate, such that there is a corresponding independently alignable scanning deflector for each column.

3. An electron optics assembly as in claim 1 further comprising a multiplicity of independently alignable second focus electrodes positioned below and coupled to said focus electrode mounting plate, such that there is a corresponding independently alignable second focus electrode for each column.

4. An electron optics assembly as in claim 1 further comprising a multiplicity of independently alignable electron detectors positioned below and coupled to said focus electrode mounting plate, such that there is a corresponding independently alignable electron detector for each column.

5. An electron optics assembly as in claim 4 further comprising a multiplicity of independently alignable field-free tubes, for shielding the electron beams from the electric fields associated with said electron detectors, said field-free tubes positioned below and coupled to said focus electrode mounting plate and positioned adjacent to said electron detectors, such that there is a corresponding independently alignable field-free tube for each column.

6. An electron optics assembly as in claim 1 further comprising a multiplicity of independently alignable voltage contrast plates positioned below and coupled to said focus electrode mounting plate, such that there is a corresponding independently alignable voltage contrast plate for each column.

7. An electron optics assembly as in claim 1 further comprising a multiplicity of separate electron guns positioned above said focus electrode mounting plate, such that there is a corresponding electron gun for each column.

8. An electron optics assembly as in claim 7 further comprising a single gun mounting plate positioned above said focus electrode mounting plate, a multiplicity of gun mounting plate apertures extending through said gun mounting plate, such that there is a corresponding gun mounting plate aperture for each column, said multiplicity of electron guns being positioned above and coupled to said gun mounting plate at corresponding gun mounting plate apertures, such that there is a corresponding electron gun for each column.

9. An electron optics assembly as in claim 8, wherein each of said electron guns is independently alignable.

10. An electron optics assembly as in claim 8, wherein each of said electron guns comprises a single Schottky electron emitter.

11. An electron optics assembly as in claim 8, further comprising a multiplicity of independently alignable alignment deflectors positioned below and coupled to said gun mounting plate, such that there is a corresponding independently alignable alignment deflector for each column.

12. An electron optics assembly as in claim 7 further comprising an accelerator structure positioned between said electron guns and said focus electrode mounting plate.

13. An electron optics assembly as in claim 12 wherein said accelerator structure comprises:

a first accelerator electrode positioned below said electron guns, a multiplicity of first electrode apertures extending through said first electrode, such that there is a corresponding first electrode aperture for each column;

a final accelerator electrode positioned above said focus electrode mounting plate, a multiplicity of final electrode apertures extending through said final electrode, such that there is a corresponding final electrode aperture for each column; and

a set of accelerator plates positioned between said first and final accelerator electrodes, a single accelerator aperture extending through said accelerator plates, such that the optic axes for all columns pass through said accelerator aperture.

14. An electron optics assembly as in claim 13 wherein said first accelerator electrode is a gun mounting plate.

15. An electron optics assembly as in claim 13 further comprising a multiplicity of independently alignable beam defining discs coupled to said final accelerator plate, a multiplicity of beam defining apertures extending through said discs, such that there is a corresponding independently alignable beam defining aperture for each column.

16. An electron optics assembly as in claim 1 wherein the columns are arranged in an array.

17. An electron optics assembly as in claim 1 wherein the columns are arranged in a single row.

18. An electron optics assembly for a multi-column electron beam inspection system comprising:

a single gun mounting plate, a multiplicity of gun mounting plate apertures extending through said gun mounting plate, such that there is a corresponding gun mounting plate aperture for each column; and

a multiplicity of electron guns positioned above and coupled to said gun mounting plate at corresponding gun mounting plate apertures, such that there is a corresponding electron gun for each column.

19. An electron optics assembly as in claim 18, wherein each of said electron guns is independently alignable.

20. An electron optics assembly as in claim 18, wherein each of said electron guns comprises a single Schottky electron emitter.

21. An electron optics assembly as in claim 18, further comprising a multiplicity of independently alignable alignment deflectors positioned below and coupled to said gun mounting plate, such that there is a corresponding independently alignable alignment deflector for each column.

22. An accelerating structure for a multi-column electron beam inspection system comprising:

a first accelerator electrode, a multiplicity of first electrode apertures extending through said first electrode, such that there is a corresponding first electrode aperture for each column;

a final accelerator electrode, a multiplicity of final electrode apertures extending through said final electrode, such that there is a corresponding final electrode aperture for each column;

a set of accelerator plates positioned between said first and final accelerator electrodes, a single accelerator aperture extending through said accelerator plates, such that the optic axes for all columns pass through said aperture; and

a multiplicity of independently alignable beam defining discs coupled to said final accelerator plate, such that there is a corresponding independently alignable beam defining disc for each column.

23. An accelerator structure as in claim 22 wherein said first accelerator electrode is a gun mounting plate.