Automatic adjusting method for a goniometer and associated device

• US 20030068010A1
• Filed: 10/04/2002
• Published: 04/10/2003
• Est. Priority Date: 10/04/2001
• Status: Active Grant

• Current Assignee: X-Ray Research GmbH
• Original Assignee: X-Ray Research GmbH
• Inventors: Lentfer, Arno
• Granted Patent: US 6,831,962 B2
• Time in Patent Office: Days
• US Class Current: 378/81
• CPC Class Codes: G01N 23/20016 Goniometers

Abstract

In order to create a method for the automatic relative adjusting of the position coordinates (x_p, y_p, z_p) of at least one sample with respect to the center coordinates (x_m, y_m, z_m) of a goniometer (200) determined by the intersection point of the tilting axles (ω, χ, φ) as well as an associated device (100) through which the construction of goniometric systems is considerably simplified and moreover the costs for multiple circle systems are considerably reduced, it is proposed that, during a variation of the sample orientation or tilting,

the trajectory of the sample which is taking place, in particular the precession trajectory of the sample, can be dynamically compensated about the center coordinates (x_m, y_m, z_m) and

the sample can be dynamically held at the measuring point, while

[a] the trajectory of the sample about the center coordinates (x_m, y_m, z_m) is recorded and exploited by digital image processing,

[b] correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) are calculated from the exploited and recorded trajectory in order to dynamically compensate the trajectory and

[c] the sample is moved according to the calculated correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) into at least one of the directions of translation (x, y, z) so that this translational shifting is dynamically coupled to the moving of the tilting axles (ω, χ, φ) of the goniometer (200) determined by the variation of the sample orientation or tilting.

Claims

1. A method for the automatic relative adjusting of the position coordinates (x_p, y_p, z_p) of at least

one sample which is on a sample holder or table of a goniometer (200),

which is to be examined by means of the goniometer (200),

which is movable in its position (x_p, y_p, z_p) in at least one direction of translation (x, y, z) and

which is rotatable about at least one tilting axle (ω

, χ

, φ

) in its orientation or tilting

 

with respect to the center coordinates (x_m, y_m, z_m) of the goniometer (200) determined by the intersection point of the tilting axles (ω

, χ

, φ

)

characterized in

that during a variation of the sample orientation or tilting

the trajectory of the sample which is taking place, in particular the precession trajectory, can be dynamically compensated about the center coordinates (x_m, y_m, z_m) and

the sample can in this way be dynamically held at the measuring point, while

[a] the trajectory of the sample about the center coordinates (x_m, y_m, z_m) is recorded and exploited by digital image processing,

[b] correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) are calculated from the exploited and recorded trajectory in order to dynamically compensate the trajectory and

[c] the sample is moved according to the calculated correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) into at least one of the directions of translation (x, y, z) so that this translational shifting is dynamically coupled to the movement of the tilting axles (ω

, χ

, φ

) of the goniometer (200) determined by the variation of the sample orientation or tilting.

2. A method according to claim 1, characterized in that the trajectory is recorded before the proper examination of the sample.

3. A method according to claim 1, characterized in that the trajectory is run through with an increased speed.

4. A device (100) for the automatic relative adjusting of the position coordinates (x_p, y_p, z_p) of at least

one sample which is on a sample holder or table of a goniometer (200),

which is to be examined by means of the goniometer (200) with respect to the center coordinates (x_m, y_m, z_m) of the goniometer (200) determined by the intersection point of the tilting axles (ω

, χ

, φ

) which shows

at least one translation mechanism (10) for moving the position (x_p, y_p, z_p) of the sample in at least one direction of translation (x, y, z) and

at least one rotation mechanism (20) for tilting the sample about at least one tilting axle (ω

, χ

, φ

).

characterized in

that at least one adjusting means (30) is associated with the translation mechanism (10) and the rotation mechanism (20), such that, during a variation of the sample orientation or tilting,

the trajectory of the sample which is taking place, in particular the precession trajectory of the sample, can be dynamically compensated about the center coordinates (x_m, y_m, z_m), and

the sample can be dynamically held at the measuring point, whereby the adjusting means (30)

has at least one recording means (32) for recording the trajectory of the sample about the center coordinates (x_m, y_m, z_m),

at least one exploitation means (34) for exploiting the recorded trajectory by digital image processing and

at least one calculating means (36) for calculating correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) from the exploited trajectory in order to dynamically compensate this trajectory,

to calculate correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) according to which the sample can be moved by means of the translation mechanism (10) into at least one of the directions of translation (x, y, z) so that this translational shifting is dynamically coupled to the movement of the tilting axles (ω

, χ

, φ

) of the goniometer (200) determined by the variation of the sample orientation or tilting.

5. A device according to claim 4, characterized in that the recording means (32) is configured as at least one electronic camera system.

6. A device according to claim 4, characterized in that the camera system is completed by at least one preferably electronic microscope or by at least one preferably electronic stereomicroscope.

7. A device according to claim 4, characterized in that the exploiting means (34) and the calculating means (36) are combined with at least one preferably electronic control means switched between the rotation mechanism (20) and the translation mechanism (10).

8. A goniometer (200),

having at least one device (100) for the automatic relative adjusting of the position coordinates (x_p, y_p, z_p) of at least

one sample which is on a sample holder or table of a goniometer (200),

which is to be examined by means of the goniometer (200) with respect to the center coordinates (x_m, y_m, z_m) of the goniometer (200) determined by the intersection point of the tilting axles (ω

, χ

, φ

) which shows

at least one translation mechanism (10) for moving the position (x_p, y_p, z_p) of the sample in at least one direction of translation (x, y, z) and

at least one rotation mechanism (20) for tilting the sample about at least one tilting axle (ω

, χ

, φ

)

characterized in

that at least one adjusting means (30) is associated with the translation mechanism (10) and the rotation mechanism (20), such that, during a variation of the sample orientation or tilting,

the trajectory of the sample which is taking place, in particular the precession trajectory of the sample, can be dynamically compensated about the center coordinates (x_m, y_m, z_m), and

the sample can be dynamically held at the measuring point, whereby the adjusting means (30)

has at least one recording means (32) for recording the trajectory of the sample about the center coordinates (x_m, y_m, z_m),

at least one exploitation means (34) for exploiting the recorded trajectory by digital image processing and

at least one calculating means (36) for calculating correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) from the exploited trajectory in order to dynamically compensate this trajectory,

to calculate correction coordinates (x_m-x_p, y_m-y_p, z_m-z_p) according to which the sample can be moved by means of the translation mechanism (10) into at least one of the directions of translation (x, y, z) so that this translational shifting is dynamically coupled to the movement of the tilting axles (ω

, χ

, φ

) of the goniometer (200) determined by the variation of the sample orientation or tilting.

9. A goniometer according to claim 8, characterized in that the translation mechanism (10) is placed substantially outside the rotation mechanism (20).

10. A goniometer according to claim 9, characterized in that the translation mechanism (10) is placed substantially inside the rotation mechanism (20).