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Barrier film and method for production thereof

  • US 20030068534A1
  • Filed: 05/31/2002
  • Published: 04/10/2003
  • Est. Priority Date: 10/13/2000
  • Status: Active Grant
First Claim
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1. A barrier-forming film comprising a substrate film having a vapor-deposited inorganic oxide film, further subjected to an annealing treatment, wherein the steam permeability is within a range of from 2.0 to 0.000001 g/m2.day and the oxygen permeability is within a range of from 2.0 to 0.000001 cc/m2.day.atm.

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