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Multiaxial inertial sensor system and method of producing same

  • US 20030070483A1
  • Filed: 07/17/2002
  • Published: 04/17/2003
  • Est. Priority Date: 07/17/2001
  • Status: Abandoned Application
First Claim
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1. A multiaxial inertial sensor system, comprising:

  • a plurality of rigid circuit substrates;

    connecting structures including one of flexible and rigid structures electrically and mechanically interconnecting the plurality of rigid circuit substrates; and

    a plurality of sensor chips mounted on the plurality of rigid circuit substrates at a wafer level, the plurality of sensor chips electrically contacting the plurality of rigid circuit substrates;

    wherein each of the plurality of sensor chips is assigned to a respective sensor axis.

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